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1. 发明申请

WO2011025903A1 METHODS FOR LASER CUTTING GLASS SUBSTRATES 审中-公开
标题翻译：激光切割玻璃基板的方法
公开(公告)号：WO2011025903A1
公开(公告)日：2011-03-03
申请号：PCT/US2010/046885
申请日：2010-08-27
申请人： LI, Xinghua , MOORE, Lisa A. , CORNING INCORPORATED
发明人： LI, Xinghua , MOORE, Lisa A.
IPC分类号： B23K26/40 , C03B33/10 , C03C21/00
CPC分类号： C03B33/091 , B23K26/00 , B23K26/40 , B23K2203/50 , C03B33/093 , C03C23/0025 , Y02P40/57
摘要： A method for cutting a glass article from a strengthened glass substrate having a surface compression layer and a tensile layer includes forming an edge defect in the surface compression layer on a first edge of the strengthened glass substrate. The method further includes propagating a through vent through the surface compression and tensile layers at the edge defect. The through vent precedes a region of separation along a cut line between the glass article and the strengthened glass substrate.
摘要翻译：从具有表面压缩层和拉伸层的强化玻璃基板切割玻璃制品的方法包括在加强玻璃基板的第一边缘上的表面压缩层中形成边缘缺陷。该方法还包括在边缘缺陷处通过表面压缩和拉伸层传播通气孔。通气孔沿着玻璃制品和强化玻璃基板之间的切割线分开的区域。

2. 发明申请

WO2005082800A1 SYNTHETIC SILICA GLASS OPTICAL MATERIAL AND METHOD OF PRODUCING IT 审中-公开
标题翻译：合成二氧化硅玻璃光学材料及其生产方法
公开(公告)号：WO2005082800A1
公开(公告)日：2005-09-09
申请号：PCT/US2005/005709
申请日：2005-02-23
申请人： CORNING INCORPORATED , BOOKBINDER, Dana C , FIACCO, Richard M , HRDINA, Kenneth E , MOORE, Lisa A , SCHIEFELBEIN, Susan L
发明人： BOOKBINDER, Dana C , FIACCO, Richard M , HRDINA, Kenneth E , MOORE, Lisa A , SCHIEFELBEIN, Susan L
IPC分类号： C03C3/06
CPC分类号： C03C3/06 , C03B19/1453 , C03B32/00 , C03B2201/075 , C03B2201/21 , C03B2201/23 , C03B2207/32 , C03C2201/21 , C03C2201/23
摘要： Disclosed is a synthetic silica glass optical material having high resistance to optical damage by ultraviolet radiation in the ultraviolet wavelength range, particularly in the wavelength less than about 250 nm and particularly, exhibiting a low laser induced wavefront distortion; specifically a laser induced wavefront distortion, measured at 633nm, of between about -1.0 and 1.0 nm/cm when subjected to 10 billion pulses of a laser operating at approximately 193 nm and at a fluence of approximately 70µJ/cm 2 . The synthetic silica glass optical material of the present invention comprises OH concentration levels less than about 600ppm, preferably less than 200ppm, and H 2 concentration levels less than about 5.0x10 17 molecules/cm 3 , and preferably less than about 2.0x10 17 molecules/cm 3 . A method of producing a synthetic silica glass optical material is also claimed.
摘要翻译：公开了一种合成石英玻璃光学材料，其特征在于波长小于约250nm，特别是具有低激光诱导波前失真的紫外线波长范围内具有高抗紫外线辐射的光学损伤。具体地，当经受在约193nm的操作的激光器和约70μJ/ cm 2的通量时，在633nm处测量的激光诱导波前失真在约-1.0和1.0nm / cm之间。本发明的合成二氧化硅玻璃光学材料包括OH浓度水平低于约600ppm，优选小于200ppm，H 2浓度水平低于约5.0×10 17分子/ cm 3，优选小于约2.0×10 3 17分子/ cm 3。还要求生产合成石英玻璃光学材料的方法。

3. 发明申请

WO2002088036A1 METHOD FOR PRODUCING TITANIA-DOPED FUSED SILICA EXTREME ULTRAVIOLET LITHOGRAPHY SUBSTRATES GLASS 审中-公开
标题翻译：生产钛酸钠熔融二氧化硅超高压超薄基板玻璃的方法
公开(公告)号：WO2002088036A1
公开(公告)日：2002-11-07
申请号：PCT/US2002/009461
申请日：2002-03-25
申请人： CORNING INCORPORATED , ACKERMAN, Bradford G , HRDINA, Kenneth E , MOORE, Lisa A , RUSSO, Nikki J , YU, Chunzhe C
发明人： ACKERMAN, Bradford G , HRDINA, Kenneth E , MOORE, Lisa A , RUSSO, Nikki J , YU, Chunzhe C
IPC分类号： C03B8/04
CPC分类号： C03C4/0085 , C03B19/1415 , C03B19/1453 , C03B19/1484 , C03B2201/12 , C03B2201/42 , C03B2207/32 , C03B2207/62 , C03B2207/70 , C03C3/06 , C03C3/076 , C03C2201/12 , C03C2201/42 , C03C2203/40 , Y02P40/57
摘要： A titania precursor (18) and a silica precursor (6) are mixed in a manifold (14) and are fed to a burner (28) to create soot (40) which is deposited on a deposition surface (34) which is rotated and elevated. The end product is useful for Extreme UV lithography.
摘要翻译：将二氧化钛前体（18）和二氧化硅前体（6）混合在歧管（14）中并被供给到燃烧器（28）以产生沉积在旋转的沉积表面（34）上的烟灰（40）升高。最终产品适用于Extreme UV光刻。

4. 发明申请

WO2011025908A1 METHODS FOR LASER CUTTING ARTICLES FROM CHEMICALLY STRENGTHENED GLASS SUBSTRATES 审中-公开
标题翻译：激光切割文章从化学强化玻璃基材的方法
公开(公告)号：WO2011025908A1
公开(公告)日：2011-03-03
申请号：PCT/US2010/046894
申请日：2010-08-27
申请人： GOMEZ, Sinue , MOORE, Lisa, A. , TSUDA, Sergio , CORNING INCORPORATED
发明人： GOMEZ, Sinue , MOORE, Lisa, A. , TSUDA, Sergio
IPC分类号： C03B33/04 , C03B33/09 , C03B33/02
CPC分类号： C03B33/0222 , C03B33/04 , C03B33/091 , Y10T156/1158
摘要： A method of cutting an article (172) from a chemically strengthened glass substrate (110) includes generating a pulsed laser beam (108) from a laser source (106). The pulsed laser beam (108) may have a pulse duration of less than about 1000 fs and an output wavelength such that the chemically strengthened glass substrate (110) is substantially transparent to the pulsed laser beam (108). The pulsed laser beam (108) may be focused to form a beam waist (109) that is positioned in the same horizontal plane as an inner tensile region (124) of the chemically strengthened glass substrate (110). The beam waist (109) may be translated in a first pass along a cut line (116), wherein the beam waist (109) traverses an edge (111) of the chemically strengthened glass substrate. The beam waist (113) may then be translated in a second pass along the cut line (116) such that a crack (119) propagates from the edge (113) along the cut line (116) ahead of the translated beam waist (109) during the second pass.
摘要翻译：从化学强化玻璃基板（110）切割物品（172）的方法包括从激光源（106）产生脉冲激光束（108）。脉冲激光束（108）可以具有小于约1000fs的脉冲持续时间和输出波长，使得化学强化的玻璃基板（110）对脉冲激光束（108）基本上是透明的。脉冲激光束（108）可以被聚焦以形成位于与化学强化的玻璃基板（110）的内部拉伸区域（124）相同的水平平面内的光束腰部（109）。梁腰（109）可以沿着切割线（116）沿第一道次平移，其中梁腰（109）穿过化学强化的玻璃基板的边缘（111）。然后可以沿着切割线（116）在第二道次中平移梁腰（113），使得裂缝（119）沿着切割线（116）从边缘（113）沿平移的梁腰（109）前方传播）。

5. 发明申请

WO2007005322A1 SYNTHETIC SILICA MATERIAL WITH LOW FLUENCE-DEPENDENT-TRANSMISSION AND METHOD OF MAKING THE SAME 审中-公开
标题翻译：具有低流变依赖性传输的合成二氧化硅材料及其制造方法
公开(公告)号：WO2007005322A1
公开(公告)日：2007-01-11
申请号：PCT/US2006/024346
申请日：2006-06-23
申请人： CORNING INCORPORATED , BOOKBINDER, Dana C , HRDINA, Kenneth E , KOHNKE, Glenn E , MOORE, Lisa A , NEUKIRCH, Ulrich , SCHIEFELBEIN, Susan L , SMITH, Charlene M
发明人： BOOKBINDER, Dana C , HRDINA, Kenneth E , KOHNKE, Glenn E , MOORE, Lisa A , NEUKIRCH, Ulrich , SCHIEFELBEIN, Susan L , SMITH, Charlene M
IPC分类号： C03C3/06 , C03C4/00 , C03C21/00
CPC分类号： C03C3/06 , C03C4/0071 , C03C4/0085 , C03C2201/21 , C03C2201/23 , C03C2201/54
摘要： Disclosed in the application are a synthetic silica glass having low fluence-dependent transmission, particularly at about 193 nm, and a process for making the same. The glass may desirably exhibit a low level of fluorescence at 290 and 390 nm when activated at about 248 nm. The glass may desirably exhibit low level of LIWFD, [SiH*] and/or [ODC].
摘要翻译：在本申请中公开了具有低注射度依赖性透射率，特别是约193nm的合成二氧化硅玻璃及其制造方法。当在约248nm激活时，该玻璃可期望地在290和390nm处表现出低水平的荧光。玻璃可能期望显示低水平的LIWFD，[SiH *]和/或[ODC]。

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