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    • 2. 发明专利
    • Method and device for determining phase shifts and trim mask for integrated circuit
    • 用于确定集成电路的相位移动和TRIM MASK的方法和装置
    • JP2006178498A
    • 2006-07-06
    • JP2006071816
    • 2006-03-15
    • Mentor Graphics Corpメンター・グラフィクス・コーポレーション
    • COBB NICOLAS BAILEYSAKAJIRI KYOHEI
    • G03F1/00G03F1/26G03F7/20H01L21/027
    • G03F1/26G03F1/70G03F7/2026
    • PROBLEM TO BE SOLVED: To provide a method and a device for optimizing a deep sub-micron layout of an integrated circuit. SOLUTION: Components of an integrated circuit (IC) design (gates, for example) can be identified and manufactured using a phase shifting process to improve circuit density and/or performance as compared to a circuit manufactured without using phase shifting processes. In one embodiment, a first mask (a phase shift mask, for example) is generated that includes the component to be manufactured using the phase shifting process. A second mask (a trim mask, for example) is also generated to further process the structure created using the first mask. Both masks are defined based on a region (a diffusion region, for example) in a different layer of the integrated circuit layout than the structure (the gate, for example) being created with the phase shifting process. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种用于优化集成电路的深亚微米布局的方法和装置。 解决方案:与不使用相移过程制造的电路相比,可以使用相移过程来识别和制造集成电路(IC)设计(例如门)的组件,以提高电路密度和/或性能。 在一个实施例中,生成包括使用相移处理来制造的部件的第一掩模(例如,相移掩模)。 还生成第二个掩码(例如修剪蒙版),以进一步处理使用第一个掩码创建的结构。 两个掩模基于集成电路布局的不同层中的区域(例如,扩散区域)来定义,该区域(例如,扩散区域)比通过相移处理创建的结构(例如栅极)定义。 版权所有(C)2006,JPO&NCIPI
    • 5. 发明专利
    • Light source optimization for image fidelity and throughput
    • 光源优化用于图像的清晰度和穿透性
    • JP2011151423A
    • 2011-08-04
    • JP2011103314
    • 2011-05-02
    • Mentor Graphics Corpメンター・グラフィクス・コーポレーション
    • GRANIK YURI
    • H01L21/027G03F7/20G03H1/08
    • G03F7/70491G03F7/70108G03F7/70441G03F7/705
    • PROBLEM TO BE SOLVED: To provide optimization of a light source suitable for image fidelity and throughput.
      SOLUTION: This method is used for optimizing a light source to generate a desired feature pattern on a wafer by photolithography processing. The method includes steps of: receiving at least a part of a layout database to select the desired feature pattern to be generated on a wafer; associating a plurality of pixel densities in the light source and contribution of pixels of the light source to one point on the wafer with the desired feature pattern by using a mathematical relationship; and determining the pixel density of the light source by using the mathematical relationship so that an error between a feature pattern generated on the wafer and the desired feature pattern is minimized at simultaneous irradiation of the pixels at a predetermined pixel density.
      COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供适合于图像保真度和吞吐量的光源的优化。 解决方案:该方法用于优化光源以通过光刻处理在晶片上产生期望的特征图案。 该方法包括以下步骤:接收布局数据库的至少一部分以选择要在晶片上生成的期望特征图案; 通过使用数学关系将光源中的多个像素密度和光源的像素对晶片上的一个点的贡献与期望的特征图案相关联; 以及通过使用数学关系确定光源的像素密度,使得在以预定像素密度同时照射像素时,在晶片上产生的特征图案与期望特征图案之间的误差最小化。 版权所有(C)2011,JPO&INPIT
    • 8. 发明专利
    • Distribution of parallel operations
    • 并行运行的分配
    • JP2007280383A
    • 2007-10-25
    • JP2007086909
    • 2007-03-29
    • Mentor Graphics Corpメンター グラフィックス コーポレイション
    • GRODD LAURENCETODD ROBERT ATOMBLIN JIMMY J
    • G06F9/48
    • G06F9/5066
    • PROBLEM TO BE SOLVED: To suitably provide techniques to more efficiently distribute process data for software application among a plurality of computers. SOLUTION: Parallel operation sets for use by the software application are identified, each parallel operation set is then provided to a master computing thread for processing, together with its associated process data. Each master computing thread then provide its operation set to one or more slave computers based upon parallelism in the process data associated with its operation set. In this manner, the execution of operations by the software application is widely distributed among multiple networked computers based upon parallelism in both the process data used by the software and the operations executed by the software application. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:适当地提供技术以在多个计算机之间更有效地分发用于软件应用的过程数据。 解决方案:识别软件应用程序使用的并行操作集合,然后将每个并行操作集合及其关联的进程数据提供给主计算线程进行处理。 然后,每个主计算线程基于与其操作集相关联的过程数据中的并行性将其操作集提供给一个或多个从属计算机。 以这种方式,软件应用的操作的执行基于软件使用的过程数据和由软件应用执行的操作的并行性被广泛分布在多个联网计算机之间。 版权所有(C)2008,JPO&INPIT