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1. 发明专利

JP2945436B2 失效
公开(公告)号：JP2945436B2
公开(公告)日：1999-09-06
申请号：JP7956690
申请日：1990-03-27
申请人： MORITA SEIZO , SUGAWARA YASUHIRO , ORINPASU KOGAKU KOGYO KK
发明人： MORITA SEIZO , SUGAWARA YASUHIRO , OKADA TAKAO
IPC分类号： G01B7/34 , G01B21/30 , G01N37/00 , G01Q60/04 , G01Q60/10 , G01Q60/24 , H01J37/28

2. 发明专利

JPH03277903A SCANNING TYPE PROBE MICROSCOPE 失效
公开(公告)号：JPH03277903A
公开(公告)日：1991-12-09
申请号：JP7956690
申请日：1990-03-27
申请人： MORITA SEIZO , SUGAWARA YASUHIRO , OLYMPUS OPTICAL CO
发明人： MORITA SEIZO , SUGAWARA YASUHIRO , OKADA TAKAO
IPC分类号： G01B7/34 , G01B21/30 , G01N37/00 , G01Q60/04 , G01Q60/10 , G01Q60/24 , H01J37/28
摘要： PURPOSE:To enable a three-dimensional image (AFM image) based on a sample surface and that (STM image) based on a conductive distribution on the sample surface to be measured simultaneously by allowing an amount of displacement when atom force which acts upon an area between the sample and a cantilever is constant and current which flows between the sample surface and the cantilever to be detected independently. CONSTITUTION:When measurement starts by allowing gap between a sample 1 and a cantilever 2 to be smaller, a force between atoms is generated between a tip atom of a chip 2a of the lever 2 and the approaching sample 1 and the entire lever 2 is displaced due to deflection. Also, a drive voltage is applied to a piezoelectric actuator 3 and feedback operation is performed by a servo control means 7 so that the amount of displacement of the lever 2 is maintained. Further, a bias voltage is generated 4 at the level 2 and a tunnel current iS which flows between the chip 2a and the sample 1 is current-detected 5. When the sample 1 is scanned in XY direction, an output signal IA from a means for detecting amount of probe displacement 6 or a feedback signal IPA which is applied to the actuator 3 are recorded matching the scanning signal, thus enabling ATM and STM images to be displayed simultaneously.

3. 发明专利

JPH1048224A SCANNING PROBE MICROSCOPE 失效
公开(公告)号：JPH1048224A
公开(公告)日：1998-02-20
申请号：JP20987296
申请日：1996-08-08
申请人： OLYMPUS OPTICAL CO , MORITA SEIZO , SUGAWARA YASUHIRO
发明人： MATSUYAMA KATSUHIRO , SAKAI NOBUAKI , MORITA SEIZO , SUGAWARA YASUHIRO
IPC分类号： G01B21/30 , G01N37/00 , G01Q30/04 , G01Q60/30 , G01Q90/00
摘要： PROBLEM TO BE SOLVED: To provide a probe microscope for studying the electric properties on the surface of a sample in which an accurate irregular image on the surface of the sample can be obtained. SOLUTION: A cantilever 102 is supported by a tube scanner 106. An AC voltage is applied from an AC power supply 110 across a sample to be probed and the cantilever 102 is oscillated. An FM demodulator 122 outputs a displacement signal and a synchronism detector 126 extracts a component having angular frequency two times as high as that of AC power supply 110 from the displacement signal. A subtractor 128 outputs a signal produced by subtracting the output signal of the synchronism detector 126 from the displacement signal and a Z controller 132 controls the tube scanner 106 to sustain the output signal from the subtractor 128 at a constant level. An information processing section 130 performs mapping of irregularity information from the Z controller 112 and surface charge information from a synchronism detector 124 according to XY information from an XY scanning circuit 114 thus obtaining the irregular image and the charge distribution image on the surface of a sample.

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