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    • 1. 发明授权
    • Two-dimensional optical deflector including only one pair of meander-type piezoelectric actuators and its driver
    • 二维光学偏转器仅包括一对曲折型压电致动器及其驱动器
    • US08649080B2
    • 2014-02-11
    • US13428868
    • 2012-03-23
    • Masanao Tani
    • Masanao Tani
    • G02B26/08
    • G02B26/0858G02B26/101
    • In a two-dimensional optical deflector having a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators includes a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.
    • 在具有反射镜和围绕反射镜的支撑体的二维光学偏转器中,曲折形式的第一和第二压电致动器相对于反射镜的第一轴线彼此相对设置。 每个第一第二压电致动器包括在每个压电体处折叠并且从支撑体连接到反射镜的多个压电悬臂。 每个压电悬臂与第一轴平行。 每个压电悬臂包括彼此平行并由衬底组合的第一和第二压电悬臂元件。 第二压电悬臂元件分为第一组压电悬臂元件和与第一组压电悬臂元件交替的第二组压电悬臂元件。
    • 2. 发明授权
    • Optical deflector
    • 光学偏转器
    • US07605965B2
    • 2009-10-20
    • US12355044
    • 2009-01-16
    • Masanao TaniYoshiaki YasudaMasahiro AkamatsuTakanori Aimono
    • Masanao TaniYoshiaki YasudaMasahiro AkamatsuTakanori Aimono
    • G02B26/08
    • G02B26/105B81B3/0051B81B7/0016G02B26/0858
    • An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.
    • 光学偏转器包括具有反射面的反射镜; 从所述反射镜的一侧向外延伸的扭杆; 围绕所述镜子的支撑件; 压电悬臂,其包括支撑体和形成在所述支撑体上的压电体,所述压电悬臂的一端连接到所述扭杆,所述压电悬臂的另一端连接到所述支撑件,所述压电悬臂在施加时 对压电体的驱动电压,由于压电性而呈现弯曲变形,从而使所述扭杆旋转,从而通过所述扭杆旋转驱动所述反射镜; 以及连接到所述支撑件的冲击衰减器,所述冲击衰减器设置在所述反射镜和所述支撑件之间的间隙中。
    • 4. 发明授权
    • Optical deflector
    • 光学偏转器
    • US07605966B2
    • 2009-10-20
    • US12357106
    • 2009-01-21
    • Masanao TaniYoshiaki YasudaMasahiro AkamatsuTakanori Aimono
    • Masanao TaniYoshiaki YasudaMasahiro AkamatsuTakanori Aimono
    • G02B26/08
    • G02B26/0858
    • An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from an end of said mirror; a support surrounding said mirror; a first piezoelectric element, one end of said first piezoelectric element being connected to said torsion bar, the other end of the first piezoelectric element being connected to and supported by said support, said first piezoelectric element having at least one piezoelectric cantilever, the cantilever including a supporting body and a piezoelectric body formed on the supporting body to exhibit bending deformation due to piezoelectricity when a driving voltage is applied to the piezoelectric body, said piezoelectric element rotarily driving said mirror through said torsion bar when said driving voltage is applied; and a second piezoelectric element, one end of said second piezoelectric element being connected to said torsion bar, the other end of the second piezoelectric element being connected to and supported by said mirror.
    • 光学偏转器包括具有反射面的反射镜; 从所述反射镜的端部向外延伸的扭杆; 围绕所述镜子的支撑件; 第一压电元件,所述第一压电元件的一端连接到所述扭杆,所述第一压电元件的另一端连接并由所述支撑件支撑,所述第一压电元件具有至少一个压电悬臂,所述悬臂包括 支撑体和压电体,形成在所述支撑体上,以在向所述压电体施加驱动电压时由于压电性而呈现弯曲变形,所述压电元件在施加所述驱动电压时通过所述扭杆旋转驱动所述反射镜; 以及第二压电元件,所述第二压电元件的一端连接到所述扭杆,所述第二压电元件的另一端连接并由所述反射镜支撑。
    • 5. 发明申请
    • OPTICAL DEFLECTOR
    • 光学偏光镜
    • US20090180167A1
    • 2009-07-16
    • US12355044
    • 2009-01-16
    • Masanao TaniYoshiaki YasudaMasahiro AkamatsuTakanori Aimono
    • Masanao TaniYoshiaki YasudaMasahiro AkamatsuTakanori Aimono
    • G02B26/08
    • G02B26/105B81B3/0051B81B7/0016G02B26/0858
    • An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.
    • 光学偏转器包括具有反射面的反射镜; 从所述反射镜的一侧向外延伸的扭杆; 围绕所述镜子的支撑件; 压电悬臂,其包括支撑体和形成在所述支撑体上的压电体,所述压电悬臂的一端连接到所述扭杆,所述压电悬臂的另一端连接到所述支撑件,所述压电悬臂在施加时 对压电体的驱动电压,由于压电性而呈现弯曲变形,从而使所述扭杆旋转,从而通过所述扭杆旋转驱动所述反射镜; 以及连接到所述支撑件的冲击衰减器,所述冲击衰减器设置在所述反射镜和所述支撑件之间的间隙中。
    • 6. 发明申请
    • TWO-DIMENSIONAL OPTICAL DEFLECTOR INCLUDING ONLY ONE PAIR OF MEANDER-TYPE PIEZOELECTRIC ACTUATORS AND ITS DRIVER
    • 二维光学偏转器,仅包括一个对应的压电式压电致动器及其驱动器
    • US20120243064A1
    • 2012-09-27
    • US13428868
    • 2012-03-23
    • Masanao TANI
    • Masanao TANI
    • G02B26/08
    • G02B26/0858G02B26/101
    • In a two-dimensional optical deflector comprising a mirror and a support body surrounding the mirror, first and second piezoelectric actuators of a meander-type are provided opposite to each other with respect to a first axis of the mirror. Each of the first second piezoelectric actuators comprising a plurality of piezoelectric cantilevers folded at every piezoelectric and connected from the support body to the mirror. Each of the piezoelectric cantilevers are in parallel with the first axis. Each of the piezoelectric cantilevers includes first and second piezoelectric cantilever elements in parallel with each other combined by a substrate. The second piezoelectric cantilever elements are divided into a first group of piezoelectric cantilever elements and a second group of piezoelectric cantilever elements alternating with the first group of piezoelectric cantilever elements.
    • 在包括反射镜和围绕反射镜的支撑体的二维光学偏转器中,曲折型的第一和第二压电致动器相对于反射镜的第一轴线相对设置。 每个第一第二压电致动器包括在每个压电体处折叠并且从支撑体连接到反射镜的多个压电悬臂。 每个压电悬臂与第一轴平行。 每个压电悬臂包括由衬底组合的彼此平行的第一和第二压电悬臂元件。 第二压电悬臂元件分为第一组压电悬臂元件和与第一组压电悬臂元件交替的第二组压电悬臂元件。
    • 8. 发明申请
    • OPTICAL DEFLECTOR AND OPTICAL DEVICE
    • 光学偏转器和光学器件
    • US20080225363A1
    • 2008-09-18
    • US12048694
    • 2008-03-14
    • Tetsurou SAITOHEiji MochizukiYukito SatoYoshiaki YasudaMasahiro AkamatsuMasanao Tani
    • Tetsurou SAITOHEiji MochizukiYukito SatoYoshiaki YasudaMasahiro AkamatsuMasanao Tani
    • G02B26/10
    • G02B26/0858
    • An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).
    • 光学偏转器包括使得反射板(1)以一对柔性支撑单元(2a和2b)为中心旋转地摆动的多个压电单晶振荡体(210a至210d)。 光学偏转器通过连接一组振动板(23a至23b),反射板(1),柔性支撑单元(2a和2b)和支撑体(9)形成单一结构 将压电单晶振荡体(210a至210d)的振动板(23a至23d)的端子连接到柔性支撑单元(2a和2b),并将另一组端子连接到 支撑体(9)。 此外,多个压电单晶体振荡体(210a〜210d)各自分别包括多个平行的振荡体(23a,1〜23a-3,23b-1〜23b-3,23c-1〜 23c-3)和(23d-1至23d-3)以及一组平行致动器(28a-1至28a-3,28c-1至28c-3和28d- 1〜28d-3)。
    • 9. 发明授权
    • Optical deflector and optical device
    • 光学偏转器和光学装置
    • US08553306B2
    • 2013-10-08
    • US12048694
    • 2008-03-14
    • Tetsurou SaitohEiji MochizukiYukito SatoYoshiaki YasudaMasahiro AkamatsuMasanao Tani
    • Tetsurou SaitohEiji MochizukiYukito SatoYoshiaki YasudaMasahiro AkamatsuMasanao Tani
    • G02B26/08
    • G02B26/0858
    • An optical deflector includes a plurality of piezoelectric unimorph oscillating bodies (210a to 210d) that cause a reflecting plate (1) to oscillate rotationally, centering upon a pair of flexible support units (2a and 2b). The optical deflector forms a single structure of the oscillating plates (23a to 23b), the reflecting plate (1), the flexible support units (2a and 2b), and a support body (9), by connecting one set of the terminals of the oscillating plates (23a to 23d) of the suite of piezoelectric unimorph oscillating bodies (210a to 210d) to the flexible support units (2a and 2b), and connecting the other set of terminals to the support body (9). Furthermore, the plurality of piezoelectric unimorph oscillating bodies (210a to 210d) each respectively comprise a plurality of parallel oscillating bodies (23a1 to 23a-3, 23b-1 to 23b-3, 23c-1 to 23c-3), and (23d-1 to 23d-3), and a suite of parallel actuators (28a-1 to 28a-3, 28c-1 to 28c-3, and 28d-1 to 28d-3).
    • 光学偏转器包括使反射板(1)以一对柔性支撑单元(2a和2b)为中心旋转摆动的多个压电单晶振荡体(210a至210d)。 光学偏转器通过将一组端子连接在一起,形成振荡板(23a至23b),反射板(1),柔性支撑单元(2a和2b)和支撑体(9)的单一结构 压电单晶振荡体(210a〜210d)组合到柔性支撑单元(2a和2b)的振动板(23a至23d),并将另一组端子连接到支撑体(9)上。 此外,多个压电单晶振荡体(210a〜210d)分别分别包括多个并联振荡体(23a1〜23a-3,23b-1〜23b-3,23c-1〜23c-3),(23d -1〜23d-3)和一组平行的致动器(28a-1〜28a-3,28c-1〜28c-3,以及28d-1〜28d-3)。
    • 10. 发明授权
    • Optical deflector
    • 光学偏转器
    • US07773282B2
    • 2010-08-10
    • US12554636
    • 2009-09-04
    • Masanao TaniYoshiaki YasudaMasahiro AkamatsuTakanori Aimono
    • Masanao TaniYoshiaki YasudaMasahiro AkamatsuTakanori Aimono
    • G02B26/08
    • G02B26/105B81B3/0051B81B7/0016G02B26/0858
    • An optical deflector includes a mirror having a reflective plane; a torsion bar extending outwardly from a side of said mirror; a support surrounding said mirror; a piezoelectric cantilever including a supporting body and a piezoelectric body formed on the supporting body, one end of said piezoelectric cantilever being connected to said torsion bar, the other end of the piezoelectric cantilever being connected to said support, said piezoelectric cantilever, upon application of a driving voltage to the piezoelectric body, exhibiting a bending deformation due to piezoelectricity so as to rotate said torsion bar, thereby rotarily driving said mirror through said torsion bar; and an impact attenuator connected to said support, the impact attenuator being disposed in a gap between said mirror and said support.
    • 光学偏转器包括具有反射面的反射镜; 从所述反射镜的一侧向外延伸的扭杆; 围绕所述镜子的支撑件; 压电悬臂,其包括支撑体和形成在所述支撑体上的压电体,所述压电悬臂的一端连接到所述扭杆,所述压电悬臂的另一端连接到所述支撑件,所述压电悬臂在施加时 对压电体的驱动电压,由于压电性而呈现弯曲变形,从而使所述扭杆旋转,从而通过所述扭杆旋转驱动所述反射镜; 以及连接到所述支撑件的冲击衰减器,所述冲击衰减器设置在所述反射镜和所述支撑件之间的间隙中。