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1. 发明申请

US20080053228A1 Tri-axis accelerometer having a single proof mass and fully differential output signals 有权
标题翻译：三轴加速度计具有单个检测质量和全差分输出信号
公开(公告)号：US20080053228A1
公开(公告)日：2008-03-06
申请号：US11513669
申请日：2006-08-30
申请人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
发明人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
IPC分类号： G01P15/00
CPC分类号： G01P15/09 , G01P15/0802 , G01P15/123 , G01P15/18 , G01P2015/084 , Y10T29/42
摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
摘要翻译：三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧包括感测单元。

2. 发明申请

US20080050845A1 Microelectromechanical systems encapsulation process 有权
标题翻译：微机电系统封装工艺
公开(公告)号：US20080050845A1
公开(公告)日：2008-02-28
申请号：US11510040
申请日：2006-08-25
申请人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
发明人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
IPC分类号： H01L21/00
CPC分类号： B81C1/0096 , B81B3/0005
摘要： An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.
摘要翻译：描述了一种封装的MEMS工艺，其包括在高于450℃的温度下在加工步骤下稳定的高温抗静电涂层。涂层在器件释放后，但在封装层封口之前应用。或者，可以在封装之前将抗静电涂层直接施加到释放的装置。

3. 发明授权

US09003885B2 Tri-axis accelerometer having a single proof mass and fully differential output signals 有权
标题翻译：三轴加速度计具有单个检测质量和全差分输出信号
公开(公告)号：US09003885B2
公开(公告)日：2015-04-14
申请号：US13831040
申请日：2013-03-14
申请人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
发明人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
IPC分类号： G01P15/00 , G01P15/09 , G01P15/08 , G01P15/12 , G01P15/18
CPC分类号： G01P15/09 , G01P15/0802 , G01P15/123 , G01P15/18 , G01P2015/084 , Y10T29/42
摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
摘要翻译：三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧包括感测单元。

4. 发明授权

US08418559B2 Tri-axis accelerometer having a single proof mass and fully differential output signals 有权
公开(公告)号：US08418559B2
公开(公告)日：2013-04-16
申请号：US12825046
申请日：2010-06-28
申请人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
发明人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
IPC分类号： G01P15/09
CPC分类号： G01P15/09 , G01P15/0802 , G01P15/123 , G01P15/18 , G01P2015/084 , Y10T29/42
摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.

5. 发明申请

US20100263447A1 TRI-AXIS ACCELEROMETER HAVING A SINGLE PROOF MASS AND FULLY DIFFERENTIAL OUTPUT SIGNALS 有权
标题翻译：具有单个防伪质量和完全差异输出信号的三轴加速度计
公开(公告)号：US20100263447A1
公开(公告)日：2010-10-21
申请号：US12825046
申请日：2010-06-28
申请人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
发明人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
IPC分类号： G01P15/09 , H04R17/00
CPC分类号： G01P15/09 , G01P15/0802 , G01P15/123 , G01P15/18 , G01P2015/084 , Y10T29/42
摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
摘要翻译：三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧包括感测单元。

6. 发明申请

US20090065928A1 Anti-stiction technique for electromechanical systems and electromechanical device employing same 有权
标题翻译：机电系统的抗静电技术和采用该机电系统的机电装置
公开(公告)号：US20090065928A1
公开(公告)日：2009-03-12
申请号：US12264774
申请日：2008-11-04
申请人： Markus Lutz , Aaron Partidge , Wilhelm Frey , Markus Ulm , Matthias Metz , Brian Stark , Gary Yama
发明人： Markus Lutz , Aaron Partidge , Wilhelm Frey , Markus Ulm , Matthias Metz , Brian Stark , Gary Yama
IPC分类号： H01L23/12
CPC分类号： B81C1/0096 , B81B3/0005 , B81C2201/112 , B82Y30/00 , H01L2224/13 , H01L2924/1461 , H01L2924/00
摘要： A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.
摘要翻译：机械结构设置在室中，其至少一部分由封装结构限定。第一种方法提供了通道盖，其具有至少部分地设置在防静电通道的上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。第二种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。该至少一个部分与机电装置分开制造，然后固定在机电装置上。第三种方法提供了通道盖，其具有至少部分地设置在防静电通道上方或至少一部分中的至少一个部分，以密封抗静脉通道。所述至少一个部分可以包括线球，螺柱，金属箔或焊料预制件。一种器件包括衬底，封装结构和机械结构。抗静电层设置在机械结构的至少一部分上。在基板和封装结构中的至少一个中形成抗静电通道。帽至少部分地具有设置在抗静电通道上方或至少一部分中的至少一个预制件部分，以密封抗静电通道。

7. 发明申请

US20080265712A1 Energy Harvesting Device Manufactured by Print Forming Processes 有权
标题翻译：能量收集装置由印刷成型工艺制造
公开(公告)号：US20080265712A1
公开(公告)日：2008-10-30
申请号：US12172369
申请日：2008-07-14
申请人： Markus Ulm , Brian Stark , Matthias Metz
发明人： Markus Ulm , Brian Stark , Matthias Metz
IPC分类号： H01L41/24 , H04R17/00
CPC分类号： B60C23/0411 , H01L41/1136 , H01L41/331 , H01L41/43 , H02N2/186 , H02N2/22 , Y10T29/42 , Y10T29/435 , Y10T29/49007 , Y10T29/49172 , Y10T29/49176 , Y10T29/49224
摘要： Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.
摘要翻译：描述制造能量收集装置的实施例。在一个实施例中，通过印刷成型方法注射成型方法产生用于从被感测环境收集振动能量的壳体和集成压电悬臂。悬臂装置由压电材料构件和与压电构件耦合的高密度材料的检验质量组成。印刷形成方法用于构建装置的基底和壁以及压电构件的中性层。印刷金属层以形成压电元件的电极层和器件的电接触部分。无源元件也可以形成为器件层的一部分。整个组件可以封装在塑料中。

8. 发明申请

US20080122020A1 Microelectromechanical devices and fabrication methods 有权
标题翻译：微机电装置及制造方法
公开(公告)号：US20080122020A1
公开(公告)日：2008-05-29
申请号：US11594525
申请日：2006-11-07
申请人： Matthias Metz , Zhiyu Pan , Brian Stark , Markus Ulm , Gary Yama
发明人： Matthias Metz , Zhiyu Pan , Brian Stark , Markus Ulm , Gary Yama
IPC分类号： H01L29/84 , H01L21/56
CPC分类号： B81C1/00301 , B81B2207/015 , B81B2207/097 , B81C2203/0136 , B81C2203/0145 , H01L21/56 , H01L2924/0002 , H01L2924/00
摘要： There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device, having mechanical structures encapsulated in a chamber prior to final packaging. An embodiment further includes location of a piezoelectric material as part of a semiconductor sensing structure. The semiconductor sensing structure, in conjunction with the piezoelectric material, can be used as a sensing device to provide an output signal associated with a sensed event.
摘要翻译：这里描述和说明了许多发明。在一个方面，本发明涉及MEMS器件，以及制造或制造MEMS器件的技术，其具有在最终封装之前封装在腔室中的机械结构。实施例还包括作为半导体感测结构的一部分的压电材料的位置。结合压电材料的半导体感测结构可以用作感测装置以提供与感测到的事件相关联的输出信号。

9. 发明申请

US20080079333A1 Energy harvesting device manufactured by print forming processes 有权
标题翻译：通过印刷成型工艺制造的能量收集装置
公开(公告)号：US20080079333A1
公开(公告)日：2008-04-03
申请号：US11541966
申请日：2006-10-02
申请人： Markus Ulm , Brian Stark , Matthias Metz
发明人： Markus Ulm , Brian Stark , Matthias Metz
IPC分类号： H01L41/113
CPC分类号： B60C23/0411 , H01L41/1136 , H01L41/331 , H01L41/43 , H02N2/186 , H02N2/22 , Y10T29/42 , Y10T29/435 , Y10T29/49007 , Y10T29/49172 , Y10T29/49176 , Y10T29/49224
摘要： Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.
摘要翻译：描述制造能量收集装置的实施例。在一个实施例中，通过印刷成型方法注射成型方法产生用于从被感测环境收集振动能量的壳体和集成压电悬臂。悬臂装置由压电材料构件和与压电构件耦合的高密度材料的检验质量组成。印刷形成方法用于构建装置的基底和壁以及压电构件的中性层。印刷金属层以形成压电元件的电极层和器件的电接触部分。无源元件也可以形成为器件层的一部分。整个组件可以封装在塑料中。

10. 发明申请

US20090278214A1 Microelectromechanical Systems Encapsulation Process 有权
标题翻译：微机电系统封装工艺
公开(公告)号：US20090278214A1
公开(公告)日：2009-11-12
申请号：US12506219
申请日：2009-07-20
申请人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
发明人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
IPC分类号： H01L29/84
CPC分类号： B81C1/0096 , B81B3/0005
摘要： An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.
摘要翻译：描述了一种封装的MEMS工艺，其包括在高于450℃的温度下在加工步骤下稳定的高温抗静电涂层。涂层在器件释放后，但在封装层封口之前应用。或者，可以在封装之前将抗静电涂层直接施加到释放的装置。

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