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1. 发明申请

WO2012165793A3 FUEL SUPPLY UNIT FOR A THIN FILM DEPOSITION APPARATUS 审中-公开
标题翻译：用于薄膜沉积装置的燃料供应单元
公开(公告)号：WO2012165793A3
公开(公告)日：2013-02-07
申请号：PCT/KR2012004026
申请日：2012-05-22
申请人： SNU PRECISION CO LTD , KONG DOO WON , PARK SANG HYUN , KWON JIN HWAN , CHA JEA JUNG , PARK BYOUNG MIN , LEE YOUNG KUK
发明人： KONG DOO WON , PARK SANG HYUN , KWON JIN HWAN , CHA JEA JUNG , PARK BYOUNG MIN , LEE YOUNG KUK
IPC分类号： C23C14/24 , C23C14/56
CPC分类号： C23C16/455 , C23C14/246 , C23C14/56
摘要： The present invention relates to a fuel supply unit for a thin film deposition apparatus. The fuel supply unit for a thin film deposition apparatus which supplies an evaporated material into an injector disposed within a chamber of the thin film deposition apparatus to inject the evaporated material according to the present invention includes: a container body having a storage space in which the evaporated material is stored, the container body having a discharge hole defined in one side thereof and being connected to the injector through a connection line; a piston body inserted to be movable in a straight linear direction into the storage space of the container body; at least two seat members that each include a seat part on an outer surface thereof and are disposed on an outer surface of the piston body; a transfer member including at least two contact rings respectively assembled with the seat parts of the seat members and closely attached to an inner surface of the storage space of the container body; and a pressing member applying a pressing force to the transfer member so that the transfer member is moved toward an outlet of the container body.
摘要翻译：本发明涉及一种用于薄膜沉积设备的燃料供应单元。本发明的薄膜蒸镀装置的燃料供给装置，其向蒸发材料供给设置在该薄膜沉积装置的室内的喷射器的喷射蒸镀材料的喷射装置，其特征在于，包括：容纳体，储存蒸发的物质，容器主体具有限定在其一侧的排放孔，并且通过连接线连接到喷射器; 活塞体，其插入以能够沿直线方向移动到所述容器主体的收纳空间; 至少两个座椅构件，每个座椅构件在其外表面上包括座椅部件，并且设置在所述活塞体的外表面上; 传送构件，其包括分别与所述座椅构件的所述座椅部件组装并且紧密地附接到所述容器主体的所述存储空间的内表面的至少两个接触环; 以及向所述转印构件施加按压力的按压构件，使得所述转印构件朝向所述容器主体的出口移动。

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