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    • 1. 发明授权
    • Deformable mirror
    • 变形镜
    • US07397593B2
    • 2008-07-08
    • US11704096
    • 2007-02-08
    • Kenzi MurakamiMasahiro Nishio
    • Kenzi MurakamiMasahiro Nishio
    • G02B26/08
    • G02B26/0825
    • A deformable mirror includes a deformable section in which, a reflecting surface is formed, a fixing section which fixes an outer periphery of the deformable section, a GND electrode which is formed on the deformable section, a drive electrode which is provided facing the GND electrode, and a driving-signal source which deforms the deformable section by an electric voltage applied between the GND electrode and the drive electrode. The deformable mirror is sealed such that a pressure inside to be lower than an atmospheric pressure, and is provided with a capacitance detecting circuit which detects a change in response characteristics of the deformable section associated with a pressure change of a sealed-inside.
    • 可变形反射镜包括可变形部分,其中形成反射表面,固定可变形部分的外周的固定部分,形成在可变形部分上的GND电极,面向GND电极的驱动电极 以及通过施加在GND电极和驱动电极之间的电压使变形部变形的驱动信号源。 可变形反射镜被密封成使其内部的压力低于大气压,并且设置有电容检测电路,其检测与密封的内部的压力变化相关联的可变形部分的响应特性的变化。
    • 5. 发明申请
    • Optical switch
    • 光开关
    • US20070003187A1
    • 2007-01-04
    • US11452811
    • 2006-06-14
    • Junichi NakanoDaisuke MatsuoKenzi MurakamiYoshitaka Kamiya
    • Junichi NakanoDaisuke MatsuoKenzi MurakamiYoshitaka Kamiya
    • G02B6/26
    • G02B6/359G02B6/2931G02B6/3518G02B6/357G02B6/3584
    • An optical switch includes an input optical fiber, an output optical fiber, a grating which performs spectral separation of an optical signal to a plurality of optical signals having different wavelengths, a plurality of movable mirrors, each reflecting an optical light subjected to spectral separation, and directing the optical light appropriately to the input fiber, and each of the movable mirrors can be inclined, a mirror-angle detector which detects an angle of inclination of each of the movable mirrors, a table which associates a wavelength number which identifies the optical signals of the plurality of wavelengths, and an output-destination number which identifies the input optical fiber or the output optical fiber, with the angle of inclination of each movable mirror, and a control circuit which performs a feed-back control such that an angle of inclination AD which is output from the table and an output from the mirror-angle detector match.
    • 光开关包括输入光纤,输出光纤,光信号对具有不同波长的多个光信号进行光谱分离的光栅;多个可移动反射镜,每个可反射镜反射进行光谱分离的光, 并且将光学光适当地引导到输入光纤,并且每个可移动反射镜可以倾斜,检测每个可移动反射镜的倾斜角度的镜像检测器,将表示光学器件的波长数相关联的表格 多个波长的信号以及识别输入光纤或输出光纤的输出目的地号码与每个可移动反射镜的倾斜角度以及执行反馈控制的控制电路,使得角度 从表中输出的倾斜度AD和来自镜角检测器的输出匹配。
    • 6. 发明申请
    • Optical deflector
    • 光学偏转器
    • US20060125597A1
    • 2006-06-15
    • US11293071
    • 2005-12-02
    • Yoshitaka KamiyaKenzi MurakamiDaisuke MatsuoYosuke Oka
    • Yoshitaka KamiyaKenzi MurakamiDaisuke MatsuoYosuke Oka
    • H01C10/32
    • G02B26/0833H01C10/345
    • The present invention provides an optical deflector which is capable of reducing a temperature drift of a strain gauge due to a temperature gradient, and detecting with high accuracy an angular displacement of a mirror surface. The optical deflector which deflects light includes a movable plate, two fixed portions which are disposed at an outer side of the movable plate, two elastic supporting members which are disposed such that the elastic supporting members are substantially symmetric about a center line of the movable plate, and which connect the movable plate and the two fixed portions, an angular-displacement detecting portion having a Wheatston bridge as a measuring portion which includes two active resistors, and two reference resistors, and detects an angular displacement of the movable plate, and at least one resistor element, such as the two active resistors are provided on the elastic supporting portion. In the optical deflector, all the four resistor elements are in an isothermal characteristics area which is an area in which all the resistor elements are at approximately the same temperature condition.
    • 本发明提供一种光偏转器,其能够降低由于温度梯度引起的应变仪的温度漂移,并以高精度检测镜面的角位移。 偏光的光偏转器包括可移动板,设置在可动板的外侧的两个固定部分,两个弹性支撑构件,其布置成使得弹性支撑构件围绕可动​​板的中心线基本对称 并且连接可动板和两个固定部分的角位移检测部分,具有Wheatston桥作为测量部分的测量部分包括两个有源电阻器和两个参考电阻器,并检测可动板的角位移,并且在 至少一个电阻元件,例如两个有源电阻器设置在弹性支撑部分上。 在光学偏转器中,所有四个电阻元件均处于等温特性区域,其中所有电阻器元件处于大致相同的温度条件下。
    • 7. 发明授权
    • Deformable mirror
    • 变形镜
    • US07474455B2
    • 2009-01-06
    • US11710807
    • 2007-02-26
    • Masahiro NishioKenzi Murakami
    • Masahiro NishioKenzi Murakami
    • G02B26/00G02B26/02G02B26/08
    • G02B26/0825
    • A deformable mirror includes a deformable section on which a reflecting surface and a COM electrode are formed, a fixing section which fixes the deformable section, a driving and sensing electrode (driving force generating unit) which has a plurality of driving and sensing electrodes provided facing the COM electrode, and which drives the deformable section by applying an electric potential difference between the COM electrode and the driving and sensing electrode, and a capacitance detecting circuit which detects simultaneously a plurality of capacitances between the COM electrode and the driving and sensing electrode.
    • 可变形反射镜包括形成反射表面和COM电极的可变形部分,固定可变形部分的固定部分,驱动感测电极(驱动力产生单元),驱动感测电极(驱动力产生单元)具有多个驱动和感测电极, COM电极,并且通过在COM电极和驱动感测电极之间施加电位差来驱动可变形部分;以及电容检测电路,其同时检测COM电极和驱动感测电极之间的多个电容。
    • 9. 发明授权
    • Optical switch
    • 光开关
    • US07317850B2
    • 2008-01-08
    • US11452811
    • 2006-06-14
    • Junichi NakanoDaisuke MatsuoKenzi MurakamiYoshitaka Kamiya
    • Junichi NakanoDaisuke MatsuoKenzi MurakamiYoshitaka Kamiya
    • G02B6/26
    • G02B6/359G02B6/2931G02B6/3518G02B6/357G02B6/3584
    • An optical switch includes an input optical fiber, an output optical fiber, a grating which performs spectral separation of an optical signal to a plurality of optical signals having different wavelengths, a plurality of movable mirrors, each reflecting an optical light subjected to spectral separation, and directing the optical light appropriately to the input fiber, and each of the movable mirrors can be inclined, a mirror-angle detector which detects an angle of inclination of each of the movable mirrors, a table which associates a wavelength number which identifies the optical signals of the plurality of wavelengths, and an output-destination number which identifies the input optical fiber or the output optical fiber, with the angle of inclination of each movable mirror, and a control circuit which performs a feed-back control such that an angle of inclination AD which is output from the table and an output from the mirror-angle detector match.
    • 光开关包括输入光纤,输出光纤,光信号对具有不同波长的多个光信号进行光谱分离的光栅;多个可移动反射镜,每个可反射镜反射进行光谱分离的光, 并且将光学光适当地引导到输入光纤,并且每个可移动反射镜可以倾斜,检测每个可移动反射镜的倾斜角度的镜像检测器,将表示光学器件的波长数相关联的表格 多个波长的信号以及识别输入光纤或输出光纤的输出目的地号码与每个可移动反射镜的倾斜角度以及执行反馈控制的控制电路,使得角度 从表中输出的倾斜度AD和来自镜角检测器的输出匹配。
    • 10. 发明申请
    • Deformable mirror
    • 变形镜
    • US20060055997A1
    • 2006-03-16
    • US11219947
    • 2005-09-06
    • Kenzi Murakami
    • Kenzi Murakami
    • G02B26/08
    • G02B26/0825
    • A deformable mirror has a first deforming portion that has a reflection surface, a second deforming portion surrounding the first deforming portion and has lower mechanical stiffness than that of the first deforming portion, a fixing portion fixing a peripheral portion of the second deforming portion, deformer for acting on the first deforming portion to deform the first deforming portion and second deforming portion, and restrictor for restricting deformation in a main deforming direction of a portion of the first deforming portion that is outside an operation region of the deformer.
    • 可变形反射镜具有第一变形部,该第一变形部具有反射面,围绕第一变形部的第二变形部具有比第一变形部的机械刚度低的第二变形部,固定第二变形部的周缘部的固定部,变形镜 用于作用在第一变形部分上以使第一变形部分和第二变形部分变形,以及限制器,用于限制在变形器的操作区域外部的第一变形部分的一部分的主变形方向上的变形。