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1. 发明授权

US06759633B2 Heat treating device 有权
标题翻译：热处理装置
公开(公告)号：US06759633B2
公开(公告)日：2004-07-06
申请号：US10258797
申请日：2002-10-28
申请人： Masato Kubodera , Masaki Sohma , Katsumi Sekiguchi , Shigeru Kasai
发明人： Masato Kubodera , Masaki Sohma , Katsumi Sekiguchi , Shigeru Kasai
IPC分类号： F27B514
CPC分类号： C23C16/46 , C23C16/4411 , H01L21/67109
摘要： A heat treatment system for controlling the temperature in a processing vessel. The system includes a cylindrical processing vessel; a supporting table, raised by a support from the bottom portion of the processing vessel, for mounting thereon an object to be processed; and a processing object heating part provided in the supporting table, for heating the object to be processed. In addition a thermoelectric conversion element capable of selectively heating or cooling is provided in the bottom portion of the processing vessel, a resistive heater is provided in the side wall of the processing vessel, and a temperature control part for controlling the operations of the thermoelectric conversion element and the resistive heater is provided. Thus, it is not only possible to appropriately control the temperature in the processing vessel, but it is also possible to reduce space and energy, by combining the resistive heater with a thermoelectric conversion element.
摘要翻译：一种用于控制处理容器中的温度的热处理系统。该系统包括圆柱形处理容器; 支撑台，由处理容器的底部的支撑件升起，用于在其上安装待加工物体; 以及设置在支撑台中的加工对象加热部，用于加热被加工物。此外，在处理容器的底部设置能够选择性地加热或冷却的热电转换元件，在处理容器的侧壁中设置电阻加热器，以及用于控制热电转换操作的温度控制部元件和电阻加热器。因此，不仅可以适当地控制处理容器中的温度，而且还可以通过组合电阻加热器和热电转换元件来减小空间和能量。

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