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1. 发明申请

US20100324718A1 Substrate processing system and group management system 有权
标题翻译：基板处理系统和组管理系统
公开(公告)号：US20100324718A1
公开(公告)日：2010-12-23
申请号：US12805199
申请日：2010-07-19
申请人： Kazuhide Asai , Hiroyuki Iwakura
发明人： Kazuhide Asai , Hiroyuki Iwakura
IPC分类号： G06F19/00
CPC分类号： H04L12/66
摘要： It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses. The substrate processing system according to this invention has a plurality of substrate processing apparatuses for processing substrates and the group management system connected to the substrate processing apparatuses, and the group management system includes a structure information memory device (structure management device) for memorizing structure information, a plurality of communication devices (connection management devices) for communicating with at least one of the plural substrate processing apparatuses based on the structure information memorized in the structure information memory device, and an apparatus information storage device (data management device) connected to any of the plural communication devices based on the structure information memorized in the structure information memory device and which stores information relating to the substrate processing apparatus performing communication with the communication device.
摘要翻译：旨在提供一种能够实现基板处理装置的更灵活和更简化的结构的基板处理系统和组管理系统。根据本发明的基板处理系统具有多个用于处理基板的基板处理装置和连接到基板处理装置的组管理系统，组管理系统包括用于存储结构信息的结构信息存储装置（结构管理装置），用于基于存储在结构信息存储装置中的结构信息与多个基板处理装置中的至少一个通信的多个通信装置（连接管理装置），以及连接到结构信息存储装置中的装置信息存储装置（数据管理装置）基于存储在结构信息存储装置中的结构信息，存储与通信装置进行通信的基板处理装置有关的信息。

2. 发明授权

US09142436B2 Statistical analysis method and substrate process system 有权
标题翻译：统计分析方法和底物处理系统
公开(公告)号：US09142436B2
公开(公告)日：2015-09-22
申请号：US13175132
申请日：2011-07-01
申请人： Kazuhide Asai
发明人： Kazuhide Asai
IPC分类号： H01L21/67 , H01L21/677
CPC分类号： H01L21/67276 , H01L21/67775
摘要： A data analyzing method includes receiving monitor data from the substrate processing apparatus; producing representative value data based on the monitor data; associating apparatus condition information indicating a condition of the substrate processing apparatus at the time of production of the monitor data, with the representative value data; storing the representative value data and the apparatus condition information associated with the representative value data and in a database; retrieving the representative value data and the apparatus condition information associated with the representative value data from the database; comparing an exclusion parameter with the retrieved apparatus condition information, the exclusion parameter including information indicating whether the retrieved representative value data should be included in analysis processing targets; and determining whether the retrieved representative value data should be included in the analysis processing targets, based on the comparison result.
摘要翻译：数据分析方法包括从所述基板处理装置接收监视数据; 基于监视数据生成代表值数据; 将表示生产监视数据时的基板处理装置的状态的装置条件信息与代表值数据相关联; 存储与代表值数据相关联的代表值数据和装置条件信息，并存储在数据库中; 从数据库中检索与代表值数据相关联的代表值数据和装置条件信息; 将排除参数与检索到的装置条件信息进行比较，排除参数包括指示检索到的代表值数据是否应包括在分析处理目标中的信息; 以及基于所述比较结果来确定所检索的代表值数据是否应被包括在所述分析处理目标中。

3. 发明申请

US20120065763A1 SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND DISPLAY METHOD OF SUBSTRATE PROCESSING APPARATUS 有权
标题翻译：基板加工系统，基板加工装置及基板加工装置的显示方法
公开(公告)号：US20120065763A1
公开(公告)日：2012-03-15
申请号：US13211105
申请日：2011-08-16
申请人： Kazuhide ASAI
发明人： Kazuhide ASAI
IPC分类号： G06F19/00
CPC分类号： G05B23/0221
摘要： Provided are a substrate processing apparatus, a display method thereof, and a substrate processing system capable of detecting any change in the condition of each component of a substrate processing apparatus. In the substrate processing system including the substrate processing apparatus for processing a substrate and a group management apparatus connected thereto, the substrate processing apparatus is configured to acquire monitor data representing at least the condition of each component of the substrate processing apparatus, aggregate a plurality of the monitor data to generate package data including at least one of a maximum value, an average value, and a minimum value of the monitor data, and transmit the package data to the group management apparatus. The group management apparatus is configured to receive the package data from the substrate processing apparatus and readably store the same therein.
摘要翻译：提供一种基板处理装置，其显示方法和能够检测基板处理装置的每个部件的状态的任何变化的基板处理系统。在包括用于处理基板的基板处理装置和与其连接的组管理装置的基板处理系统中，基板处理装置被配置为获取至少表示基板处理装置的各个部件的状态的监视数据，所述监视数据生成包含所述监视数据的最大值，平均值和最小值中的至少一个的包数据，并将所述包数据发送到所述群管理装置。组管理装置被配置为从衬底处理装置接收包装数据，并且可读地将其存储在其中。

4. 发明申请

US20110079177A1 SUBSTRATE PROCESSING SYSTEM, GROUP MANAGING APPARATUS, AND METHOD OF ANALYZING ABNORMAL STATE 有权
标题翻译：基板处理系统，组管理装置和分析异常状态的方法
公开(公告)号：US20110079177A1
公开(公告)日：2011-04-07
申请号：US12884568
申请日：2010-09-17
申请人： Kazuhide ASAI , Hiroyuki IWAKURA , Kazuyoshi YAMAMOTO
发明人： Kazuhide ASAI , Hiroyuki IWAKURA , Kazuyoshi YAMAMOTO
IPC分类号： B05C11/00 , G01N37/00 , G06F19/00
CPC分类号： G05B23/0278 , G05B2219/31337
摘要： A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, and a group managing apparatus connected to the substrate processing apparatus. The group managing apparatus comprises an analysis support unit. The analysis support unit is configured to extract check item information relating to both abnormal state information for identifying an abnormal state occurring when the recipe is executed and apparatus type information for identifying the type of the substrate processing apparatus at which the abnormal state occurs, and to prepare a check item table comprising the extracted check item information.
摘要翻译：维护工程师可以以较少的难度快速正确地分析异常状态，而不依赖于他/她的技能。基板处理系统包括：基板处理装置，被配置为根据限定处理顺序和处理条件的配方进行操作，以及连接到基板处理装置的组管理装置。组管理装置包括分析支持单元。分析支持单元被配置为提取与用于识别执行食谱时发生的异常状态的异常状态信息有关的检查项信息，以及用于识别发生异常状态的基板处理装置的类型的装置类型信息，准备包括提取的检查项目信息的检查项目表。

5. 发明授权

US08639367B2 Substrate processing system 有权
标题翻译：基板加工系统
公开(公告)号：US08639367B2
公开(公告)日：2014-01-28
申请号：US12873413
申请日：2010-09-01
申请人： Kazuhide Asai
发明人： Kazuhide Asai
IPC分类号： G05B13/02 , G05B15/00 , G05B23/02 , G06F11/30 , G06F19/00 , G08B21/00 , G08B23/00
CPC分类号： G05B19/41875 , G05B2219/32191 , G05B2219/45031 , Y02P90/20 , Y02P90/22
摘要： Provided is a substrate processing system, which comprises a plurality of substrate processing apparatuses configured to process a substrate; and a group management apparatus configured to connect and manage the plurality of substrate processing apparatuses, wherein the group management apparatus includes: a communication part configured to transmit and receive data to and from the plurality of substrate processing apparatuses; a first storage part configured to store the data transmitted through the communication part from the plurality of substrate processing apparatuses; a second storage part configured to store a file prescribing a condition for determining an abnormality of the plurality of substrate processing apparatuses from the data; a display part including a manipulation screen for inputting the condition for determining the abnormality using the data stored in the first storage part or the file stored in the second storage part; a screen control part configured to control the display part to change an abnormality item selection screen displaying a plurality of abnormality items, one of which is to be selected into a registration screen for registering the condition corresponding to one of the plurality of abnormality items selected through the abnormality item selection screen; and a determination part configured to determine the abnormality of the plurality of substrate processing apparatuses by reading from the second storage part and analyzing the data stored in the first storage part based on the condition for determining the abnormality.
摘要翻译：提供了一种基板处理系统，其包括被配置为处理基板的多个基板处理装置; 以及组管理装置，被配置为连接和管理所述多个基板处理装置，其中，所述组管理装置包括：通信部，被配置为向所述多个基板处理装置发送数据和从所述多个基板处理装置接收数据; 第一存储部，被配置为存储来自所述多个基板处理装置的通过所述通信部发送的数据; 第二存储部，被配置为从所述数据存储规定用于确定所述多个基板处理装置的异常的条件的文件; 显示部分，包括使用存储在第一存储部分中的数据或存储在第二存储部分中的文件输入用于确定异常的条件的操作屏幕; 屏幕控制部分，被配置为控制显示部分，以将显示多个异常项目的异常项目选择画面改变为其中一个异常项目，其中一个异常项目被选择为登记画面，用于登记对应于通过异常项目选择画面; 以及确定部件，其被配置为基于从所述第二存储部件读取并基于用于确定所述异常的条件来分析存储在所述第一存储部件中的数据来确定所述多个基板处理设备的异常。

6. 发明授权

US08329479B2 Information managing method, information managing apparatus and substrate processing system 有权
标题翻译：信息管理方法，信息管理装置和基板处理系统
公开(公告)号：US08329479B2
公开(公告)日：2012-12-11
申请号：US12423582
申请日：2009-04-14
申请人： Kazuhide Asai , Hiroyuki Iwakura , Toshiro Koshimaki , Kayoko Yashiki
发明人： Kazuhide Asai , Hiroyuki Iwakura , Toshiro Koshimaki , Kayoko Yashiki
IPC分类号： H01L21/00
CPC分类号： G05B19/4183 , G05B2219/31323 , G05B2219/31455 , G05B2219/45031 , Y02P90/10 , Y02P90/24
摘要： An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated.
摘要翻译：一种用于管理信息的信息管理方法，其基于从基板处理设备发送的包含设备信息或事件信息的电子消息，包括：将包含设备信息的电子消息的发送时间的基板处理设备的设备信息存储在第一装置信息存储单元; 当发送包含事件信息的电子消息时，比较用于累积事件信息的条件和装置信息; 并且当所述条件彼此一致时，与所述事件信息已经被生成的时间相关联地将所述装置信息存储在第二装置信息存储单元中。

7. 发明申请

US20120226475A1 SUBSTRATE PROCESSING SYSTEM, MANAGEMENT APPARATUS, DATA ANALYSIS METHOD 审中-公开
标题翻译：基板处理系统，管理装置，数据分析方法
公开(公告)号：US20120226475A1
公开(公告)日：2012-09-06
申请号：US13402294
申请日：2012-02-22
申请人： Kazuhide Asai
发明人： Kazuhide Asai
IPC分类号： G06F17/18
CPC分类号： G05B19/4184 , G05B2219/45031 , Y02P90/14
摘要： A substrate processing system including a management apparatus, the management apparatus including: a substrate processing apparatus configured to process a substrate; an accumulation unit configured to accumulate measurement data transmitted from the substrate processing apparatus; a storage unit configured to individually store an item of the measurement data regarding an operation state of the substrate processing apparatus, a type of statistics applied to the measurement data, and a condition used for determining the statistics; and an extraction unit configured to extract a combination of data for which the measurement data accumulated in the accumulation unit is determined to be abnormal, with respect to a combination of data including the item of the measurement data, the statistics, and the condition stored in the storage unit.
摘要翻译：一种基板处理系统，包括管理装置，所述管理装置包括：基板处理装置，被配置为处理基板; 累积单元，被配置为累积从所述基板处理装置发送的测量数据; 存储单元，被配置为分别存储关于衬底处理设备的操作状态的测量数据的项目，应用于测量数据的统计类型以及用于确定统计的条件; 以及提取单元，被配置为提取在积累单元中累积的测量数据被确定为异常的数据的组合，相对于包括测量数据的项目，统计信息和存储在其中的条件的数据的组合存储单元。

8. 发明申请

US20120010743A1 STATISTICAL ANALYSIS METHOD AND SUBSTRATE PROCESS SYSTEM 有权
标题翻译：统计分析方法和基板工艺系统
公开(公告)号：US20120010743A1
公开(公告)日：2012-01-12
申请号：US13175132
申请日：2011-07-01
申请人： Kazuhide ASAI
发明人： Kazuhide ASAI
IPC分类号： G06F17/40 , G06F17/30
CPC分类号： H01L21/67276 , H01L21/67775
摘要： A data analyzing method includes receiving monitor data from the substrate processing apparatus; producing representative value data based on the monitor data; associating apparatus condition information indicating a condition of the substrate processing apparatus at the time of production of the monitor data, with the representative value data; storing the representative value data and the apparatus condition information associated with the representative value data and in a database; retrieving the representative value data and the apparatus condition information associated with the representative value data from the database; comparing an exclusion parameter with the retrieved apparatus condition information, the exclusion parameter including information indicating whether the retrieved representative value data should be included in analysis processing targets; and determining whether the retrieved representative value data should be included in the analysis processing targets, based on the comparison result.
摘要翻译：数据分析方法包括从所述基板处理装置接收监视数据; 基于监视数据生成代表值数据; 将表示生产监视数据时的基板处理装置的状态的装置条件信息与代表值数据相关联; 存储与代表值数据相关联的代表值数据和装置条件信息，并存储在数据库中; 从数据库中检索与代表值数据相关联的代表值数据和装置条件信息; 将排除参数与检索到的装置条件信息进行比较，排除参数包括指示检索到的代表值数据是否应包括在分析处理目标中的信息; 以及基于所述比较结果来确定所检索的代表值数据是否应被包括在所述分析处理目标中。

9. 发明授权

US09581996B2 Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process 有权
标题翻译：用于管理在基板制造工艺中测量的异常数据的装置，方法和计算机可读介质
公开(公告)号：US09581996B2
公开(公告)日：2017-02-28
申请号：US13433713
申请日：2012-03-29
申请人： Kazuhide Asai , Hideto Shimizu , Kayoko Yashiki
发明人： Kazuhide Asai , Hideto Shimizu , Kayoko Yashiki
IPC分类号： G05B23/02
CPC分类号： G05B23/0235
摘要： A management device includes a measurement data storage unit configured to store measurement data transmitted from a substrate processing apparatus; a setting unit configured to set an item of the measurement data as a determination target, reference data, and upper and lower limit values with respect to the reference data; a counting unit configured to count the number of times that the value of the measurement data corresponding to the item exceeds the upper and lower limit values; and a determining unit configured to determine that the measurement data as a determination target is abnormal, when the counted number exceeds a predetermined value.
摘要翻译：管理装置包括：测量数据存储单元，被配置为存储从基板处理装置发送的测量数据; 设置单元，被配置为将所述测量数据的项目设置为所述参考数据作为确定目标，参考数据以及上限和下限值; 计数单元，被配置为对与所述项目相对应的测量数据的值超过所述上限值和下限值的次数进行计数; 以及确定单元，被配置为当所计数的数量超过预定值时，确定作为确定目标的测量数据异常。

10. 发明授权

US08538571B2 Substrate processing system, group managing apparatus, and method of analyzing abnormal state 有权
标题翻译：基板处理系统，组管理装置和异常状态分析方法
公开(公告)号：US08538571B2
公开(公告)日：2013-09-17
申请号：US12884568
申请日：2010-09-17
申请人： Kazuhide Asai , Hiroyuki Iwakura , Kazuyoshi Yamamoto
发明人： Kazuhide Asai , Hiroyuki Iwakura , Kazuyoshi Yamamoto
IPC分类号： G06F19/00
CPC分类号： G05B23/0278 , G05B2219/31337
摘要： A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, and a group managing apparatus connected to the substrate processing apparatus. The group managing apparatus comprises an analysis support unit. The analysis support unit is configured to extract check item information relating to both abnormal state information for indentifying an abnormal state occurring when the recipe is executed and apparatus type information for identifying the type of the substrate processing apparatus at which the abnormal state occurs, and to prepare a check item table comprising the extracted check item information.
摘要翻译：维护工程师可以以较少的难度快速正确地分析异常状态，而不依赖于他/她的技能。基板处理系统包括：基板处理装置，被配置为根据限定处理顺序和处理条件的配方进行操作，以及连接到基板处理装置的组管理装置。组管理装置包括分析支持单元。分析支持单元被配置为提取与用于识别执行食谱时发生的异常状态的异常状态信息有关的检查项目信息，以及用于识别发生异常状态的基板处理装置的类型的装置类型信息，并且准备包括提取的检查项目信息的检查项目表。

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