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    • 4. 发明申请
    • LINEAR DEPOSITION SOURCES FOR DEPOSITION PROCESSES
    • 用于沉积过程的线性沉积源
    • WO2008016247A1
    • 2008-02-07
    • PCT/KR2007/003654
    • 2007-07-30
    • SOONCHUNHYANG UNIVERSITY INDUSTRY ACADEMY COOPERATION FOUNDATIONUM, Tai JoonJOO, Young CheolLEE, Sang WookKIM, Kug Weon
    • UM, Tai JoonJOO, Young CheolLEE, Sang WookKIM, Kug Weon
    • C23C14/24
    • C23C14/243
    • Linear deposition sources are disclosed. In one embodiment, the linear deposition source includes a container accommodating evaporation material and a heater configured to generate heat energy such that vaporized material is discharged uniformly onto a substrate on which a deposition layer is formed. The heater is provided on the container, wherein a portion of the heater positioned at a center portion of the container in the longitudinal direction generates more heat energy than the other portion of the heater. The heater includes a coil configured in a sinusoidal pattern, wherein the curvature pitch or height of the portion of the coil positioned at the center portion of the container in the longitudinal direction is set to be different from that of the other portion of the coil. Further, the resistance of the portion of the coil positioned at the center portion of the container in the longitudinal direction may be set to be greater than that of the other portion of the coil.
    • 公开了线性沉积源。 在一个实施例中,线性沉积源包括容纳蒸发材料的容器和被配置为产生热能的加热器,使得气化材料均匀地排出到其上形成有沉积层的基板上。 加热器设置在容器上,其中位于容器的纵向方向中心部分的加热器的一部分产生比加热器的其它部分更多的热能。 加热器包括以正弦图案配置的线圈,其中位于容器的纵向中心部分处的线圈的曲率间距或高度被设定为与线圈的另一部分不同。 此外,位于容器的中心部分的线圈的沿纵向的部分的电阻可以被设定为大于线圈的另一部分的电阻。