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    • 1. 发明申请
    • COAXIAL DISTANCE MEASUREMENT VIA FOLDING OF TRIANGULATION SENSOR OPTICS PATH
    • 双向传感器折弯的同轴距离测量
    • WO2013148643A1
    • 2013-10-03
    • PCT/US2013/033827
    • 2013-03-26
    • VIEW, INC.BAXTER, BruceMULLINS, Dennis
    • BAXTER, BruceMULLINS, Dennis
    • G01C3/08G01C3/22G01S17/08
    • B23K26/048B23K26/364G01S7/481G01S17/48
    • This disclosure provides apparatus and methods for scribing a substrate. In one aspect, an apparatus includes optics for focusing a scribe beam onto a substrate and a beam focus adjustment mechanism for adjusting the optics. A triangulation- based distance sensor determines a distance between the triangulation-based distance sensor and the substrate, with the triangulation-based distance sensor being positioned at a location offset from the scribe beam. Reflecting elements are positioned to reflect an incident beam from the triangulation-based distance sensor's source to the substrate and then back to the triangulation-based distance sensor's detector. The beam focus adjustment mechanism adjusts the optics based on the distance between the triangulation-based distance sensor and the substrate so that the scribe beam is focused at a desired position on the substrate.
    • 本公开提供了用于划线衬底的设备和方法。 一方面,一种装置包括用于将划线束聚焦到衬底上的光学器件和用于调整光学器件的束聚焦调节机构。 基于三角测距的距离传感器确定基于三角测距的距离传感器和基板之间的距离,基于三角测距的距离传感器位于偏离划线的位置。 反射元件被定位成将来自基于三角测距的距离传感器源的入射光束反射到衬底,然后返回到基于三角测距的距离传感器的检测器。 束聚焦调节机构基于基于三角测距的距离传感器和基板之间的距离来调节光学元件,使得划线束聚焦在基板上的期望位置。