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    • 3. 发明授权
    • Substrate support apparatus and substrate transport apparatus having shock absorption
    • 具有减震功能的基板支撑装置和基板输送装置
    • US08770906B2
    • 2014-07-08
    • US12706901
    • 2010-02-17
    • Masahiro AtsumiMasaaki Ishida
    • Masahiro AtsumiMasaaki Ishida
    • H01L21/763H01L21/677
    • H01L21/67742
    • A substrate support apparatus has a substrate holding portion to be inserted into a center hole formed in a substrate to support the substrate in a vertical orientation, and includes a first connecting plate connected to the substrate holding portion and a second connecting plate which faces the first connecting plate and is connectable to a transport robot that transports the substrate to a substrate holder. In addition, a shock absorbing member is arranged between the first connecting plate and the second connecting plate so as to allow a movement of the first connecting plate relative to the second connecting plate in horizontal and vertical directions. Support members are configured to connect the first connecting plate to the second connecting plate while allowing the movement of the first connecting plate relative to the second connecting plate.
    • 基板支撑装置具有基板保持部,其插入到形成在基板上的中心孔中,以在垂直方向上支撑基板,并且包括连接到基板保持部的第一连接板和面向第一 连接板,并且可连接到将基板传送到基板保持器的运输机器人。 此外,在第一连接板和第二连接板之间布置有减震构件,以允许第一连接板相对于第二连接板在水平和垂直方向上的移动。 支撑构件被构造成将第一连接板连接到第二连接板,同时允许第一连接板相对于第二连接板的移动。
    • 4. 发明申请
    • AEROSPACE VEHICLE SYSTEM
    • 航空汽车系统
    • US20090206205A1
    • 2009-08-20
    • US12254456
    • 2008-10-20
    • Yoshikatsu KURODAMasahiro ATSUMINaohiko ABEMasahiro KATO
    • Yoshikatsu KURODAMasahiro ATSUMINaohiko ABEMasahiro KATO
    • B64G1/40
    • B64G1/002B64G1/288B64G1/401B64G1/402B64G1/428B64G1/641
    • In an aerospace vehicle in which a satellite is detachably adapted to the first step rocket and the second step rocket, an electronic device 65 is installed in the satellite 60, wherein the electronic device 65 controls the first step rocket 10 and the second step rocket 20 before the satellite is detached from the first step rocket 10 and the second step rocket 20. Thereby, it is unnecessary to provide sensors, radio devices and electronic devices for exclusive use with respect to the first step rocket 10 and the second step rocket so that a manufacturing cost of the rockets 10 and 20 can be reduced and a total weight of the rockets 10 and 20 can become lighter by omitting these equipments. Thus, an aerospace vehicle system within the rockets 10 and 20 can be simplified and a launch of the aerospace vehicle can be prepared within a short period.
    • 在其中卫星可拆卸地适应于第一级火箭和第二级火箭的航空航天车辆中,电子设备65安装在卫星60中,其中电子设备65控制第一级火箭10和第二级火箭20 在卫星从第一步骤火箭10和第二步骤火箭20分离之前。因此,不需要提供关于第一步骤火箭10和第二步骤火箭专用的传感器,无线电装置和电子装置,使得 可以减少火箭10和20的制造成本,并且通过省略这些设备,火箭10和20的总重量可以变轻。 因此,可以简化火箭10和20内的航空航天系统,并且可以在短时间内准备航空航天车辆的发射。