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    • 2. 发明授权
    • Method for manufacturing a sensor device of a gaseous substance of interest
    • 制造感兴趣的气态物质的传感器装置的方法
    • US09006796B2
    • 2015-04-14
    • US13278942
    • 2011-10-21
    • Luigi Giuseppe Occhipinti
    • Luigi Giuseppe Occhipinti
    • G01N27/12G01N27/414
    • G01N27/4141
    • A method manufactures a sensor device for sensing a gaseous substance and includes a thin film transistor, which includes a source electrode, a drain electrode and a gate electrode; and an element sensitive to the gaseous substance. In particular, the method includes: forming a first metallic layer on a substrate; defining and patterning the first metallic layer for realizing the gate electrode; depositing a dielectric layer above the gate electrode; depositing a second metallic layer above the layer of dielectric material, defining and patterning the second metallic layer for realizing the source electrode and the drain electrode, and forming the sensitive element by filling a channel region of the thin film transistor with an active layer sensitive to the gaseous substance.
    • 一种制造用于感测气态物质的传感器装置,包括一个薄膜晶体管,它包括一个源电极,一个漏电极和一个栅电极; 和对气态物质敏感的元素。 特别地,该方法包括:在基板上形成第一金属层; 限定和构图第一金属层以实现栅电极; 在栅极电极上沉积介电层; 在介电材料层上方沉积第二金属层,限定和图案化用于实现源电极和漏电极的第二金属层,以及通过用薄膜晶体管的沟道区域填充敏感元件来形成敏感元件, 气态物质。
    • 3. 发明申请
    • METHOD FOR MANUFACTURING A SENSOR DEVICE OF A GASEOUS SUBSTANCE OF INTEREST
    • 制造气体传感器装置的方法
    • US20120096928A1
    • 2012-04-26
    • US13278942
    • 2011-10-21
    • Luigi Giuseppe Occhipinti
    • Luigi Giuseppe Occhipinti
    • H01L29/786G01N27/00H01L21/34
    • G01N27/4141
    • A method manufactures a sensor device for sensing a gaseous substance and includes a thin film transistor, which includes a source electrode, a drain electrode and a gate electrode; and an element sensitive to the gaseous substance. In particular, the method includes: forming a first metallic layer on a substrate; defining and patterning the first metallic layer for realizing the gate electrode; depositing a dielectric layer above the gate electrode; depositing a second metallic layer above the layer of dielectric material, defining and patterning the second metallic layer for realizing the source electrode and the drain electrode, and forming the sensitive element by filling a channel region of the thin film transistor with an active layer sensitive to the gaseous substance.
    • 一种制造用于感测气态物质的传感器装置,包括一个薄膜晶体管,它包括一个源电极,一个漏电极和一个栅电极; 以及对气态物质敏感的元素。 特别地,该方法包括:在基板上形成第一金属层; 限定和构图第一金属层以实现栅电极; 在栅极电极上沉积介电层; 在介电材料层上方沉积第二金属层,限定和图案化用于实现源电极和漏电极的第二金属层,以及通过用薄膜晶体管的沟道区域填充敏感元件来形成敏感元件, 气态物质。