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    • 2. 发明授权
    • Testing apparatus for semiconductor devices
    • 半导体器件测试装置
    • US4904934A
    • 1990-02-27
    • US259779
    • 1988-10-19
    • Ryouji NishihashiKiyoji ImanakaKatsuji KawaguchiHidekazu Iwasaki
    • Ryouji NishihashiKiyoji ImanakaKatsuji KawaguchiHidekazu Iwasaki
    • G01R31/28
    • G01R31/2867G01R31/2893
    • A testing apparatus includes a turntable, a driving device for rotating the turntable by a predetermined angle, and a plurality of pallets symmetrically fixed on the turntable around a center of rotation of the turntable. Each pallet holds a plurality of semiconductor devices and has electrode patterns for connection to leads of the semiconductor devices. A tester for testing the semiconductor devices is electrically connected with the electrode patterns of one of the pallets located at a first position in the rotation of the turntable by a connecting device. An exchanging device exchanges the semiconductor devices for new ones on one of the pallets located at a second position in the rotation of the turntable. A cover covers the turntable except around the second position. A heating device heats the inside of the cover to maintain the semiconductor devices held on the pallets in the cover at a high temperature.
    • 测试装置包括转盘,用于使转台旋转预定角度的驱动装置和围绕转盘旋转中心的对称地固定在转台上的多个托盘。 每个托盘保持多个半导体器件,并且具有用于连接到半导体器件的引线的电极图案。 用于测试半导体器件的测试器通过连接装置与位于转台旋转中的第一位置的托盘之一的电极图案电连接。 交换装置在位于转盘旋转的第二位置的托盘中的一个托盘上交换新的半导体装置。 盖子覆盖转盘,除了第二个位置之外。 加热装置加热盖的内部以将保持在盖中的托盘上的半导体装置保持在高温。