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1. 发明申请

WO2010005540A4 CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE 审中-公开
标题翻译：钳式单声道淋浴电极
公开(公告)号：WO2010005540A4
公开(公告)日：2010-06-24
申请号：PCT/US2009003952
申请日：2009-07-06
申请人： LAM RES CORP , PATRICK ROGER , BETTENCOURT GREGORY R , KELLOGG MICHAEL C
发明人： PATRICK ROGER , BETTENCOURT GREGORY R , KELLOGG MICHAEL C
IPC分类号： H05H1/34 , H01L21/3065 , H05H1/38
CPC分类号： H01L21/3065 , C23C16/45565 , C23C16/4557 , H01J37/32091 , H01J37/3244 , H01J37/32458 , H01J37/32532 , H01J37/32541 , H01J37/32568 , H01J37/32605 , Y10S403/12 , Y10S403/13
摘要： An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which is mechanically attached to a backing plate by a series of spaced apart cam locks. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release locking pins extending from the upper face of the electrode.
摘要翻译：用于等离子体反应室的电极组件，用于半导体衬底处理。该组件包括上部喷头电极，其通过一系列间隔开的凸轮锁定机械地附接到背板。保护环围绕背板并且可移动到保护环中的开口与背板中的开口对准的位置，使得凸轮锁可以用工具旋转以释放从电极的上表面延伸的锁定销。

2. 发明申请

WO2012030382A3 SHOWERHEAD ELECTRODE 审中-公开
标题翻译：喷头电极
公开(公告)号：WO2012030382A3
公开(公告)日：2012-08-23
申请号：PCT/US2011001500
申请日：2011-08-25
申请人： LAM RES CORP , DE LA LLERA ANTHONY , MANKIDY PRATIK , KELLOGG MICHAEL C , DHINDSA RAJINDER
发明人： DE LA LLERA ANTHONY , MANKIDY PRATIK , KELLOGG MICHAEL C , DHINDSA RAJINDER
IPC分类号： H01L21/3065 , H01L21/205 , H05H1/46
CPC分类号： H01R13/20
摘要： Abstract A showerhead electrode, a gasket set and an assembly thereof in plasma reaction chamber for etching semiconductor substrates are provided with improved a gas injection hole pattern, positioning accuracy and reduced warping, which leads to enhanced uniformity of plasma processing rate. A method of assembling the inner electrode and gasket set to a supporting member includes simultaneous engagement of cam locks.
摘要翻译：摘要在等离子体反应室中用于蚀刻半导体衬底的喷头电极，衬垫组件及其组件提供了改进的气体喷射孔图案，定位精度和减少的翘曲，这导致等离子体处理速率的均匀性提高。将内部电极和垫圈组装到支撑构件上的方法包括同时接合凸轮锁。

3. 发明申请

WO2010005541A2 CLAMPED SHOWERHEAD ELECTRODE ASSEMBLY 审中-公开
标题翻译：夹式淋浴头电极组件
公开(公告)号：WO2010005541A2
公开(公告)日：2010-01-14
申请号：PCT/US2009/003953
申请日：2009-07-06
申请人： LAM RESEARCH CORPORATION , KADKHODAYAN, Babak , DHINDSA, Rajinder , DE LA LLERA, Anthony , KELLOGG, Michael, C.
发明人： KADKHODAYAN, Babak , DHINDSA, Rajinder , DE LA LLERA, Anthony , KELLOGG, Michael, C.
IPC分类号： H05H1/34 , H05H1/38 , H01L21/3065
CPC分类号： H01J37/32532 , H01J37/32091 , H01J37/3244 , H01J37/32449 , H01J37/32541 , H01J37/32568 , H01J37/32605
摘要： An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which includes an inner electrode mechanically attached to a backing plate by a clamp ring and an outer electrode attached to the backing plate by a series of spaced apart cam locks. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release cam pins extending upward from the upper face of the outer electrode. To compensate for differential thermal expansion, the clamp ring can include expansion joins at spaced locations which allow the clamp ring to absorb thermal stresses.
摘要翻译：用于半导体衬底处理中的等离子体反应室的电极组件。该组件包括上部喷头电极，该上部喷头电极包括通过夹环机械连接到背板的内电极以及通过一系列间隔开的凸轮锁附接到背板的外电极。保护环包围背板并可移动到保护环中的开口与背板中的开口对准的位置，使得凸轮锁可以利用工具旋转以释放从外部的上表面向上延伸的凸轮销电极。为了补偿不同的热膨胀，夹环可以包括在间隔位置处的膨胀连接，这允许夹环吸收热应力。

4. 发明申请

WO2012030382A2 SHOWERHEAD ELECTRODE 审中-公开
标题翻译：淋浴电极
公开(公告)号：WO2012030382A2
公开(公告)日：2012-03-08
申请号：PCT/US2011/001500
申请日：2011-08-25
申请人： LAM RESEARCH CORPORATION , DE LA LLERA, Anthony , MANKIDY, Pratik , KELLOGG, Michael C. , DHINDSA, Rajinder
发明人： DE LA LLERA, Anthony , MANKIDY, Pratik , KELLOGG, Michael C. , DHINDSA, Rajinder
IPC分类号： H01L21/3065 , H01L21/205 , H05H1/46
CPC分类号： H01R13/20
摘要： Abstract A showerhead electrode, a gasket set and an assembly thereof in plasma reaction chamber for etching semiconductor substrates are provided with improved a gas injection hole pattern, positioning accuracy and reduced warping, which leads to enhanced uniformity of plasma processing rate. A method of assembling the inner electrode and gasket set to a supporting member includes simultaneous engagement of cam locks.
摘要翻译：摘要提供了一种用于蚀刻半导体衬底的等离子体反应室中的喷头电极，垫圈组件及其组件，其具有改进的气体注入孔图案，定位精度和减小的翘曲，这导致等离子体处理速率的均匀性提高。将内部电极和垫圈组装在支撑构件上的方法包括凸轮锁的同时接合。

5. 发明申请

WO2010021890A2 EDGE RINGS FOR ELECTROSTATIC CHUCKS 审中-公开
标题翻译： EDGE环静电卡箍
公开(公告)号：WO2010021890A2
公开(公告)日：2010-02-25
申请号：PCT/US2009/053579
申请日：2009-08-12
申请人： LAM RESEARCH CORPORATION , KENWORTHY, Ian, Jared , FONG, Kelly , KELLOGG, Michael, C.
发明人： KENWORTHY, Ian, Jared , FONG, Kelly , KELLOGG, Michael, C.
IPC分类号： H05H1/34 , H01L21/3065 , H01L21/205
CPC分类号： H01L21/6831 , H01L21/68735 , Y10T279/23
摘要： A disclosed device for use with an electrostatic chuck configured to hold a substrate in a plasma environment comprises an edge ring configured to be placed either in contact with portions of only a ceramic top piece, a base plate, or coupled to the base plate through a plurality of pins and pin slots. The edge ring is further configured to be concentric with the ceramic top piece. In one embodiment, the edge ring includes an inner edge having an edge step arranged to provide mechanical coupling between the edge ring and the outer periphery of the ceramic top piece. The edge ring further includes an outer edge and a flat portion located between the inner edge and the outer edge. The flat portion is arranged to be both horizontal when the edge ring is placed around the outer periphery of the ceramic top piece and parallel to the substrate.
摘要翻译：所公开的与静电吸盘一起使用的装置被构造成将衬底保持在等离子体环境中，该装置包括：边缘环，该边缘环被配置成与仅陶瓷顶部件，基板，或通过多个销和销槽联接到基板。边缘环进一步被构造成与陶瓷顶部件同心。在一个实施例中，边缘环包括具有边缘台阶的内边缘，该边缘台阶布置成提供边缘环与陶瓷顶部件的外周边之间的机械耦合。边缘环还包括外边缘和位于内边缘和外边缘之间的平坦部分。当边缘环围绕陶瓷顶部件的外周并平行于衬底放置时，平坦部分布置成水平。

6. 发明申请

WO2010005540A2 CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE 审中-公开
标题翻译：夹层整体式喷头电极
公开(公告)号：WO2010005540A2
公开(公告)日：2010-01-14
申请号：PCT/US2009/003952
申请日：2009-07-06
申请人： LAM RESEARCH CORPORATION , PATRICK, Roger , BETTENCOURT, Gregory, R. , KELLOGG, Michael, C.
发明人： PATRICK, Roger , BETTENCOURT, Gregory, R. , KELLOGG, Michael, C.
IPC分类号： H05H1/34 , H05H1/38 , H01L21/3065
CPC分类号： H01L21/3065 , C23C16/45565 , C23C16/4557 , H01J37/32091 , H01J37/3244 , H01J37/32458 , H01J37/32532 , H01J37/32541 , H01J37/32568 , H01J37/32605 , Y10S403/12 , Y10S403/13
摘要： An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which is mechanically attached to a backing plate by a series of spaced apart cam locks. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release locking pins extending from the upper face of the electrode.
摘要翻译：用于半导体衬底处理中的等离子体反应室的电极组件。该组件包括上部喷头电极，其通过一系列间隔开的凸轮锁机械地附接到背板。护环围绕背板并可移动到护环中的开口与背板中的开口对齐的位置，使得凸轮锁可以利用工具旋转以释放从电极的上表面延伸的锁定销。

7. 发明申请

WO2009114175A3 CAM LOCK ELECTRODE CLAMP 审中-公开
标题翻译： CAM锁电极夹
公开(公告)号：WO2009114175A3
公开(公告)日：2009-12-23
申请号：PCT/US2009001593
申请日：2009-03-13
申请人： LAM RES CORP , KELLOGG MICHAEL C , NORELL ANTHONY J , DE LA LIERA ANTHONY , DHINDSA RAJINDER
发明人： KELLOGG MICHAEL C , NORELL ANTHONY J , DE LA LIERA ANTHONY , DHINDSA RAJINDER
IPC分类号： H01L21/683 , H01L21/3065 , H01L21/687
CPC分类号： H01L21/68728 , H01L21/687 , Y10T403/7005 , Y10T403/7007 , Y10T403/7041
摘要： A cam lock clamp comprises a stud having a substantially cylindrical body with a first end including a head area and a second end arranged to support one or more disc springs concentrically about the stud. A socket is arranged to mechanically couple concentrically around the stud with the head area of the stud being exposed above an uppermost portion of the socket. The socket is configured to be firmly attached to a consumable material. A camshaft has a substantially cylindrical body and is configured to mount within a bore of a backing plate. The camshaft further comprises an eccentric cutout area located in a central portion of the camshaft body. The camshaft is configured to engage and lock the head area of the stud when the consumable material and the backing plate are proximate to one another.
摘要翻译：凸轮锁定夹具包括具有基本上圆柱形主体的螺柱，其具有包括头部区域的第一端和布置成围绕螺柱同心地支撑一个或多个盘簧的第二端。插座布置成以同心的方式围绕螺柱共同连接，螺柱的头部区域暴露在插座的最上部分之上。插座被配置为牢固地连接到消耗材料上。凸轮轴具有基本上圆柱形的主体并被构造成安装在背板的孔内。凸轮轴还包括位于凸轮轴主体的中心部分的偏心切口区域。凸轮轴构造成当消耗材料和背板彼此靠近时接合并锁定螺柱的头部区域。

8. 发明申请

WO2009114175A2 CAM LOCK ELECTRODE CLAMP 审中-公开
标题翻译：凸轮锁电极夹
公开(公告)号：WO2009114175A2
公开(公告)日：2009-09-17
申请号：PCT/US2009/001593
申请日：2009-03-13
申请人： LAM RESEARCH CORPORATION , KELLOGG, Michael, C. , NORELL, Anthony, J. , DE LA LIERA, Anthony , DHINDSA, Rajinder
发明人： KELLOGG, Michael, C. , NORELL, Anthony, J. , DE LA LIERA, Anthony , DHINDSA, Rajinder
IPC分类号： H01L21/683 , H01L21/68 , H01L21/30
CPC分类号： H01L21/68728 , H01L21/687 , Y10T403/7005 , Y10T403/7007 , Y10T403/7041
摘要： A cam lock clamp comprises a stud having a substantially cylindrical body with a first end including a head area and a second end arranged to support one or more disc springs concentrically about the stud. A socket is arranged to mechanically couple concentrically around the stud with the head area of the stud being exposed above an uppermost portion of the socket. The socket is configured to be firmly attached to a consumable material. A camshaft has a substantially cylindrical body and is configured to mount within a bore of a backing plate. The camshaft further comprises an eccentric cutout area located in a central portion of the camshaft body. The camshaft is configured to engage and lock the head area of the stud when the consumable material and the backing plate are proximate to one another.
摘要翻译：凸轮锁紧夹具包括具有大致圆柱形本体的螺柱，该大致圆柱形本体具有包括头部区域的第一端和布置成围绕螺柱同心地支撑一个或多个盘形弹簧的第二端。插座被布置成机械地耦合在螺柱周围，螺柱的头部区域暴露在插座的最上部分上方。插座配置为牢固地连接到消耗材料上。凸轮轴具有大致圆柱形的本体并且构造成安装在背板的孔内。凸轮轴还包括位于凸轮轴本体的中心部分中的偏心切口区域。当消耗材料和背板彼此靠近时，凸轮轴被构造成接合并锁定螺栓的头部区域。

9. 发明申请

WO2010021890A3 EDGE RINGS FOR ELECTROSTATIC CHUCKS 审中-公开
标题翻译：用于静电切割机的边缘环
公开(公告)号：WO2010021890A3
公开(公告)日：2010-05-14
申请号：PCT/US2009053579
申请日：2009-08-12
申请人： LAM RES CORP , KENWORTHY IAN JARED , FONG KELLY , KELLOGG MICHAEL C
发明人： KENWORTHY IAN JARED , FONG KELLY , KELLOGG MICHAEL C
IPC分类号： H05H1/34 , H01L21/205 , H01L21/3065
CPC分类号： H01L21/6831 , H01L21/68735 , Y10T279/23
摘要： A disclosed device for use with an electrostatic chuck configured to hold a substrate in a plasma environment comprises an edge ring configured to be placed either in contact with portions of only a ceramic top piece, a base plate, or coupled to the base plate through a plurality of pins and pin slots. The edge ring is further configured to be concentric with the ceramic top piece. In one embodiment, the edge ring includes an inner edge having an edge step arranged to provide mechanical coupling between the edge ring and the outer periphery of the ceramic top piece. The edge ring further includes an outer edge and a flat portion located between the inner edge and the outer edge. The flat portion is arranged to be both horizontal when the edge ring is placed around the outer periphery of the ceramic top piece and parallel to the substrate.
摘要翻译：用于静电卡盘的公开的装置被配置为将基板保持在等离子体环境中包括边缘环，该边缘环被配置成与陶瓷顶部件，基板的部分接触，或者通过一个多个引脚和引脚插槽。边缘环进一步构造成与陶瓷顶部件同心。在一个实施例中，边缘环包括具有边缘台阶的内边缘，该边缘台阶布置成在边缘环和陶瓷顶部件的外周边之间提供机械联接。边缘环还包括外边缘和位于内边缘和外边缘之间的平坦部分。当边缘环绕陶瓷顶片的外周放置并平行于基底时，平坦部分布置成水平的。

10. 发明申请

WO2010005541A3 CLAMPED SHOWERHEAD ELECTRODE ASSEMBLY 审中-公开
标题翻译：夹紧式淋浴电极组件
公开(公告)号：WO2010005541A3
公开(公告)日：2010-04-22
申请号：PCT/US2009003953
申请日：2009-07-06
申请人： LAM RES CORP , KADKHODAYAN BABAK , DHINDSA RAJINDER , DE LA LLERA ANTHONY , KELLOGG MICHAEL C
发明人： KADKHODAYAN BABAK , DHINDSA RAJINDER , DE LA LLERA ANTHONY , KELLOGG MICHAEL C
IPC分类号： H05H1/34 , H01L21/3065 , H05H1/38
CPC分类号： H01J37/32532 , H01J37/32091 , H01J37/3244 , H01J37/32449 , H01J37/32541 , H01J37/32568 , H01J37/32605
摘要： An electrode assembly for a plasma reaction chamber used in semiconductor substrate processing. The assembly includes an upper showerhead electrode which includes an inner electrode mechanically attached to a backing plate by a clamp ring and an outer electrode attached to the backing plate by a series of spaced apart cam locks. A guard ring surrounds the backing plate and is movable to positions at which openings in the guard ring align with openings in the backing plate so that the cam locks can be rotated with a tool to release cam pins extending upward from the upper face of the outer electrode. To compensate for differential thermal expansion, the clamp ring can include expansion joins at spaced locations which allow the clamp ring to absorb thermal stresses.
摘要翻译：用于等离子体反应室的电极组件，用于半导体衬底处理。组件包括上喷头电极，其包括通过夹紧环机械连接到背板的内电极和通过一系列间隔开的凸轮锁附接到背板的外电极。防护环围绕背板并且可移动到保护环中的开口与背板中的开口对准的位置，使得凸轮锁可以用工具旋转以释放从外部的上表面向上延伸的凸轮销电极。为了补偿差分热膨胀，夹紧环可以包括在间隔位置处的膨胀接合，这允许夹紧环吸收热应力。

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