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1. 发明申请

WO2008144664A1 COMPACT SUBSTRATE TRANSPORT SYSTEM WITH FAST SWAP ROBOT 审中-公开
标题翻译：紧凑的基板运输系统与快速交流机器人
公开(公告)号：WO2008144664A1
公开(公告)日：2008-11-27
申请号：PCT/US2008/064144
申请日：2008-05-19
申请人： BROOKS AUTOMATION, INC. , HOFMEISTER, Christopher , KRUPYSHEV, Alexander, G. , GILCHRIST, Ulysses
发明人： HOFMEISTER, Christopher , KRUPYSHEV, Alexander, G. , GILCHRIST, Ulysses
IPC分类号： H01L21/67 , H01L21/68
CPC分类号： H01L21/677 , H01L21/6719 , H01L21/67201 , H01L21/67742 , H01L21/67766 , H01L21/67775
摘要： A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber capable of holding an isolated atmosphere therein configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber having a drive section fixed to the transfer chamber and having a SCARA arm configured to support at least one substrate, the SCARA arm being configured to transport the at least one substrate between the at least one substrate container and the processing chamber with but one touch of the at least one substrate, wherein the SCARA arm comprises a first arm link, a second arm link, and at least one end effector serially pivotally coupled to each other, where the first and second arm links have unequal lengths.
摘要翻译：一种基板处理系统，包括负载端口模块，该负载端口模块被配置为保持用于存储和传送基板的至少一个基板容器，基板处理室，能够保持隔离气体的可隔离转移室，配置成将基板处理室和负载端口模块和至少部分地安装在所述传送室内的衬底传送器，其具有固定到所述传送室的驱动部分并且具有被配置为支撑至少一个衬底的SCARA臂，所述SCARA臂被配置为将所述至少一个衬底至少一个衬底容器和所述处理室，所述处理室具有所述至少一个衬底的一个触点，其中所述SCARA臂包括第一臂连杆，第二臂连杆以及至少一个端部执行器，所述至少一个末端执行器彼此顺序地联接，其中第一和第二臂连杆具有不相等的长度。

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