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    • 4. 发明授权
    • Analog-digital converter
    • 模数转换器
    • US4901079A
    • 1990-02-13
    • US153568
    • 1988-02-02
    • Nao NagashimaKoji SuzukiJyoji NagahiraKouki KurodaYoshiaki Takayanagi
    • Nao NagashimaKoji SuzukiJyoji NagahiraKouki KurodaYoshiaki Takayanagi
    • H03M1/00
    • H03M1/56
    • An analog-to-digital converter comprises an output generator for forming an output signal in response to application of a start signal; a comparator for comparing an analog signal, to be converted to a digital signal, with the level of the output signal formed by the output generator and for providing an output representing the time period from initiation of formation of the output signal to occurrence of a predetermined relation between the output signal and the analog signal; and a clock signal generator. The converter further comprises a digital computer that includes an output terminal from which the start signal is applied to the output generator and an input terminal for receiving the output from the comparator. The computer further includes a counter for counting the pulses produced by the clock signal generator from the time the start signal is applied from the output terminal until a time when the input terminal receives the output representing the aforesaid time period, and a digital signal generator for forming a digital signal corresponding to the output signal on the basis of the count of clock pulses by the counter.
    • 模数转换器包括响应于启动信号的应用而形成输出信号的输出发生器; 比较器,用于将要转换为数字信号的模拟信号与由输出发生器形成的输出信号的电平进行比较,并提供表示从开始形成输出信号到发生预定的时间段的输出 输出信号与模拟信号之间的关系; 和时钟信号发生器。 该转换器还包括数字计算机,该数字计算机包括输出端,起始信号从该输出端施加到输出发生器,以及输入端用于接收比较器的输出。 该计算机还包括一个计数器,用于对从时钟信号发生器产生的脉冲从输出端施加开始信号直到输入端接收到表示上述时间周期的输出的时间为止计数;以及数字信号发生器, 基于计数器的时钟脉冲计数,形成与输出信号对应的数字信号。
    • 9. 发明授权
    • Semiconductor process system and positioning method and apparatus for
transfer mechanism thereof
    • 半导体工艺系统及其转移机构的定位方法及装置
    • US5566076A
    • 1996-10-15
    • US286173
    • 1994-08-05
    • Kouki Kuroda
    • Kouki Kuroda
    • H01L21/00G06F19/00
    • H01L21/67057
    • A semiconductor wafer cleaning system includes a chemical cleaning section having a process vessel. A holder is arranged in the process vessel. The holder holds 50 wafers at once. Fifty grooves for receiving peripheral portions of wafers are formed on the holder. Fifty wafers are passed/received all together by a chuck having a pair of opening/closing arms to/from the holder. Fifty grooves for receiving peripheral portions of wafers are formed on each arm. A positioning apparatus is used to correct the offset of the relative position between the chuck and the holder from a reference relative position for transfer of wafers. The positioning apparatus has a detection unit which can be mounted on the chuck and has image pickup sections on two end portions. Each image pickup section simultaneously images a groove on the chuck and a corresponding groove on the holder. The resultant images of the two grooves are displayed within the same coordinate system on a monitor to be superposed on each other. The chuck and the holder are relatively moved to correct the offset between the images of the two grooves, thereby correcting the offset of the current relative position from the reference relative position.
    • 半导体晶片清洁系统包括具有处理容器的化学清洁部分。 持有人被安排在处理容器中。 持有人一次拿着50个晶圆。 在保持器上形成用于接收晶片周边部分的五十个槽。 通过具有一对打开/关闭臂的卡盘将五十个薄片通过/接收在一起。 在每个臂上形成用于接收晶片周边部分的五十个凹槽。 定位装置用于校正卡盘和保持器之间的相对位置的偏移距离用于转移晶片的参考相对位置。 定位装置具有能够安装在卡盘上的检测单元,在两端部具有摄像部。 每个图像拾取部分同时对卡盘上的凹槽和保持器上相应的凹槽进行成像。 两个凹槽的合成图像显示在彼此重叠的监视器上的相同坐标系中。 卡盘和保持器相对移动以校正两个凹槽的图像之间的偏移,从而校正当前相对位置与参考相对位置的偏移。
    • 10. 发明授权
    • Electrostatic recording apparatus including a controlled developer device
    • 静电记录装置,包括受控显影装置
    • US4755850A
    • 1988-07-05
    • US921103
    • 1986-10-21
    • Koji SuzukiKouki KurodaJyoji Nagahira
    • Koji SuzukiKouki KurodaJyoji Nagahira
    • G03G15/00G03G15/043G03G15/06G03G15/08
    • G03G15/065G03G15/043G03G15/5037
    • An electrostatic recording apparatus including an image former for forming an electrostatic latent image, a device for developing the formed image, and a device for applying a bias voltage to the developer device in accordance with an identification as to whether the original relates to a character image or a half tone image. The bias voltage applying device includes first and second voltage generators for generating different bias voltages, and a selector device for selecting between the first and second generators. The bias voltage applying device is operable, during a developing time, to apply the selected bias voltage to the developer device, and during a non-developing time, to apply thereto a bias voltage different from the bias voltage applied during developing.
    • 一种静电记录装置,包括用于形成静电潜像的图像形成装置,用于显影形成的图像的装置,以及根据关于原稿是否与字符图像有关的标识,向显影装置施加偏置电压的装置 或半色调图像。 偏置电压施加装置包括用于产生不同偏置电压的第一和第二电压发生器,以及用于在第一和第二发生器之间进行选择的选择装置。 偏置电压施加装置在显影时间期间可操作地将所选择的偏置电压施加到显影装置,并且在非显影时间期间,施加与显影期间施加的偏置电压不同的偏置电压。