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    • 8. 发明授权
    • Semiconductor laser, semiconductor device, and their manufacture methods
    • 半导体激光器,半导体器件及其制造方法
    • US06606335B1
    • 2003-08-12
    • US09743636
    • 2001-01-12
    • Akito KuramataKazuhiko Horino
    • Akito KuramataKazuhiko Horino
    • H01S500
    • H01S5/32H01S5/021H01S5/3201H01S5/3226H01S5/32341H01S2304/12
    • A substrate is made of SiC. A plurality of AlxGa1−xN patterns (0≦x≦1) is formed on a surface of the substrate and dispersively distributed in an in-plane of the substrate. An AlyGa1−yN buffer layer (0≦y≦1) covers the surface of the substrate and the AlxGa1−xN patterns. A laser structure is formed on the AlyGa1−yN buffer layer. Since the AlGaN buffer layer is grown by using the AlGaN patterns as seed crystals, a dislocation density of a predetermined region in the AlGaN buffer layer can be lowered. The characteristics of a laser structure can be improved by forming the laser structure above the region having a low dislocation density. Since the AlGaN pattern has electric conductivity, the device resistance can be suppressed from being increased.
    • 衬底由SiC制成。 在基板的表面上形成多个Al x Ga 1-x N图案(0 <= x <= 1),并且分散地分布在基板的平面内。 AlyGa1-yN缓冲层(0 <= y <= 1)覆盖衬底的表面和Al x Ga 1-x N图案。 在AlyGa1-yN缓冲层上形成激光结构。 由于通过使用AlGaN图案作为晶种生长AlGaN缓冲层,所以可以降低AlGaN缓冲层中的预定区域的位错密度。 可以通过在低位错密度的区域上形成激光结构来改善激光器结构的特性。 由于AlGaN图案具有导电性,所以可以抑制器件电阻的增加。