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    • 5. 发明授权
    • Roll-vortex plasma chemical vapor deposition method
    • 卷涡等离子体化学气相沉积法
    • US07264849B2
    • 2007-09-04
    • US10618478
    • 2003-07-11
    • Marvin S KeshnerWarren B. JacksonKrzysztof Nauka
    • Marvin S KeshnerWarren B. JacksonKrzysztof Nauka
    • H05H1/24
    • C23C16/45502C23C16/4412C23C16/45578C23C16/509H01J37/32082H01J37/3244H01J37/32449
    • A chemical vapor deposition method includes a step of maintaining a hydrogen plasma at low pressure in a processing chamber. The processing chamber has a long, wide, thin geometry to favor deposition of thin-film silicon on sheet substrates over the chamber walls. The sheet substrates are moved through between ends. A pair of opposing radio frequency electrodes above and below the workpieces are electrically driven hard to generate a flat, pancaked plasma cloud in the middle spaces of the processing chamber. A collinear series of gas injector jets pointed slightly up on a silane-jet manifold introduce 100% silane gas at high velocity from the side in order to roll the plasma cloud in a coaxial vortex. A second such silane-jet manifold is placed on the opposite side and pointed slightly down to further help roll the plasma and maintain a narrow band of silane concentration. A silane-concentration monitor observes the relative amplitudes of the spectral signatures of the silane and the hydrogen constituents in the roll-vortex plasma and outputs a process control feedback signal that is used to keep the silane in hydrogen concentration at about 6-7%.
    • 化学气相沉积方法包括在处理室中保持低压下的氢等离子体的步骤。 处理室具有长的,宽的,薄的几何形状,以有利于在室壁上的薄片基材上沉积薄膜硅。 片材基片在两端之间移动。 在工件上方和下方的一对相对的射频电极被电驱动,以在处理室的中间空间中产生平坦的,扁平的等离子体云。 在硅烷喷射歧管上略微向上突出的共线系列气体喷射器喷嘴从侧面以高速度引入100%硅烷气体,以在同轴涡流中滚动等离子体云。 第二个这样的硅烷喷射歧管放置在相反的一侧并稍微向下倾斜,以进一步帮助滚动等离子体并保持窄的硅烷浓度带。 硅烷浓度监测器观察到辊涡流等离子体中硅烷和氢组分的光谱特征的相对振幅,并输出用于将硅烷在氢浓度中保持在约6-7%的过程控制反馈信号。
    • 6. 发明申请
    • Method of making active matrix display
    • 制作有源矩阵显示的方法
    • US20060017875A1
    • 2006-01-26
    • US10897533
    • 2004-07-23
    • Frederick PernerKrzysztof Nauka
    • Frederick PernerKrzysztof Nauka
    • G02F1/1335G02F1/1343
    • G02F1/1362G02F1/133305G02F1/1368G02F2001/136295
    • A method of making a lower cost active matrix display. In a particular embodiment, the method includes providing at least one first conductor upon a substrate and depositing a gate dielectric upon the first conductor and substrate. At least one paired second conductor and a pixel electrode are deposited upon the gate dielectric, with the second conductor crossing the first conductor and with a narrow gap between the paired second conductor and the pixel electrode. A semiconductor material is deposited over the paired second conductor and pixel electrode, filling the narrow gap. The narrow gap shelters a portion of the semiconductor material, which serves as a semiconductor bridge capable of functioning either as an insulator or as a channel region of a field effect transistor. The remaining, unsheltered semiconductor material is removed. A liquid crystal layer is then deposited upon the paired second conductor, the pixel electrode and the sheltered semiconductor material, and a translucent conductor is deposited upon the liquid crystal display layer. An associated display is also provided
    • 制作成本较低的有源矩阵显示的方法。 在特定实施例中,该方法包括在衬底上提供至少一个第一导体并在第一导体和衬底上沉积栅极电介质。 至少一对成对的第二导体和像素电极沉积在栅极电介质上,其中第二导体与第一导体交叉并且在成对的第二导体和像素电极之间具有窄间隙。 半导体材料沉积在成对的第二导体和像素电极上,填充窄间隙。 窄间隙避开半导体材料的一部分,其用作能够用作场效应晶体管的绝缘体或沟道区的半导体桥。 剩余的未加帽的半导体材料被去除。 然后将液晶层沉积在成对的第二导体,像素电极和遮蔽半导体材料上,并且半透明导体沉积在液晶显示层上。 还提供了相关联的显示