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    • 10. 发明授权
    • Z-axis compliant mechanical IC wiring substrate and method for making
the same
    • Z轴兼容机械IC布线基板及其制造方法
    • US5434452A
    • 1995-07-18
    • US309570
    • 1994-09-20
    • Leo M. Higgins, III
    • Leo M. Higgins, III
    • H01L23/498H01L29/41
    • H01L23/49827H01L2924/0002
    • A compliant integrated circuit (IC) wiring substrate (10) has an insulative carrier film (14) and a plurality of micro-beam conductors (12) in the carrier film. Each of the plurality of micro-beam conductors has a pair of contact bumps (16 and 18) connected to respective posts (22 and 24). A beam element (20) connects the pair of contact bumps and posts at opposing ends and opposing surfaces of the beam element. The plurality of micro-beam conductors extend through the thickness of the carrier film such that the pair of contact bumps protrude from the opposite surfaces of the carrier film. The compliance of the wiring substrate can be varied by varying locations of apertures in the insulative carrier film.
    • 兼容集成电路(IC)布线基板(10)在载体膜中具有绝缘载体膜(14)和多个微束导体(12)。 多个微光束导体中的每一个具有连接到各个柱(22和24)的一对接触凸块(16和18)。 梁元件(20)在梁元件的相对端和相对表面处连接一对接触凸块和柱。 多个微束导体延伸穿过载体膜的厚度,使得该对接触凸块从载体膜的相对表面突出。 布线基板的顺应性可以通过改变绝缘载体膜中的孔的位置来改变。