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1. 发明申请

WO2005064701A8 ELECTRONIC DEVICE 审中-公开
标题翻译：电子设备
公开(公告)号：WO2005064701A8
公开(公告)日：2006-10-26
申请号：PCT/IB2004052868
申请日：2004-12-20
申请人： KONINKL PHILIPS ELECTRONICS NV , PHILIPS INTELLECTUAL PROPERTY , KLEE MAREIKE K , RIJKS THEODOOR G S M , LOK PIETER , MAUCZOK RUEDIGER G
发明人： KLEE MAREIKE K , RIJKS THEODOOR G S M , LOK PIETER , MAUCZOK RUEDIGER G
IPC分类号： H01G5/16 , H01H1/00 , H01H57/00 , H01L41/09
CPC分类号： H01G5/18 , H01G5/40 , H01H1/0036 , H01H57/00 , H01H2057/006 , H01L41/094
摘要： The microelectromechanical system (MEMS) element (101) comprises a first electrode (31) that is present on a surface of a substrate (30) and a movable element (40), which overlies at least partially the first electrode (31) and comprises a piezoelectric actuator, which movable element (40) is movable towards and from the substrate (30) by application of an actuation voltage between a first and a second position, in which the first position is separated from the substrate (30) by a gap. The piezoelectric actuator comprises a piezoelectric layer (25) which opposite surfaces is provided with a second and a third electrode (21,22) respectively, said second electrode (21) facing the substrate (30) and said third electrode (22) forming an input electrode of the MEMS element (101), so that a current path through the MEMS element (101) comprises the piezoelectric layer . The microelectromechanical system (MEMS) element (101) comprises a first electrode (31) that is present on a surface of a substrate (30) and a movable element (40). This overlies at least partially the first electrode (31) and comprises a piezoelectric actuator, which movable element (40) is movable towards and from the substrate (30) by application of an actuation volatge between a first and a second poistion, in which first position it is separated from the substrate (30) by a gap. Herein the piezoelectric actuator comprises a piezoelectric layer (25) that is on opposite surfaces provided with a second and a third electrode (21,22) respectively, said second electrode (21) facing the substrate (30) and said third electrode (22) forming an input electrode of the MEMS element (101), so that a current path between through the MEMS element (101), comprises the piezoelectric layer (25) and the tunable gap.
摘要翻译：微机电系统（MEMS）元件（101）包括存在于基板（30）的表面上的第一电极（31）和至少部分地覆盖第一电极（31）的可移动元件（40），并且包括压电致动器，其中所述可移动元件（40）可以通过施加第一和第二位置之间的致动电压而朝向和离开所述基板（30）移动，其中所述第一位置与所述基板（30）分隔开间隙。压电致动器包括压电层（25），相对表面分别设置有第二和第三电极（21,22），所述第二电极（21）面向衬底（30）和所述第三电极（22）形成 MEMS元件（101）的输入电极，使得穿过MEMS元件（101）的电流路径包括压电层。微机电系统（MEMS）元件（101）包括存在于基板（30）的表面上的第一电极（31）和可移动元件（40）。至少部分地覆盖第一电极（31）并且包括压电致动器，该可移动元件（40）可以通过在第一和第二部分之间施加致动波动而朝向和离开基板（30）移动，其中第一位置通过间隙与基板（30）分离。这里，压电致动器包括分别在设置有第二和第三电极（21,22）的相对表面上的压电层（25），所述第二电极（21）面向衬底（30）和所述第三电极（22）形成MEMS元件（101）的输入电极，使得穿过MEMS元件（101）之间的电流通路包括压电层（25）和可调节间隙。

2. 发明申请

WO2004040034A2 METHOD OF PREPARING A SOLUTION AND APPLICATION OF THIS SOLUTION TO PREPARE FUNCTIONAL OXIDE LAYERS 审中-公开
标题翻译：制备溶液的方法和本方法应用于制备功能氧化物层
公开(公告)号：WO2004040034A2
公开(公告)日：2004-05-13
申请号：PCT/IB2003/004434
申请日：2003-10-06
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH , KEUR, Wilhelmus, C. , VAN HAL, Henricus, A., M. , BEELEN, Danielle , KLEE, Mareike, K. , MEYER, Joerg , BRAND, Hans-Wolfgang , HUISKAMP, Gerrit, J., W.
发明人： KEUR, Wilhelmus, C. , VAN HAL, Henricus, A., M. , BEELEN, Danielle , KLEE, Mareike, K. , MEYER, Joerg , BRAND, Hans-Wolfgang , HUISKAMP, Gerrit, J., W.
IPC分类号： C23C18/12
CPC分类号： C04B35/491 , C04B35/493 , C04B35/6264 , C04B2235/3206 , C04B2235/3224 , C04B2235/3227 , C04B2235/3232 , C04B2235/3244 , C04B2235/3251 , C04B2235/3272 , C04B2235/3296 , C04B2235/44 , C04B2235/441 , C04B2235/449 , C23C18/1216 , H01G4/1245 , H01L21/31691
摘要： In the method of preparation of the Pb-Zr-Ti-containing solutions the lead is added to the Zr- and Ti-containing solution in powdery form. This has the advantage that it takes less time, and that nevertheless a stable solution is obtained. Preferably use is made of Zr- and Ti-butoxides and of lead acetate tri-hydrate. A very suitable solvent is 1-methoxy-2-propanol. The solution can be used for the manufacture of layers on a substrate with a high dielectric constant.
摘要翻译：在制备含Pb-Zr-Ti的溶液的方法中，将铅以粉末形式加入到含Zr和Ti的溶液中。这具有花费更少时间的优点，然而获得了稳定的解决方案。优选使用Zr-和Ti-丁醇盐和三水合醋酸铅。非常合适的溶剂是1-甲氧基-2-丙醇。该溶液可用于在具有高介电常数的基底上制造层。

3. 发明申请

WO2005064701A2 ELECTRONIC DEVICE 审中-公开
标题翻译：电子设备
公开(公告)号：WO2005064701A2
公开(公告)日：2005-07-14
申请号：PCT/IB2004052868
申请日：2004-12-20
申请人： KONINKL PHILIPS ELECTRONICS NV , PHILIPS INTELLECTUAL PROPERTY , KLEE MAREIKE K , RIJKS THEODOOR G S M , LOK PIETER , MAUCZOK RUEDIGER G
发明人： KLEE MAREIKE K , RIJKS THEODOOR G S M , LOK PIETER , MAUCZOK RUEDIGER G
IPC分类号： H01G5/16 , H01H1/00 , H01H57/00 , H01L41/09
CPC分类号： H01G5/18 , H01G5/40 , H01H1/0036 , H01H57/00 , H01H2057/006 , H01L41/094
摘要： The microelectromechanical system (MEMS) element (101) comprises a first electrode (310 that is present on a surface of a substrate (30) and a movable element (40). This overlies at least partially the first electrode (31) and comprises a piezoelectric actuator, which movable element (40) is movable towards and from the substrate (30) by application of an actuation voltage between a first and a second position, in which first position it is separated from the substrate (30) by a gap. Herein the piezoelectric actuator comprises a piezoelectric layer (25) that is on opposite surfaces provided with a second and a third electrode (21,22) respectively, said second electrode (21) facing the substrate (30) and said third electrode (22) forming an input electrode of the MEMS element (101), so that a current path between through the MEMS element (101) comprises the piezoelectric layer (25) and the tunable gap.
摘要翻译：微机电系统（MEMS）元件（101）包括第一电极（310），其存在于基板（30）和可移动元件（40）的表面上，其至少部分地覆盖第一电极（31），并且包括压电致动器，其中可移动元件（40）可以通过施加第一和第二位置之间的致动电压而朝向和离开基板（30）移动，其中第一位置通过间隙与基板（30）分离。这里，压电致动器包括分别在设置有第二和第三电极（21,22）的相对表面上的压电层（25），所述第二电极（21）面向衬底（30）和所述第三电极（22）形成MEMS元件（101）的输入电极，使得穿过MEMS元件（101）之间的电流路径包括压电层（25）和可调节间隙。

4. 发明申请

WO2004040034A3 METHOD OF PREPARING A SOLUTION AND APPLICATION OF THIS SOLUTION TO PREPARE FUNCTIONAL OXIDE LAYERS 审中-公开
标题翻译：制备溶液的方法和该溶液在制备功能氧化物层中的应用
公开(公告)号：WO2004040034A3
公开(公告)日：2004-11-04
申请号：PCT/IB0304434
申请日：2003-10-06
申请人： KONINKL PHILIPS ELECTRONICS NV , PHILIPS INTELLECTUAL PROPERTY , KEUR WILHELMUS C , VAN HAL HENRICUS A M , BEELEN DANIELLE , KLEE MAREIKE K , MEYER JOERG , BRAND HANS-WOLFGANG , HUISKAMP GERRIT J W
发明人： KEUR WILHELMUS C , VAN HAL HENRICUS A M , BEELEN DANIELLE , KLEE MAREIKE K , MEYER JOERG , BRAND HANS-WOLFGANG , HUISKAMP GERRIT J W
IPC分类号： C04B35/491 , C23C18/12 , H01G4/12 , H01L21/314 , H01L21/316
CPC分类号： C04B35/491 , C04B35/493 , C04B35/6264 , C04B2235/3206 , C04B2235/3224 , C04B2235/3227 , C04B2235/3232 , C04B2235/3244 , C04B2235/3251 , C04B2235/3272 , C04B2235/3296 , C04B2235/44 , C04B2235/441 , C04B2235/449 , C23C18/1216 , H01G4/1245 , H01L21/31691
摘要： In the method of preparation of the Pb-Zr-Ti-containing solutions the lead is added to the Zr- and Ti-containing solution in powdery form. This has the advantage that it takes less time, and that nevertheless a stable solution is obtained. Preferably use is made of Zr- and Ti-butoxides and of lead acetate tri-hydrate. A very suitable solvent is 1-methoxy-2-propanol. The solution can be used for the manufacture of layers on a substrate with a high dielectric constant.
摘要翻译：在制备含Pb-Zr-Ti溶液的方法中，铅以粉末形式加入到含Zr和Ti的溶液中。这具有花费更少时间的优点，并且获得稳定的解决方案。优选使用Zr-和Ti-丁醇盐以及乙酸铅三水合物。非常合适的溶剂是1-甲氧基-2-丙醇。该解决方案可以用于在具有高介电常数的衬底上制造层。

5. 发明申请

WO2003017481A1 FILTERANORDNUNG MIT VOLUMENWELLEN-RESONATOR 审中-公开
标题翻译：具有体积表面波谐振器的过滤器装置
公开(公告)号：WO2003017481A1
公开(公告)日：2003-02-27
申请号：PCT/IB2002/003291
申请日：2002-08-05
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , PHILIPS CORPORATE INTELLECTUAL PROPERTY GMBH , LOEBL, Hans, P. , KLEE, Mareike, K. , MILSOM, Robert, F. , METZMACHER, Christof , BRAND, Wolfgang
发明人： LOEBL, Hans, P. , KLEE, Mareike, K. , MILSOM, Robert, F. , METZMACHER, Christof , BRAND, Wolfgang
IPC分类号： H03H9/17
CPC分类号： H03H9/589 , H03H9/581
摘要： Die Erfindung betrifft eine Filteranordnung ausgestattet mit wenigstens einem Volumenwellen-Resonator, welcher eine Resonatoreinheit und ein Reflexionselement enthält. Die Resonatoreinheit umfasst eine erste (3) und eine zweite Elektrode (5) sowie zwischen der ersten (3) und zweiten (5) Elektrode eine texturierte piezoelektrische Schicht (4).
摘要翻译：本发明涉及一种配备有至少一个体声波谐振器，其包括谐振器单元和一个反射元件的过滤器布置。谐振器单元包括第一（3）和第二电极（5）和所述第一（3）和第二（5）的电极之间，一个织构性压电层（4）。

6. 发明申请

WO2003017480A1 FILTERANORDNUNG MIT VOLUMENWELLEN-RESONATOR 审中-公开
标题翻译：具有体积表面波谐振器的过滤器装置
公开(公告)号：WO2003017480A1
公开(公告)日：2003-02-27
申请号：PCT/IB2002/003263
申请日：2002-08-02
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , PHILIPS CORPORATE INTELLECTUAL PROPERTY GMBH , LOEBL, Hans, P. , KLEE, Mareike, K. , MILSOM, Robert, F. , METZMACHER, Christof , BRAND, Wolfgang
发明人： LOEBL, Hans, P. , KLEE, Mareike, K. , MILSOM, Robert, F. , METZMACHER, Christof , BRAND, Wolfgang
IPC分类号： H03H9/17
CPC分类号： H03H9/589 , H03H9/581
摘要： Die Erfindung betrifft Filteranordnung ausgestattet mit wenigstens einem Volumenwellen-Resonator, welcher eine Resonatoreinheit und ein Reflexionselement (2) aus mehreren Schichten (6, 7, 8) enthält. Die Schichten (6, 7, 8) enthalten jeweils eine Mischung aus wenigstens zwei verschiedenen Materialien. Innerhalb jeder Schicht (6, 7, 8) variiert die Zusammensetzung der Mischung relativ zur Schichtdicke kontinuierlich und periodisch.
摘要翻译：本发明涉及一种过滤器装置配备有至少一个体声波谐振器，其包括谐振器单元和一个反射元件（2）由若干层组成（6，7，8）。所述层（6,7，8）各自含有至少两种不同的材料的混合物。内改变相对于层厚度连续和周期性地将混合物的组合物的每一层（6，7，8）。

7. 发明申请

WO2005064701A3 ELECTRONIC DEVICE 审中-公开
公开(公告)号：WO2005064701A3
公开(公告)日：2005-07-14
申请号：PCT/IB2004/052868
申请日：2004-12-20
申请人： KONINKLIJKE PHILIPS ELECTRONICS N.V. , PHILIPS INTELLECTUAL PROPERTY & STANDARDS GMBH , KLEE, Mareike, K. , RIJKS, Theodoor, G., S., M. , LOK, Pieter , MAUCZOK, Ruediger, G.
发明人： KLEE, Mareike, K. , RIJKS, Theodoor, G., S., M. , LOK, Pieter , MAUCZOK, Ruediger, G.
IPC分类号： H01G5/16 , H01H1/00 , H01H57/00 , H01L41/09
摘要： The microelectromechanical system (MEMS) element (101) comprises a first electrode (31) that is present on a surface of a substrate (30) and a movable element (40), which overlies at least partially the first electrode (31) and comprises a piezoelectric actuator, which movable element (40) is movable towards and from the substrate (30) by application of an actuation voltage between a first and a second position, in which the first position is separated from the substrate (30) by a gap. The piezoelectric actuator comprises a piezoelectric layer (25) which opposite surfaces is provided with a second and a third electrode (21,22) respectively, said second electrode (21) facing the substrate (30) and said third electrode (22) forming an input electrode of the MEMS element (101), so that a current path through the MEMS element (101) comprises the piezoelectric layer . The microelectromechanical system (MEMS) element (101) comprises a first electrode (31) that is present on a surface of a substrate (30) and a movable element (40). This overlies at least partially the first electrode (31) and comprises a piezoelectric actuator, which movable element (40) is movable towards and from the substrate (30) by application of an actuation volatge between a first and a second poistion, in which first position it is separated from the substrate (30) by a gap. Herein the piezoelectric actuator comprises a piezoelectric layer (25) that is on opposite surfaces provided with a second and a third electrode (21,22) respectively, said second electrode (21) facing the substrate (30) and said third electrode (22) forming an input electrode of the MEMS element (101), so that a current path between through the MEMS element (101), comprises the piezoelectric layer (25) and the tunable gap.

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