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1. 发明授权

US08746666B2 Media carrier 失效
标题翻译：媒体载体
公开(公告)号：US08746666B2
公开(公告)日：2014-06-10
申请号：US13101280
申请日：2011-05-05
申请人： Richard Hertel , Julian Blake , Edward Macintosh , Alexander Kontos , Frank Sinclair , Christopher Rowland , Mayur Jagtap , Sankar Ganesh Kolappan
发明人： Richard Hertel , Julian Blake , Edward Macintosh , Alexander Kontos , Frank Sinclair , Christopher Rowland , Mayur Jagtap , Sankar Ganesh Kolappan
IPC分类号： B23Q3/06
CPC分类号： H01L21/68771 , G11B23/0021 , G11B23/0317 , G11B23/0327
摘要： A media carrier, adapted to hold a plurality of pieces of magnetic media, is disclosed. This media carrier can be placed on the workpiece support, or platen, allowing the magnetic media to be processed. In some embodiments, the media carrier is designed such that only one side of the magnetic media is exposed, requiring a robot or other equipment to invert each piece of media in the carrier to process the second side. In other embodiments, the media carrier is designed such that both sides of the magnetic media are exposed. In this scenario, the media carrier is inverted on the platen to allow processing of the second side.
摘要翻译：公开了适于容纳多个磁性介质的介质载体。该介质载体可以放置在工件支撑件或压板上，允许磁性介质被处理。在一些实施例中，介质载体被设计成使得只有磁性介质的一侧被暴露，需要机器人或其他设备来反转载体中的每个介质以处理第二侧。在其他实施例中，介质载体被设计成使得磁性介质的两侧都被暴露。在这种情况下，媒体载体在压板上反转，以允许处理第二面。

2. 发明申请

US20120280442A1 MEDIA CARRIER 失效
标题翻译：媒体承运人
公开(公告)号：US20120280442A1
公开(公告)日：2012-11-08
申请号：US13101280
申请日：2011-05-05
申请人： Richard J. Hertel , Julian G. Blake , Edward D. MacIntosh , Alexander C. Kontos , Frank Sinclair , Christopher A. Rowland , Mayur Jagtap , Sankar Ganesh Kolappan
发明人： Richard J. Hertel , Julian G. Blake , Edward D. MacIntosh , Alexander C. Kontos , Frank Sinclair , Christopher A. Rowland , Mayur Jagtap , Sankar Ganesh Kolappan
IPC分类号： B23Q3/06 , B25B11/00
CPC分类号： H01L21/68771 , G11B23/0021 , G11B23/0317 , G11B23/0327
摘要： A media carrier, adapted to hold a plurality of pieces of magnetic media, is disclosed. This media carrier can be placed on the workpiece support, or platen, allowing the magnetic media to be processed. In some embodiments, the media carrier is designed such that only one side of the magnetic media is exposed, requiring a robot or other equipment to invert each piece of media in the carrier to process the second side. In other embodiments, the media carrier is designed such that both sides of the magnetic media are exposed. In this scenario, the media carrier is inverted on the platen to allow processing of the second side.
摘要翻译：公开了适于容纳多个磁性介质的介质载体。该介质载体可以放置在工件支撑件或压板上，允许磁性介质被处理。在一些实施例中，介质载体被设计成使得只有磁性介质的一侧被暴露，需要机器人或其他设备来反转载体中的每个介质以处理第二侧。在其他实施例中，介质载体被设计成使得磁性介质的两侧都被暴露。在这种情况下，媒体载体在压板上反转，以允许处理第二面。

3. 发明授权

US08466431B2 Techniques for improving extracted ion beam quality using high-transparency electrodes 有权
标题翻译：使用高透明电极提高离子束质量的技术
公开(公告)号：US08466431B2
公开(公告)日：2013-06-18
申请号：US12370555
申请日：2009-02-12
申请人： James S. Buff , Svetlana Radovanov , Bon-Woong Koo , Wilhelm Platow , Frank Sinclair , D. Jeffrey Lischer , Craig R. Chaney , Steven Borichevsky , Eric R. Cobb , Mayur Jagtap , Kenneth H. Purser , Victor Benveniste , Shardul S. Patel
发明人： James S. Buff , Svetlana Radovanov , Bon-Woong Koo , Wilhelm Platow , Frank Sinclair , D. Jeffrey Lischer , Craig R. Chaney , Steven Borichevsky , Eric R. Cobb , Mayur Jagtap , Kenneth H. Purser , Victor Benveniste , Shardul S. Patel
IPC分类号： H01J37/15 , G21K5/10
CPC分类号： H01J37/3171 , H01J27/024 , H01J37/08 , H01J37/09 , H01J37/304 , H01J2237/0453 , H01J2237/0458 , H01J2237/083 , H01J2237/24542
摘要： Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion source comprises a faceplate with an aperture for the ion beam to travel therethrough. The apparatus may also comprise a set of extraction electrodes comprising at least a suppression electrode and a high-transparency ground electrode, wherein the set of extraction electrodes may extract the ion beam from the ion source via the faceplate, and wherein the high-transparency ground electrode may be configured to optimize gas conductance between the suppression electrode and the high-transparency ground electrode for improved extracted ion beam quality.
摘要翻译：公开了使用高透明电极提高离子束质量的技术。在一个特定的示例性实施例中，技术可以被实现为用于离子注入的装置。该装置可以包括用于产生离子束的离子源，其中离子源包括具有离子束穿过其中的孔的面板。该装置还可以包括至少包括抑制电极和高透明度接地电极的一组提取电极，其中所述提取电极组可以经由面板从离子源提取离子束，并且其中高透明度接地电极可以被配置为优化抑制电极和高透明度接地电极之间的气体传导，以改善提取的离子束质量。

4. 发明申请

US20100200768A1 TECHNIQUES FOR IMPROVING EXTRACTED ION BEAM QUALITY USING HIGH-TRANSPARENCY ELECTRODES 有权
标题翻译：使用高透明电极改善提取离子质量的技术
公开(公告)号：US20100200768A1
公开(公告)日：2010-08-12
申请号：US12370555
申请日：2009-02-12
申请人： JAMES BUFF , SVETLANA RADOVANOV , BON-WOONG KOO , WILHELM PLATOW , FRANK SINCLAIR , JEFFREY D. LISCHER , CRAIG CHANEY , STEVEN BORICHEVSKY , ERIC R. COBB , MAYUR JAGTAP , KENNETH PURSER , VICTOR M. BENVENISTE , SHARDUL S. PATEL
发明人： JAMES BUFF , SVETLANA RADOVANOV , BON-WOONG KOO , WILHELM PLATOW , FRANK SINCLAIR , JEFFREY D. LISCHER , CRAIG CHANEY , STEVEN BORICHEVSKY , ERIC R. COBB , MAYUR JAGTAP , KENNETH PURSER , VICTOR M. BENVENISTE , SHARDUL S. PATEL
IPC分类号： H01J27/00
CPC分类号： H01J37/3171 , H01J27/024 , H01J37/08 , H01J37/09 , H01J37/304 , H01J2237/0453 , H01J2237/0458 , H01J2237/083 , H01J2237/24542
摘要： Techniques for improving extracted ion beam quality using high-transparency electrodes are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for ion implantation. The apparatus may comprise an ion source for generating an ion beam, wherein the ion source comprises a faceplate with an aperture for the ion beam to travel therethrough. The apparatus may also comprise a set of extraction electrodes comprising at least a suppression electrode and a high-transparency ground electrode, wherein the set of extraction electrodes may extract the ion beam from the ion source via the faceplate, and wherein the high-transparency ground electrode may be configured to optimize gas conductance between the suppression electrode and the high-transparency ground electrode for improved extracted ion beam quality.
摘要翻译：公开了使用高透明电极提高离子束质量的技术。在一个特定的示例性实施例中，技术可以被实现为用于离子注入的装置。该装置可以包括用于产生离子束的离子源，其中离子源包括具有离子束穿过其中的孔的面板。该装置还可以包括至少包括抑制电极和高透明度接地电极的一组提取电极，其中所述提取电极组可以经由面板从离子源提取离子束，并且其中高透明度接地电极可以被配置为优化抑制电极和高透明度接地电极之间的气体传导，以改善提取的离子束质量。

5. 发明申请

US20120000606A1 PLASMA UNIFORMITY SYSTEM AND METHOD 审中-公开
标题翻译：等离子体均匀系统和方法
公开(公告)号：US20120000606A1
公开(公告)日：2012-01-05
申请号：US12829497
申请日：2010-07-02
申请人： Rajesh Dorai , Kamal Hadidi , Mayur Jagtap
发明人： Rajesh Dorai , Kamal Hadidi , Mayur Jagtap
IPC分类号： C23F1/08 , C23C16/50 , H05B31/02 , C23C16/458
CPC分类号： H01J37/32633 , H01J37/32412 , H01J37/32532
摘要： A plasma processing tool comprises a plasma chamber configured to generate a plasma from a gas introduced into the chamber where the generated plasma has an electron plasma frequency. A plurality of electrodes disposed within the chamber. Each of the electrodes configured to create a rapidly-rising-electric-field pulse in a portion of the plasma contained in the chamber. Each of said rapidly-rising-electric-field pulses having a rise time substantially equal to or less than the inverse of the electron plasma frequency and a duration of less than the inverse of the ion plasma frequency. In this manner, the electron energy distribution in the generated plasma may be spatially and locally modified thereby affecting the density, composition and temperature of the species in the plasma and consequently the uniformity of the density and composition of ions and neutrals directed at a target substrate.
摘要翻译：等离子体处理工具包括等离子体室，其被配置为从引入室中的气体产生等离子体，其中产生的等离子体具有电子等离子体频率。设置在室内的多个电极。每个电极被配置为在腔室中包含的等离子体的一部分中产生快速上升的电场脉冲。所述快速上升电场脉冲中的每一个具有基本上等于或小于电子等离子体频率的倒数的上升时间和小于离子等离子体频率的倒数的持续时间。以这种方式，所产生的等离子体中的电子能量分布可以在空间上和局部改变，从而影响等离子体中物质的密度，组成和温度，从而影响靶向靶基质的离子和中性粒子的密度和组成的均匀性。

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