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1. 发明公开

US20240219460A1 ENHANCED ELECTRON BEAM (E-BEAM) APPARATUS AND METHODOLOGY WITH NANO-SCALE E-BEAM PROBE TIPS FOR FAULT ISOLATION IN INTEGRATED CIRCUITS AND OTHER STRUCTURES 审中-公开
公开(公告)号：US20240219460A1
公开(公告)日：2024-07-04
申请号：US18090415
申请日：2022-12-28
申请人： Xianghong TONG , Jennifer HUENING , Joshua KEVEK , Kimberlee CELIO , Tristan DEBORDE , Prasoon JOSHI , May Ling OH , Hyuk Ju RYU , Mitchell SENGER , Martin VON HAARTMAN , Yunfei WANG , Shuai ZHAO
发明人： Xianghong TONG , Jennifer HUENING , Joshua KEVEK , Kimberlee CELIO , Tristan DEBORDE , Prasoon JOSHI , May Ling OH , Hyuk Ju RYU , Mitchell SENGER , Martin VON HAARTMAN , Yunfei WANG , Shuai ZHAO
IPC分类号： G01R31/307 , G01R31/311
CPC分类号： G01R31/307 , G01R31/311
摘要： This disclosure describes systems, methods, and devices related to electron beam and nanoprobing techniques with probe tips for fault isolation in integrated circuits. A method may include generating a signal at a circuit device under test while a probe tip electrically interacts with a transistor of the circuit device under test; detecting, based on the signal and the laser at the transistor, an electrical output of the circuit device under test; and identifying, based on the electrical output, a location of a fault at the circuit device under test.

2. 发明申请

US20080081407A1 Protective coating for mark preservation 审中-公开
标题翻译：保护涂层保护标记
公开(公告)号：US20080081407A1
公开(公告)日：2008-04-03
申请号：US11529953
申请日：2006-09-29
申请人： May Ling Oh , Lim Chong Sim
发明人： May Ling Oh , Lim Chong Sim
IPC分类号： H01L21/8249
CPC分类号： H01L22/12
摘要： A polymer coating material is disposed at a surface of a semiconductor substrate, superimposing a readable mark formed thereupon. A perimeter of the coating material is configured to correspond approximately with a perimeter of the mark, and a thickness of the coating material is configured to be relatively conformal with the surface of the substrate. The mark remains readable through the coating material throughout manufacturing, reliability testing, and normal use. A substrate so formed may constitute a portion of an assembly and/or system (e.g., computer system). Throughout manufacturing, reliability testing and normal use, a readable mark provides product identification, traceability, and other benefits.
摘要翻译：聚合物涂层材料设置在半导体衬底的表面上，叠加形成在其上的可读标记。涂层材料的周边被构造成大致对应于标记的周边，并且涂层材料的厚度被配置为与衬底的表面相对地保形。在制造，可靠性测试和正常使用过程中，涂层材料的标记依然可读。如此形成的基板可以构成组件和/或系统的一部分（例如，计算机系统）。在整个制造过程中，可靠性测试和正常使用，可读标记提供产品识别，可追溯性和其他优点。

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