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    • 5. 发明授权
    • Method and apparatus for coating a patterned thin film on a substrate from a fluid source with continuous feed capability
    • 从具有连续进料能力的流体源涂覆基底上的图案化薄膜的方法和装置
    • US07592043B2
    • 2009-09-22
    • US11057905
    • 2005-02-14
    • Paul E. BurrowsLinda S. Sapochak
    • Paul E. BurrowsLinda S. Sapochak
    • C23C16/00
    • C23C14/228C23C14/12C23C14/22
    • A method and apparatus for forming patterned coatings of thin film, non-polymerizable compounds on a substrate. A mixture of the non-polymerizable compound and a liquid carrier is pumped into the interior of a heated evaporation box having an internal temperature sufficient to convert substantially all of the non-polymerizable compound and liquid carrier to a gaseous form. The non-polymerizable compound and liquid carrier are then removed from the evaporation box via exit slit in the evaporation box. Adjacent to the exit slit, and maintained in a vacuum, is a first substrate upon which the non-polymerizable compound condenses. The first substrate is in motion, for example on a web roller, thereby allowing a continuous coating of the non-polymerizable compound to be applied to the first substrate. Once the non-polymerizable compound is applied to one side of the first substrate, an energy source is then directed toward the opposite side of the first substrate. In this manner, a portion of the non-polymerizable compound is removed from the first substrate. A second substrate is then provided adjacent to the first substrate, and the non-polymerizable compound is thereby transferred from the first substrate onto the second substrate. By repeatedly transferring portions of the non-polymerizable material from the first substrate to the second substrate in this manner, the thin film, non-polymerizable materials can be formed onto the second substrate in a predetermined pattern, and in a continuous and highly efficient process.
    • 一种用于在衬底上形成薄膜,不可聚合化合物的图案化涂层的方法和装置。 将不可聚合化合物和液体载体的混合物泵送到具有足以将基本上所有不可聚合化合物和液体载体转化为气态的内部温度的加热蒸发箱的内部。 然后通过蒸发箱中的出口狭缝将不可聚合化合物和液体载体从蒸发箱中取出。 邻近出口狭缝并保持在真空中,是不可聚合化合物冷凝的第一基底。 第一基板例如在卷材辊上运动,从而允许将不可聚合化合物连续涂覆到第一基板上。 一旦将不可聚合化合物施加到第一基底的一侧,然后将能量源指向第一基底的相对侧。 以这种方式,从第一衬底去除一部分不可聚合化合物。 然后,与第一基板相邻地设置第二基板,从而将非可聚合化合物从第一基板转印到第二基板上。 通过以这种方式将不可聚合材料的一部分从第一基板反复转移到第二基板,可以以预定图案形成薄膜,不可聚合材料到第二基板上,并且以连续和高效的方法 。