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    • 1. 发明授权
    • Bonding method and apparatus therefor
    • 接合方法及其装置
    • US08901465B2
    • 2014-12-02
    • US12277863
    • 2008-11-25
    • Osamu OhashiKeiichi MinegishiYasunori YoshidaKouji Wada
    • Osamu OhashiKeiichi MinegishiYasunori YoshidaKouji Wada
    • B23K13/01C04B37/00B23K20/02
    • B23K20/02
    • A nitrogen gas tank, a rotary pump and a mechanical booster pump are connected to a bonding vessel that constitutes a bonding apparatus for carrying out diffusion bonding, the apparatus further comprising a pressure sensor. A nitrogen gas atmosphere is formed inside the bonding vessel, and under control operations of a control circuit, a nitrogen introduction rate is controlled so that a pressure is substantially fixed at a predetermined pressure between 3-105 Pa. At such a state, under the action of a rod of a hydraulic cylinder, a second electrode is brought into proximity with a first electrode, so that ultimately, a first object to be bonded and a second object to be bonded on the first electrode are pressed. Further, current is applied through the first electrode and the second electrode with respect to the first object to be bonded and the second object to be bonded.
    • 氮气罐,旋转泵和机械增压泵连接到构成用于进行扩散接合的接合装置的接合容器,该装置还包括压力传感器。 在接合容器内形成氮气气氛,在控制电路的控制下,控制氮气导入速度,使压力基本上固定在3-105Pa之间的预定压力下,在这种状态下 液压缸的杆的作用,第二电极与第一电极接近,从而最终压制要接合的第一物体和待接合在第一电极上的第二物体。 此外,电流通过第一电极和第二电极相对于第一被接合物体和第二待接合物体施加。
    • 2. 发明申请
    • BONDING METHOD AND APPARATUS THEREFOR
    • 连接方法和装置
    • US20090139646A1
    • 2009-06-04
    • US12277863
    • 2008-11-25
    • Osamu OHASHIKeiichi MinegishiYasunori YoshidaKouji Wada
    • Osamu OHASHIKeiichi MinegishiYasunori YoshidaKouji Wada
    • B32B37/06
    • B23K20/02
    • A nitrogen gas tank, a rotary pump and a mechanical booster pump are connected to a bonding vessel that constitutes a bonding apparatus for carrying out diffusion bonding, the apparatus further comprising a pressure sensor. A nitrogen gas atmosphere is formed inside the bonding vessel, and under control operations of a control circuit, a nitrogen introduction rate is controlled so that a pressure is substantially fixed at a predetermined pressure between 3-105 Pa. At such a state, under the action of a rod of a hydraulic cylinder, a second electrode is brought into proximity with a first electrode, so that ultimately, a first object to be bonded and a second object to be bonded on the first electrode are pressed. Further, current is applied through the first electrode and the second electrode with respect to the first object to be bonded and the second object to be bonded.
    • 氮气罐,旋转泵和机械增压泵连接到构成用于进行扩散接合的接合装置的接合容器,该装置还包括压力传感器。 在接合容器内形成氮气气氛,在控制电路的控制下,控制氮气导入速度,使压力基本上固定在3-105Pa之间的预定压力下,在这种状态下 液压缸的杆的作用,第二电极与第一电极接近,从而最终压制要接合的第一物体和待接合在第一电极上的第二物体。 此外,电流通过第一电极和第二电极相对于第一被接合物体和第二待接合物体施加。