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    • 2. 发明授权
    • Inner diameter saw slicing machine
    • 内径锯切机
    • US5413521A
    • 1995-05-09
    • US158856
    • 1993-11-29
    • Seiichi TerashimaMasao Kita
    • Seiichi TerashimaMasao Kita
    • H01L21/304B23D59/00B23D59/02B28D1/22B28D5/00B28D5/02C30B33/00B24B49/00
    • B28D5/028B23D59/002B23D59/02B28D5/0094
    • The open end of the nozzle 42 is positioned close to and facing the surface of the metal base 20 on the side were the portion of the semiconductor ingot is to be cut off. An electromagnetic valve 46 is provided in the passage through which compressed air is supplied to the nozzle 42. The initial position of the blade 19 is detected by the detector 50U and the counter 52 measures the distance the blade 19 travels downward from the detected position and then the comparator 56 detects the point at which the measured value matches the value set on the numeric value setting device 54. The electromagnetic valve 46 is opened to emit compressed air from the nozzle 42 after this detection, until the detection of the lower limit position of the blade 19 by the detector 50D. This compressed air travels along in the direction of the rotation of the metal base 20 to enter the notch of the partially cut portion of the semiconductor ingot 10 made by the inner circumference cutting edge 22 and to consequently blow out the liquid coolant present between the metal base 20 and the semiconductor ingot 10.
    • 喷嘴42的开口端靠近并面对金属基体20的表面,半导体晶锭的部分被切掉。 电磁阀46设置在通道中,压缩空气通过该通道供应到喷嘴42.刀片19的初始位置由检测器50U检测,并​​且计数器52测量刀片19从检测位置向下行进的距离, 那么比较器56检测测量值与在数值设定装置54上设定的值相匹配的点。电磁阀46被打开以在该检测之后从喷嘴42发出压缩空气,直到检测到下限位置 通过检测器50D。 该压缩空气沿着金属基座20的旋转方向行进,进入由内周切削刃22制成的半导体锭10的部分切削部分的切口,从而吹出金属 基座20和半导体块10。
    • 5. 发明授权
    • Device for preventing idle rotation in cylindrical ingot grinder
    • 用于在圆柱锭磨机中防止怠速转动的装置
    • US5525092A
    • 1996-06-11
    • US197338
    • 1994-02-16
    • Yoshihiro HiranoSeiichi TerashimaMasao Kita
    • Yoshihiro HiranoSeiichi TerashimaMasao Kita
    • B23B23/00B23B29/00B24B5/04B24B5/50B24B41/06B24B49/10B24B49/00
    • B24B41/062B23B29/00B24B5/04B24B5/50Y10T82/10Y10T82/2564
    • When a cylindrical single crystal ingot terminating in generally conical parts at the opposite ends thereof is machined with a cylindrical grinder which is adapted to support the ingot in place by fastening the conical parts of the ingot to a spindle side chuck and a tailstock side chuck severally provided with a conical hole and grind and finish the cylindrical part of the ingot while keeping the ingot driven on the spindle side, the ingot is liable to produce idle rotation possibly to the extent of disrupting the grinding work. A device for preventing the ingot from producing this idle rotation is provided which comprises revolution number detecting means adapted to be fastened to the tailstock side chuck and consequently allowed to detect the revolution number thereof, pressing means for pressing the ingot in the axial direction thereof through the medium of the tailstock side chuck, and control means adapted to compare the revolution number of a spindle with the revolution number found by the revolution number detecting means and effect due control of the pressing means when the difference between the two revolution numbers surpasses a prescribed threshold. The due control effected by the control means is utilized additionally or exclusively for the purpose of stopping the driving on the spindle side in one modified embodiment.
    • 当圆柱形单晶锭在其相对端处终止于大致圆锥形部分时,被加工成圆柱形研磨机,该圆柱形磨床适于通过将锭的锥形部分分别固定到主轴侧夹头和尾座侧夹头来将棒固定在适当位置 设有锥形孔,研磨并完成铸锭的圆柱形部分,同时保持铸锭在主轴侧的驱动,铸锭易于产生怠速转动,可能会破坏研磨作业的程度。 提供了一种用于防止锭产生这种怠速转动的装置,其包括转数检测装置,其适于紧固到尾座侧卡盘,并因此允许检测其转数;压铸装置,其沿轴向方向按压铸锭 尾架侧卡盘的介质,以及适于将主轴转数与由转数检测装置求出的转数进行比较的控制装置,当两转数之间的差超过规定值时,对按压装置进行适当控制 阈。 为了在一个修改的实施例中停止在主轴侧的驱动的目的,由控制装置进行的适当的控制被额外地或排他地利用。