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1. 发明申请

US20120004773A1 GRIPPING DEVICE, TRANSFER DEVICE, PROCESSING DEVICE, AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE 有权
标题翻译：传送装置，传送装置，处理装置和电子装置的制造方法
公开(公告)号：US20120004773A1
公开(公告)日：2012-01-05
申请号：US13171500
申请日：2011-06-29
申请人： Masaaki Furuya
发明人： Masaaki Furuya
IPC分类号： B25J15/00 , B25J9/02
CPC分类号： B25J15/00 , B25J11/0095 , H01L21/67766 , H01L21/67778 , H01L21/67781 , H01L21/68707 , Y10S414/141 , Y10S901/32 , Y10S901/36 , Y10S901/38 , Y10S901/39
摘要： According to one embodiment, a gripping device grips a rim of a workpiece by opening and closing gripping plates. The device includes a gripping unit, a hoisting and lowering unit and a motion control unit. The gripping unit includes a first and a second gripping plate. The first gripping plate has a first gripper to contact the rim. The second gripping plate has a second gripper to contact the rim. At least one of the first and second gripping plates is moved and the first and second gripper are spaced from each other. The hoisting and lowering unit is configured to hoist and lower the gripping unit. The motion control unit is configured to control open/close operations and hoisting and lowering operations. The motion control unit mechanically controls first first hoisting and lowering operations, controls second the open/close operations, and controls third second hoisting and lowering operations.
摘要翻译：根据一个实施例，夹紧装置通过打开和关闭夹持板来夹持工件的边缘。该装置包括夹持单元，升降单元和运动控制单元。夹持单元包括第一和第二夹持板。第一夹板具有接触轮辋的第一夹持器。第二夹持板具有接触边缘的第二夹持器。第一和第二夹持板中的至少一个被移动，并且第一和第二夹持器彼此间隔开。升降单元构造为提升和降低夹持单元。运动控制单元被配置为控制打开/关闭操作以及升降操作。运动控制单元机械地控制第一次起吊和下降操作，控制第二次打开/关闭操作，并且控制第三次第二次提升和下降操作。

2. 发明授权

US07015296B2 Preparation of linear organosiloxane polymers 失效
公开(公告)号：US07015296B2
公开(公告)日：2006-03-21
申请号：US10320544
申请日：2002-12-17
申请人： Hiroshi Nakayama , Masao Maruyama , Hiromi Nakabayashi , Masaaki Furuya , Tetsuo Nakanishi
发明人： Hiroshi Nakayama , Masao Maruyama , Hiromi Nakabayashi , Masaaki Furuya , Tetsuo Nakanishi
IPC分类号： C08G77/06
CPC分类号： C08G77/06
摘要： By reacting two types of organosiloxane compounds in the presence of an alkaline compound and under conditions that do not substantially promote equilibration reaction, a linear organosiloxane polymer having a single peak molecular weight distribution is simply and economically produced with minimized formation of cyclics.

3. 发明授权

US06225490B1 Continuous hydrolysis of organochlorosilanes 失效
标题翻译：连续水解有机氯硅烷
公开(公告)号：US06225490B1
公开(公告)日：2001-05-01
申请号：US09084786
申请日：1998-05-27
申请人： Hiroshi Nakayama , Naoyuki Ida , Hiroyuki Kobayashi , Yukinori Satoh , Yoshihiro Shirota , Masaaki Furuya
发明人： Hiroshi Nakayama , Naoyuki Ida , Hiroyuki Kobayashi , Yukinori Satoh , Yoshihiro Shirota , Masaaki Furuya
IPC分类号： C07F704
CPC分类号： C08G77/06
摘要： For the continuous hydrolysis of organochlorosilane, a reaction system comprising at least three stages of hydrolysis is used. Each stage includes a reactor and a phase separator wherein hydrolysis is effected to form a hydrolysis mixture which is separated into a hydrolyzate and a hydrogen chloride-containing aqueous medium. The separated aqueous medium is circulated to the reactor. The hydrolyzate is conveyed to the reactor of the subsequent stage. The organochlorosilane is fed into the first stage reactor, the aqueous medium containing an amount of water corresponding to the consumption in one stage is fed into one stage reactor from the subsequent stage, and an amount of water corresponding to the consumption in the overall reaction system is fed in the last stage. Then the entire amount of hydrogen chloride generated in multiple stages of hydrolysis is recovered as anhydrous hydrogen chloride from the first stage. The entire amount of the aqueous media separated in the phase separators is retained in the reaction system.
摘要翻译：对于有机氯硅烷的连续水解，使用包含至少三个水解阶段的反应体系。每个阶段包括反应器和相分离器，其中进行水解以形成分离成水解产物和含氯化氢的水性介质的水解混合物。将分离的水性介质循环至反应器。水解产物被输送到后续阶段的反应器。将有机氯硅烷进料到第一阶段反应器中，将含有相当于一步消耗量的水的含水介质从后续阶段进料到一级反应器中，并且一定量的水对应于整个反应体系中的消耗在最后阶段喂养。然后从第一阶段以多级水解产生的全部量的氯化氢作为无水氯化氢回收。在相分离器中分离的水性介质的全部量保留在反应体系中。

4. 发明授权

US5922893A Method for preparing monosilanes from a high-boiling fraction formed as by-products in the direct synthesis of methylchlorosilanes 失效
$Method for preparing monosilanes from a high-boiling fraction formed as by-products in the direct synthesis of methylchlorosilanes$
标题翻译：在直接合成甲基氯硅烷中作为副产物形成的高沸点馏分制备单硅烷的方法
公开(公告)号：US5922893A
公开(公告)日：1999-07-13
申请号：US31545
申请日：1998-02-27
申请人： Akihito Tsukuno , Yukinori Satoh , Masao Maruyama , Kesaji Harada , Shoichi Tanaka , Masaaki Furuya
发明人： Akihito Tsukuno , Yukinori Satoh , Masao Maruyama , Kesaji Harada , Shoichi Tanaka , Masaaki Furuya
IPC分类号： B01J31/02 , C07B61/00 , C07F7/12 , C07F7/16 , C07F7/08
CPC分类号： C07F7/128
摘要： The direct synthesis of methylchlorosilanes to react metallic silicon with methyl chloride in the presence of a copper catalyst yields a high-boiling fraction of methylchlorodisilanes as by-products. The invention provides a method for preparing monosilanes from the high-boiling fraction by reacting it with hydrogen chloride in the presence of an amine or amide catalyst. The reaction is effected under the condition that the amount of iron, aluminum, zinc, tin and compounds thereof present in the reaction system is less than the equimolar amount with respect to the catalyst. This increases the conversion of disilanes into monosilanes.
摘要翻译：甲基氯硅烷在铜催化剂存在下直接合成甲基氯与甲基氯反应产生高沸点馏分的甲基氯二硅烷作为副产物。本发明提供了通过在胺或酰胺催化剂的存在下与氯化氢反应从高沸点馏分制备单硅烷的方法。反应在反应体系中存在的铁，铝，锌，锡及其化合物的量相对于催化剂小于等摩尔量的条件下进行。这增加了二硅烷转化为单硅烷的转化率。

5. 发明授权

US09330948B2 Heater unit, fan filter unit, and substrate processing apparatus 有权
标题翻译：加热单元，风扇过滤器单元和基板处理装置
公开(公告)号：US09330948B2
公开(公告)日：2016-05-03
申请号：US13529404
申请日：2012-06-21
申请人： Masaaki Furuya , Munenori Iwami , Takahiko Wakatsuki , Masanori Kondo , Katsuya Yamada
发明人： Masaaki Furuya , Munenori Iwami , Takahiko Wakatsuki , Masanori Kondo , Katsuya Yamada
IPC分类号： F27D11/00 , H01L21/67 , B01D46/10 , B01D46/42 , H05B3/28
CPC分类号： H01L21/67103 , B01D46/10 , B01D46/4263 , B01D2273/30 , H05B3/283 , H05B2203/022
摘要： A heater unit according to an embodiment includes: a flat heater including a linear heating element arranged in a planar pattern; a first mesh body formed in a mesh pattern using a material with high heat conductivity and placed at least on one side of the flat heater facing the flat heater; and a second mesh body formed in a mesh pattern using a material with lower heat conductivity than that of the first mesh body and placed to face a surface of the first mesh body opposite to the surface of the first mesh body facing the flat heater.
摘要翻译：根据实施例的加热器单元包括：扁平加热器，其包括以平面图案布置的线性加热元件; 使用具有高导热性的材料以网格图案形成的第一网状体，并且至少放置在面向平面加热器的平面加热器的一侧上; 以及第二网状体，其使用比所述第一网状体的导热性低的材料以网状图案形成，并且与所述第一网状体的与所述第一网状体的面对所述扁平加热器的表面相对的表面放置。

6. 发明授权

US09199805B2 Processing system and processing method 有权
标题翻译：处理系统及处理方法
公开(公告)号：US09199805B2
公开(公告)日：2015-12-01
申请号：US13570440
申请日：2012-08-09
申请人： Masaaki Furuya , Toyoyasu Tauchi
发明人： Masaaki Furuya , Toyoyasu Tauchi
IPC分类号： B65G57/00 , H01L21/677
CPC分类号： B65G57/00 , H01L21/67742 , H01L21/67781
摘要： According to one embodiment, a processing system includes a storage section, a processing section, a mounting section, a first transport section, and a second transport section. The mounting section includes a plurality of holding sections with a first spacing in a stacking direction. The first transport section is configured to transport the workpiece between the storage section and the mounting section and to enter the mounting section at a first position in the stacking direction. The second transport section is configured to transport the workpiece between the processing section and the mounting section and to enter the mounting section at a second position different from the first position in the stacking direction. The first position is provided at two sites in the stacking direction across the second position. The first transport section and the second transport section are enabled to enter the mounting section around a same time.
摘要翻译：根据一个实施例，处理系统包括存储部分，处理部分，安装部分，第一传送部分和第二传送部分。安装部包括在层叠方向上具有第一间隔的多个保持部。第一输送部构造成在存储部和安装部之间输送工件，并且在堆叠方向的第一位置进入安装部。第二输送部构造成在处理部和安装部之间输送工件，并且在与层叠方向上的第一位置不同的第二位置进入安装部。第一位置在跨越第二位置的层叠方向上的两个位置设置。第一输送部和第二输送部能够同时进入安装部。

7. 发明授权

US08449710B2 Sheet peeling machine and method for manufacturing display device 有权
标题翻译：薄片剥皮机及其制造方法
公开(公告)号：US08449710B2
公开(公告)日：2013-05-28
申请号：US12854458
申请日：2010-08-11
申请人： Masaaki Furuya , Tomohiro Matsui
发明人： Masaaki Furuya , Tomohiro Matsui
IPC分类号： B32B38/10
CPC分类号： B32B43/006 , B32B38/10 , B32B2457/20 , Y10T156/19 , Y10T156/1961
摘要： A sheet peeling machine includes a movable table for moving a substrate in a moving direction, a planar member, a holder for holding the planar member; an elevating unit for supporting the holder and moving the holder in an elevating direction, a forwarding unit for contacting an end of the planar member with an edge of a sheet member on the substrate, a tape roller for affixing a peeling tape from the planar member and the sheet member, and a tape wind-up unit for peeling off the sheet member together with the peeling tape. According to the sheet peeling machine, the peeling tape is affixed onto the sheet member and then the sheet member is peeled off together with the peeling tape with a support by the planar member.
摘要翻译：片材剥离机包括用于沿移动方向移动基底的可移动台，平面构件，用于保持平面构件的保持器; 升降单元，用于支撑所述保持器并沿着升降方向移动所述保持器;转运单元，用于使所述平面构件的端部与所述基板上的片状构件的边缘接触;带辊，用于将所述剥离带从所述平面构件以及片状构件，以及用于与剥离带一起剥离片状构件的带卷绕单元。根据片剥离机，将剥离带固定在片状部件上，然后片状部件与剥离带一起用平面部件的支撑体剥离。

8. 发明申请

US20090021734A1 APPARATUS AND METHOD FOR DETECTING SUSPENDED PARTICLES 审中-公开
标题翻译：检测悬浮颗粒的装置和方法
公开(公告)号：US20090021734A1
公开(公告)日：2009-01-22
申请号：US12142303
申请日：2008-06-19
申请人： Taketo SHIBA , Masaaki Furuya , Masahiko Takahashi
发明人： Taketo SHIBA , Masaaki Furuya , Masahiko Takahashi
IPC分类号： G01N21/47
CPC分类号： G01N15/0205
摘要： An apparatus for detecting suspended particles, includes a laser source configured to emit a beam of laser light, a diameter expander configured to expand the diameter of the beam, and a distributor configured to distribute the laser light in a sheet-like space, the distributor varying the traveling direction of the laser light in continuous directions at a fixed angle with respect to a reference axis.
摘要翻译：用于检测悬浮颗粒的装置包括被配置为发射激光束的激光源，配置成扩大光束直径的直径扩展器以及被配置为将激光分布在片状空间中的分配器以相对于参考轴线固定的角度连续地改变激光的行进方向。

9. 发明申请

US20070120461A1 FLAT PANEL DISPLAY DEVICE 审中-公开
标题翻译：平板显示设备
公开(公告)号：US20070120461A1
公开(公告)日：2007-05-31
申请号：US11624713
申请日：2007-01-19
申请人： Masahiro YOKOTA , Daiji HIROSAWA , Yoshiki ORIMOTO , Koji TAKATORI , Hirotaka MURATA , Masaaki FURUYA
发明人： Masahiro YOKOTA , Daiji HIROSAWA , Yoshiki ORIMOTO , Koji TAKATORI , Hirotaka MURATA , Masaaki FURUYA
IPC分类号： H01J63/04 , H01J1/62
CPC分类号： H01J29/28 , H01J29/32
摘要： A flat panel display device, in which a getter layer employed has a region including a striped discontinuous portion in an image display region, and the discontinuous portion is formed by forming the getter layer on an underlayer formed with microstructures on its surface, or the phosphor screen includes a two-dimensional array of pixels each including a red-emitting phosphor element, a green-emitting phosphor element, and a blue-emitting phosphor element that are arrayed at predetermined intervals to form one unit, and the interval of the pixels is larger than the interval of R, G, and B phosphor elements.
摘要翻译：其中使用吸气剂层的平板显示装置具有在图像显示区域中具有条纹不连续部分的区域，并且通过在其表面上形成有微结构的底层上形成吸气剂层而形成不连续部分，或者荧光体屏幕包括每个包括以预定间隔排列以形成一个单位的红色发光磷光体元件，绿色荧光体元件和蓝色发光磷光体元件的像素的二维阵列，并且像素的间隔为大于R，G和B荧光体元件的间隔。

10. 发明申请

US20070063633A1 IMAGE DISPLAY DEVICE AND METHOD OF MANUFACTURING THE SAME 审中-公开
标题翻译：图像显示装置及其制造方法
公开(公告)号：US20070063633A1
公开(公告)日：2007-03-22
申请号：US11557988
申请日：2006-11-09
申请人： Masahiro YOKOTA , Masaaki Furuya
发明人： Masahiro YOKOTA , Masaaki Furuya
IPC分类号： H01J1/62 , H01J63/04
CPC分类号： H01J9/242 , H01J29/864 , H01J31/127 , H01J2329/8625
摘要： A spacer structure is arranged between a first substrate and a second substrate located opposite each other with a gap therebetween. The spacer structure has a plurality of retaining portions held on one of the first and second substrates outside an image display region, at least one of the retaining portions having a tensioning mechanism which applies a tension in a direction parallel to the surfaces of the first and second substrates based on a force of pressure perpendicular to the surfaces of the first and second substrates.
摘要翻译：在第一基板和第二基板之间布置有间隔件，间隔件间隔开。间隔结构具有多个保持部分，其保持在图像显示区域外部的第一和第二基板中的一个上，至少一个保持部分具有张紧机构，该张紧机构沿平行于第一和第二表面的方向施加张力，基于与第一和第二基板的表面垂直的压力的第二基板。

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