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    • 10. 发明申请
    • DEPOSITION APPARATUS HAVING LIGHT IRRADIATION PORTION FOR REMOVING FOREIGN SUBSTANCE
    • 具有用于去除异物的光照部分的沉积装置
    • WO2012124928A2
    • 2012-09-20
    • PCT/KR2012001686
    • 2012-03-08
    • SNU PRECISION CO LTDKIM TAE HWANRYU WOON SEONNAMGOONG SUNG TAE
    • KIM TAE HWANRYU WOON SEONNAMGOONG SUNG TAE
    • C23C14/24C23C14/02
    • C23C16/45578C23C16/46
    • The present invention relates to a deposition apparatus having a light irradiation portion for removing foreign substances, the deposition apparatus having the light irradiation portion for removing foreign substances of the present invention comprising: a chamber portion for accommodating a substrate therein so that a source is deposited on the substrate; the light irradiation portion for irradiating ultraviolet light toward the substrate; a window, which is made from a light transmitting material and arranged between the light irradiation portion and the substrate, for transmitting the ultraviolet light that is generated from the light irradiation portion into the chamber portion; and a light transmitting portion, which is inside the chamber portion and comprises a heating member, for eliminating foreign substances that inhibit the transmission of the ultraviolet light through the window, by means of generating heat.
    • 本发明涉及一种具有用于去除异物的光照射部分的沉积设备,该沉积设备具有用于去除异物的光照射部分,该沉积设备包括:腔室部分,用于在其中容纳基板,从而沉积源 在衬底上; 向基板照射紫外线的光照射部; 窗口,其由光透射材料制成并布置在光照射部分和基底之间,用于将从光照射部分产生的紫外光透射到腔室部分中; 以及透光部分,其位于所述腔室部分内并且包括加热部件,用于通过产生热量来消除阻碍紫外线透过所述窗口的杂质。