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    • 5. 发明授权
    • Lithographic process for device fabrication using a multilayer mask
which has been previously inspected
    • 使用先前检查过的多层掩模的器件制造的平版印刷工艺
    • US06042995A
    • 2000-03-28
    • US987491
    • 1997-12-09
    • Donald Lawrence White
    • Donald Lawrence White
    • G03F1/00G03F1/24G03F1/84H01L21/027G01N21/88G03F7/00
    • B82Y10/00B82Y40/00G03F1/24G03F1/84
    • A lithographic process for semiconductor device fabrication is disclosed. In the process a patterned mask having a multilayer film formed on a substrate is illuminated by extreme ultraviolet (EUV) radiation and the radiation reflected from the pattern mask is directed onto a layer of energy sensitive material formed on a substrate. The image of the pattern on the mask is thus introduced into the energy sensitive material. The image is then developed and transferred into the underlying substrate. The multilayer film is inspected for defects by applying a layer of energy-sensitive film (called the inspection film) in proximity to the multilayer film and exposing the energy-sensitive material to EUV radiation. The thickness of the multilayer film is such that a portion of the EUV radiation is transmitted through the inspection film, reflected from the multilayer film and back into the inspection film. The exposed inspection film is then developed, and the developed inspection film is inspected to determine if it indicates the presence of defects in the underlying multilayer film.
    • 公开了一种用于半导体器件制造的光刻工艺。 在该过程中,具有形成在衬底上的多层膜的图案掩模被极紫外(EUV)辐射照射,并且从图案掩模反射的辐射被引导到形成在衬底上的能量敏感材料层。 因此,掩模上的图案的图像被引入到能量敏感材料中。 然后将图像显影并转移到下面的基底中。 通过在多层膜附近施加一层能量敏感膜(称为检查膜)并将能量敏感材料暴露于EUV辐射来检查多层膜的缺陷。 多层膜的厚度使得EUV辐射的一部分透过检查膜,从多层膜反射回到检查膜中。 然后曝光的检查膜被开发,并且检查显影的检查膜以确定其是否表示在下面的多层膜中存在缺陷。
    • 8. 发明申请
    • Motion compensation for magnetic resonance imaging
    • 磁共振成像运动补偿
    • US20060244445A1
    • 2006-11-02
    • US11115308
    • 2005-04-27
    • Marshall SussmanNaeem MerchantGraham WrightLawrence White
    • Marshall SussmanNaeem MerchantGraham WrightLawrence White
    • G01V3/00
    • G01R33/565G01R33/56391G01R33/5676
    • An MRI system and method for acquiring motion-compensated MR image data of an object. The MRI system includes an MRI device for generating a uniform magnetic field through the object, magnetic field gradients for imaging a portion of the object and an RF excitation field for evoking NMR response signals from the object; a computer for controlling the operation of the MRI system; a motion compensation module for generating a plurality of navigator waveforms for evoking a corresponding plurality of navigator echoes from the portion of the object while the object is being imaged, and processing the plurality of navigator echoes by determining a subset of similar navigator echoes and removing rigid-body translation from the NMR response signals associated with the subset of similar navigator echoes; and, interface circuitry for generating the magnetic gradient, RF and navigator waveforms and sampling the NMR response signals and the plurality of navigator echoes.
    • 用于获取物体的运动补偿MR图像数据的MRI系统和方法。 MRI系统包括用于通过物体产生均匀磁场的MRI装置,用于对物体的一部分进行成像的磁场梯度和用于从物体引起NMR响应信号的RF激励场; 用于控制MRI系统的操作的计算机; 一种运动补偿模块,用于产生多个导航波形,用于在对象被成像时从对象的该部分引起相应的多个导航回波,以及通过确定类似的导航回波的子集并去除刚性来处理多个导航回波 从与类似导航回波的子集相关联的NMR响应信号中翻译; 以及用于产生磁梯度的接口电路,RF和导航波形以及对NMR响应信号和多个导航回波的采样。