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    • 2. 发明申请
    • INTERPOLATION OF IRREGULAR DATA IN A FINITE-DIMENSIONAL METRIC SPACE IN LITHOGRAPHIC SIMULATION
    • 在一个有限维度空间中的非线性数据的插值模拟
    • US20090169114A1
    • 2009-07-02
    • US11966920
    • 2007-12-28
    • Srini DoddiJunjiang LeiKuang-Hao LayWeiping Fang
    • Srini DoddiJunjiang LeiKuang-Hao LayWeiping Fang
    • G06K9/62
    • G06F17/5081
    • A method, system, and computer program product for preprocessing a pattern in a library of patterns and querying a preprocessed library of patterns are disclosed. Embodiments for querying a preprocessed library of patterns are disclosed for determining a distance between the representation for the first pattern and the representation for the second pattern, determining whether the distance between the representation for the first pattern and the representation for the second pattern is within the range for the first pattern, and transforming the second pattern with the transformation matrix to provide information about the second pattern. Embodiments for preprocessing a pattern in a library of patterns are disclosed for determining a transformation matrix for the first pattern, determining a range for the first pattern, wherein a distance between a representation for a first pattern and a representation for a second pattern is within the range and the second pattern can be transformed with the transformation matrix to provide information about the second pattern, and associating the range and the transformation matrix with the first pattern.
    • 公开了一种用于对模式库中的模式进行预处理并查询预处理的模式库的方法,系统和计算机程序产品。 公开了用于查询预处理的图案库的实施例,用于确定第一图案的表示与第二图案的表示之间的距离,确定第一图案的表示与第二图案的表示之间的距离是否在 范围,并且用变换矩阵变换第二图案以提供关于第二图案的信息。 公开了用于预处理图案库中的图案的实施例,用于确定第一图案的变换矩阵,确定第一图案的范围,其中第一图案的表示与第二图案的表示之间的距离在 范围,并且第二图案可以用变换矩阵变换以提供关于第二图案的信息,并且将范围和变换矩阵与第一图案相关联。
    • 3. 发明授权
    • Interpolation of irregular data in a finite-dimensional metric space in lithographic simulation
    • 在光刻模拟中的有限维度量空间中插入不规则数据
    • US08358828B2
    • 2013-01-22
    • US11966920
    • 2007-12-28
    • Srini DoddiJunjiang LeiKuang-Hao LayWeiping Fang
    • Srini DoddiJunjiang LeiKuang-Hao LayWeiping Fang
    • G06K9/00
    • G06F17/5081
    • A method, system, and computer program product for preprocessing a pattern in a library of patterns and querying a preprocessed library of patterns are disclosed. Embodiments for querying a preprocessed library of patterns are disclosed for determining a distance between the representation for the first pattern and the representation for the second pattern, determining whether the distance between the representation for the first pattern and the representation for the second pattern is within the range for the first pattern, and transforming the second pattern with the transformation matrix to provide information about the second pattern. Embodiments for preprocessing a pattern in a library of patterns are disclosed for determining a transformation matrix for the first pattern, determining a range for the first pattern, wherein a distance between a representation for a first pattern and a representation for a second pattern is within the range and the second pattern can be transformed with the transformation matrix to provide information about the second pattern, and associating the range and the transformation matrix with the first pattern.
    • 公开了一种用于对模式库中的模式进行预处理并查询预处理的模式库的方法,系统和计算机程序产品。 公开了用于查询预处理的图案库的实施例,用于确定第一图案的表示与第二图案的表示之间的距离,确定第一图案的表示与第二图案的表示之间的距离是否在 范围,并且用变换矩阵变换第二图案以提供关于第二图案的信息。 公开了用于预处理图案库中的图案的实施例,用于确定第一图案的变换矩阵,确定第一图案的范围,其中第一图案的表示与第二图案的表示之间的距离在 范围,并且第二图案可以用变换矩阵变换以提供关于第二图案的信息,并且将范围和变换矩阵与第一图案相关联。