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    • 1. 发明授权
    • Pull-up drying method and apparatus
    • 上拉干燥方法和装置
    • US06179930B2
    • 2001-01-30
    • US09011816
    • 1998-06-15
    • Katsuya IdeKazuo OikeYasuhiro Kitagawa
    • Katsuya IdeKazuo OikeYasuhiro Kitagawa
    • B08B300
    • H01L21/02052H01L21/67034
    • A new drying method and apparatus is provided for drying a semiconductor device substrate, a liquid crystal panel substrate, or the like, which can reduce the possibility of contamination during drying, reduce facility costs and the area required for setting the facilities, and can perform drying in batches. Of the four sides of the upper end of the pull-up bath 10, two of the sides that oppose each other have a smaller height than the remaining two sides, and form overflow portions 10a where water in the pull-up bath overflows into a drainage bath 20. A rod-shaped heater 11 is mounted to the inside of the pull-up bath 10, and a heater cover 12 is disposed above the heater 11, with a pair of exhaust tubes 13 being led out to a location above the pull-up bath 10 so as to allow discharge of gas to the outside therefrom. A water supply tube 14 is connected to the bottom surface of the pull-up bath 10 to allow ultra-pure water to be supplied from a water supply system to be described later. A drainage tube 21 is connected to the lower portion of the drainage bath 20, as well as to a water supply control device 22, composed of a circulating pump, a change-over valve, or the like.
    • 提供了一种新的干燥方法和装置,用于干燥半导体器件基板,液晶面板基板等,这可以降低干燥期间污染的可能性,降低设备成本和设置设备所需的面积,并且可以执行 分批干燥。 在上拉槽10的上端的四个侧面中,两个彼此相对的两个侧面的高度比其余的两侧具有更小的高度,并且形成溢出部分10a,其中上拉浴中的水溢出到 排水槽20.杆状加热器11安装在上拉槽10的内部,加热器盖12设置在加热器11的上方,一对排气管13被引出到 上拉浴10,以便允许气体从外部排出。 供水管14连接到上拉槽10的底面,以允许从稍后描述的供水系统供应超纯水。 排水管21连接到排水槽20的下部,以及由循环泵,转换阀等构成的供水控制装置22。
    • 2. 发明授权
    • Liquid-crystal display unit, and process for manufacturing the same
    • 液晶显示单元及其制造方法
    • US6104459A
    • 2000-08-15
    • US29913
    • 1998-03-10
    • Kazuo OikeKozo Gyoda
    • Kazuo OikeKozo Gyoda
    • G02F1/1335G02F1/1365
    • G02F1/133553G02F1/133514G02F1/133516G02F1/1365G02F2001/133521
    • The present invention provides a liquid-crystal display device and a process for manufacturing the same, wherein the unit achieves an inhibition of reduction in the displaying brightness even when used for a color reflection-type liquid-crystal display device, and a restriction of variation in the color tone which varies depending on the quantity of incident light. For each of the pixel regions, a pixel reflective layer 13 is formed with Ta. On the surface of each of a plurality of the pixel regions, three anodic oxide films 13a, 13b and 13c are formed with mutually different thicknesses. The thicknesses of the anodic oxide films are determined such that light reflected by the pixel reflective layer 13 is colored into three different colors.
    • PCT No.PCT / JP97 / 02426 Sec。 371日期1998年3月10日 102(e)1998年3月10日PCT PCT 1997年7月11日PCT公布。 第WO98 / 02775号公报 日期1998年1月22日本发明提供一种液晶显示装置及其制造方法,其中,即使在彩色反射式液晶显示装置中使用时,也能够抑制显示亮度的降低, 以及根据入射光量而变化的色调变化的限制。 对于每个像素区域,用Ta形成像素反射层13。 在多个像素区域中的每一个的表面上形成有相互不同厚度的三个阳极氧化膜13a,13b和13c。 确定阳极氧化膜的厚度,使得由像素反射层13反射的光被着色成三种不同的颜色。
    • 4. 发明授权
    • Liquid crystal device, liquid crystal device manufacturing method and electronic apparatus
    • 液晶装置,液晶装置的制造方法和电子装置
    • US06618100B2
    • 2003-09-09
    • US09269039
    • 1999-03-18
    • Kazuo OikeYoshio YamaguchiNaoki Makino
    • Kazuo OikeYoshio YamaguchiNaoki Makino
    • G02F1136
    • G02F1/1362G02F1/13439G02F1/136209G02F2001/133354
    • A liquid crystal device comprises a plurality of pixel electrodes (6), and nonlinear elements (11) including element-side electrodes (14) electrically connected to the pixel electrodes (6). An element-side electrode (14) is shaped in a pattern (14a) formed along the edge of a pixel electrode (6). The presence of the element-side electrode pattern (14a) makes it possible to prevent etchant from entering between said pixel electrode (6) and the element-side electrode (14) and causing a wire break therebetween in patterning the pixel electrode (6). When the element-side electrode pattern (14a) is made of a substance having a higher light-shielding ability than that of the pixel electrode (6), it may be used as a mark for adjusting position in bonding an element substrate and an opposite substrate.
    • 液晶装置包括多个像素电极(6),以及包括电连接到像素电极(6)的元件侧电极(14)的非线性元件(11)。 元件侧电极(14)成形为沿像素电极(6)的边缘形成的图案(14a)。 元件侧电极图案(14a)的存在使得可以防止蚀刻剂在像素电极(6)图案化之间在所述像素电极(6)和元件侧电极(14)之间进入并引起断线, 。 当元件侧电极图案(14a)由具有比像素电极(6)的屏蔽能力更高的物质制成时,可以将其用作在元件基板的接合和相对的位置的调整位置的标记 基质。