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    • 2. 发明授权
    • Roll coating device for forming a thin film of uniform thickness
    • 用于形成均匀厚度的薄膜的辊涂装置
    • US5755883A
    • 1998-05-26
    • US621336
    • 1996-03-25
    • Kazuo KinoseKazuto OzakiTetsuo AzumaHideo Okada
    • Kazuo KinoseKazuto OzakiTetsuo AzumaHideo Okada
    • B05C1/08B05C1/02
    • B05C1/0865B05C1/0813B05C1/0834
    • A roll coater for forming a film of uniform thickness on a substrate W includes a bottom plate 6 for transporting the substrate W in a predetermined direction F, a coating rubber roll 4 for transferring a coating liquid Q adhering to the outer circumferential face onto the substrate W, and an ink supplying device for supplying ink to the outer circumferential face of the roll 4. The ink supplying device includes a roll 1 for transferring the coating liquid Q adhering to the outer circumferential face thereof to the outer circumferential surface of a roll 4, metal doctor 2 for supplying a coated film of a coating liquid Q of uniform thickness, and a coating liquid reservoir 3 for storing coating liquid Q. A scraper 7 for scraping the remaining coating liquid Q on the outer circumferential face of the metal roll 1 is provided downstream of the roll 4 and upstream of the coating liquid reservoir 3.
    • 用于在基板W上形成均匀厚度的膜的辊涂机包括用于沿预定方向F输送基板W的底板6,用于将附着在外周面上的涂布液体Q转印到基板上的涂布橡胶辊4 W和用于向辊4的外周面供墨的供墨装置。供墨装置包括辊1,用于将附着在其外周面上的涂布液Q转印到辊4的外周面上 用于供给厚度均匀的涂布液Q的涂膜的金属刮刀2以及用于储存涂布液Q的涂液储存器3.用于刮擦金属辊1的外周面上的剩余涂布液Q的刮刀7 设置在辊4的下游和涂覆液储存器3的上游。
    • 3. 发明授权
    • Method of forming a thin film on the surface of a substrate using a roll
coater
    • 使用辊涂机在基板的表面上形成薄膜的方法
    • US5631048A
    • 1997-05-20
    • US397545
    • 1995-02-28
    • Kazuo KinoseKazuto OzakiTsuyoshi Okumura
    • Kazuo KinoseKazuto OzakiTsuyoshi Okumura
    • B05C1/02B05C1/08B05D1/28G03C1/74G03F7/16H01L21/027H01L21/30
    • B05C1/0834B05D1/28
    • A method of forming a thin film on the surface of a substrate using a roll coater without forming a projection of the thin film near the rear edge of the substrate includes the steps of: loading a substrate on a stage, moving the stage in a predetermined direction up to a certain position where at least a portion of the surface of the substrate comes into contact with the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is a predetermined value, and further moving the stage in the predetermined direction to cancel the contact between the surface of the substrate and the applicator roll while controlling the operation of the roll coating apparatus so that the amount of coating fluid transferred per unit area from the applicator roll to the substrate surface is relatively reduced. Until the stage reaches the certain position, a predetermined amount of coating liquid is supplied, and thereafter, a smaller amount of coating liquid is supplied to the surface of the substrate. For example, the transfer speed of the stage is increased while maintaining the rotation speed of the applicator roll at a constant level, or the rotating speed of the applicator roll is decreased while maintaining the transfer speed of the stage at a constant level.
    • 使用辊涂机在基板的表面上形成薄膜的方法,而不在基板的后边缘附近形成薄膜的突起,包括以下步骤:将基板载置在载物台上,将载物台移动到预定的 方向一直到一定位置,其中衬底的表面的至少一部分与涂布辊接触,同时控制辊涂装置的操作,使得每单位面积从涂布辊转移到涂布辊的涂布液的量 基板表面是预定值,并且进一步在预定方向上移动台架以消除基板表面与涂布辊之间的接触,同时控制辊涂装置的操作,使得每单位面积转印的涂布液量 从涂布辊到基材表面相对减少。 直到阶段到达某一位置,供给预定量的涂布液,之后将更少量的涂布液供给到基板的表面。 例如,在保持涂布辊的转速保持恒定的水平的同时,增加载物台的传送速度,或者在使载物台的传送速度保持在一定水平的同时降低涂布辊的旋转速度。