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    • 1. 发明申请
    • SEMICONDUCTOR DEVICE
    • 半导体器件
    • US20130075815A1
    • 2013-03-28
    • US13424150
    • 2012-03-19
    • Kazuaki YAMAURA
    • Kazuaki YAMAURA
    • H01L29/78
    • H01L29/7825H01L21/823418H01L27/088H01L29/0653H01L29/0878H01L29/42368
    • According to one embodiment, a semiconductor device includes a semiconductor substrate and a first semiconductor element provided on the semiconductor substrate. The first semiconductor element includes: a first semiconductor; a second semiconductor layer; a third semiconductor layer; a first insulating layer; a first base region; a first source region; a first gate electrode; a first drift layer; a first drain region; a first source; and a first drain electrode. A concentration of an impurity element of the first conductivity type included in the first drift layer is lower than a concentration of an impurity element of the first conductivity type included in the first semiconductor layer. The concentration of the impurity element of the first conductivity type included in the first drift layer is higher than a concentration of an impurity element of the first conductivity type included in the second semiconductor layer.
    • 根据一个实施例,半导体器件包括半导体衬底和设置在半导体衬底上的第一半导体元件。 第一半导体元件包括:第一半导体; 第二半导体层; 第三半导体层; 第一绝缘层; 第一基区; 第一源区; 第一栅电极; 第一漂移层; 第一漏区; 第一来源 和第一漏电极。 包含在第一漂移层中的第一导电类型的杂质元素的浓度低于包含在第一半导体层中的第一导电类型的杂质元素的浓度。 包括在第一漂移层中的第一导电类型的杂质元素的浓度高于包括在第二半导体层中的第一导电类型的杂质元素的浓度。
    • 3. 发明授权
    • Semiconductor device with zener diode and method for manufacturing same
    • 具有齐纳二极管的半导体器件及其制造方法
    • US08637952B2
    • 2014-01-28
    • US13045504
    • 2011-03-10
    • Kazuaki Yamaura
    • Kazuaki Yamaura
    • H01L29/66
    • H01L29/866H01L29/66106
    • According to one embodiment, a semiconductor device includes a semiconductor substrate, a first conductivity type region, a device isolation insulating film, a second conductivity type region, and a low concentration region. The first conductivity type region is formed in part of the semiconductor substrate. The device isolation insulating film is formed in an upper surface of the semiconductor substrate and includes an opening formed in part of an immediately overlying region of the first conductivity type region. The second conductivity type region is formed in the opening and is in contact with the first conductivity type region. The low concentration region is formed along a side surface of the opening, has second conductivity type, has an effective impurity concentration lower than an effective impurity concentration of the second conductivity type region, and separates an interface of the first conductivity type region and the second conductivity type region from the device isolation insulating film.
    • 根据一个实施例,半导体器件包括半导体衬底,第一导电类型区域,器件隔离绝缘膜,第二导电类型区域和低浓度区域。 第一导电类型区域形成在半导体衬底的一部分中。 器件隔离绝缘膜形成在半导体衬底的上表面中,并且包括形成在第一导电类型区域的紧邻区域的一部分中的开口。 第二导电类型区域形成在开口中并且与第一导电类型区域接触。 所述低浓度区域沿着所述开口的侧面形成,具有第二导电型,具有比所述第二导电类型区域的有效杂质浓度低的有效杂质浓度,并且分离所述第一导电类型区域和所述第二导电类型区域的界面 导电类型区域从器件隔离绝缘膜。
    • 4. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08502306B2
    • 2013-08-06
    • US13424150
    • 2012-03-19
    • Kazuaki Yamaura
    • Kazuaki Yamaura
    • H01L29/76H01L31/113
    • H01L29/7825H01L21/823418H01L27/088H01L29/0653H01L29/0878H01L29/42368
    • According to one embodiment, a semiconductor device includes a semiconductor substrate and a first semiconductor element provided on the semiconductor substrate. The first semiconductor element includes: a first semiconductor; a second semiconductor layer; a third semiconductor layer; a first insulating layer; a first base region; a first source region; a first gate electrode; a first drift layer; a first drain region; a first source; and a first drain electrode. A concentration of an impurity element of the first conductivity type included in the first drift layer is lower than a concentration of an impurity element of the first conductivity type included in the first semiconductor layer. The concentration of the impurity element of the first conductivity type included in the first drift layer is higher than a concentration of an impurity element of the first conductivity type included in the second semiconductor layer.
    • 根据一个实施例,半导体器件包括半导体衬底和设置在半导体衬底上的第一半导体元件。 第一半导体元件包括:第一半导体; 第二半导体层; 第三半导体层; 第一绝缘层; 第一基区; 第一源区; 第一栅电极; 第一漂移层; 第一漏区; 第一来源 和第一漏电极。 包含在第一漂移层中的第一导电类型的杂质元素的浓度低于包含在第一半导体层中的第一导电类型的杂质元素的浓度。 包括在第一漂移层中的第一导电类型的杂质元素的浓度高于包括在第二半导体层中的第一导电类型的杂质元素的浓度。
    • 6. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
    • 半导体器件及其制造方法
    • US20110266650A1
    • 2011-11-03
    • US13045504
    • 2011-03-10
    • Kazuaki YAMAURA
    • Kazuaki YAMAURA
    • H01L29/06H01L21/328
    • H01L29/866H01L29/66106
    • According to one embodiment, a semiconductor device includes a semiconductor substrate, a first conductivity type region, a device isolation insulating film, a second conductivity type region, and a low concentration region. The first conductivity type region is formed in part of the semiconductor substrate. The device isolation insulating film is formed in an upper surface of the semiconductor substrate and includes an opening formed in part of an immediately overlying region of the first conductivity type region. The second conductivity type region is formed in the opening and is in contact with the first conductivity type region. The low concentration region is formed along a side surface of the opening, has second conductivity type, has an effective impurity concentration lower than an effective impurity concentration of the second conductivity type region, and separates an interface of the first conductivity type region and the second conductivity type region from the device isolation insulating film.
    • 根据一个实施例,半导体器件包括半导体衬底,第一导电类型区域,器件隔离绝缘膜,第二导电类型区域和低浓度区域。 第一导电类型区域形成在半导体衬底的一部分中。 器件隔离绝缘膜形成在半导体衬底的上表面中,并且包括形成在第一导电类型区域的紧邻区域的一部分中的开口。 第二导电类型区域形成在开口中并且与第一导电类型区域接触。 所述低浓度区域沿着所述开口的侧面形成,具有第二导电型,具有比所述第二导电类型区域的有效杂质浓度低的有效杂质浓度,并且分离所述第一导电类型区域和所述第二导电类型区域的界面 导电类型区域从器件隔离绝缘膜。