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1. 发明申请

WO2018118219A1 CORNER COUPLING RESONATOR ARRAY 审中-公开
公开(公告)号：WO2018118219A1
公开(公告)日：2018-06-28
申请号：PCT/US2017/058769
申请日：2017-10-27
申请人： MURATA MANUFACTURING CO., LTD. , KAAJAKARI, Ville
发明人： KAAJAKARI, Ville
IPC分类号： H03H9/00 , H03H9/02 , H03H9/17 , H03H9/50
CPC分类号： H03H9/02433 , H03H9/205 , H03H9/505 , H03H2009/02496 , H03H2009/155 , H03H2009/2442
摘要： A MEMS resonator array is provided with improved electrical characteristics and reduced motional impedance at high frequency applications. The MEMS resonator array includes a pair of first piezoelectric resonators that are opposed to each other with a space defined therebetween. Moreover, the MEMS resonator array includes a pair of second piezoelectric resonators that are opposed to each other and that are each coupled to respective corners of each of the first piezoelectric resonators. As such, each of the second piezoelectric resonators is partially disposed in the space defined between the pair of first piezoelectric resonators.

2. 发明申请

WO2019156713A1 MICROMECHANICAL RESONATOR HAVING REDUCED SIZE 审中-公开
公开(公告)号：WO2019156713A1
公开(公告)日：2019-08-15
申请号：PCT/US2018/051357
申请日：2018-09-17
申请人： MURATA MANUFACTURING CO., LTD. , KAAJAKARI, Ville
发明人： KAAJAKARI, Ville
IPC分类号： H03H9/10 , H03H3/007 , H03H3/013 , H03H9/02 , H03H9/05 , H03H9/15
摘要： A micromechanical resonator is provided that enables a smaller total package size with an acceptable quality factor for timing applications. The MEMS resonator includes a vibration portion with a base and three or more vibrating beams extending therefrom. Moreover, the MEMS resonator includes a frame that surrounds a periphery of the vibration portion and a pair of anchor between the vibrating beams for stabilizing the vibration portion within the frame. Furthermore, support beams couple the base of the vibration portion to the pair of anchors.

3. 发明申请

WO2016191425A1 MEMS RESONATOR WITH HIGH QUALITY FACTOR 审中-公开
标题翻译：具有高质量因子的MEMS谐振器
公开(公告)号：WO2016191425A1
公开(公告)日：2016-12-01
申请号：PCT/US2016/033929
申请日：2016-05-24
申请人： MURATA MANUFACTURING CO., LTD. , KAAJAKARI, Ville
发明人： KAAJAKARI, Ville
IPC分类号： H03H9/00 , H01L41/00 , H02N2/00
CPC分类号： H03H9/171 , H03H9/02228 , H03H9/02433 , H03H2009/0244 , H03H2009/02496 , H03H2009/155 , H03H2009/241
摘要： A symmetrical MEMS resonator is disclosed with a high quality factor. The MEMS resonator includes a silicon layer with a top surface and bottom surface opposite the top surface. A pair of first metal layers is provided above the top surface of the silicon layer and a corresponding pair of second metal layers is symmetrically provided below the second surface of the silicon layer relative to the pair of first metal layers. Furthermore, a first piezoelectric layer is disposed between the pair of first metal layers and a second piezoelectric layer is disposed between the pair of second metal layers.
摘要翻译：公开了具有高品质因素的对称MEMS谐振器。 MEMS谐振器包括具有与顶表面相对的顶表面和底表面的硅层。一对第一金属层设置在硅层的顶表面上方，相应的一对第二金属层相对于该对第一金属层对称地设置在硅层的第二表面下方。此外，第一压电层设置在一对第一金属层之间，第二压电层设置在一对第二金属层之间。

4. 发明申请

WO2009092846A1 A MICROMECHANICAL RESONATOR 审中-公开
标题翻译：微机械谐振器
公开(公告)号：WO2009092846A1
公开(公告)日：2009-07-30
申请号：PCT/FI2009/000020
申请日：2009-01-23
申请人： VTI TECHNOLOGIES, Ville , KAAJAKARI, Ville
发明人： KAAJAKARI, Ville
IPC分类号： H03H9/02 , H03H9/24 , B81B3/00
CPC分类号： H03H9/2463 , H02N1/008 , H03H3/0076 , H03H9/02275 , H03H9/02338 , H03H9/2478 , H03H9/2484 , H03H2009/02299
摘要： The invention relates to design of micromechanical resonators and, more precisely, to the design of microelectro- mechanical systems (MEMS) resonators. The invention provides an improved design structure for a microelectromechanical systems (MEMS) resonator in which the width of the spring elements (3), (23-24), (27- 30) is greater than the width of the electrode fingers (5-9), (25-26), (31-34), said widths specifically dimensioned so that the sensitivity of the resonant frequency change with respect to dimensional manufacturing variations Formula approaches zero. The improved structure is frequency robust to manufacturing variations and enables reliable frequency referencing with good performance, particularly in small size solutions.
摘要翻译：本发明涉及微机械谐振器的设计，并且更具体地涉及微电子机械系统（MEMS）谐振器的设计。本发明为微机电系统（MEMS）谐振器提供了改进的设计结构，其中弹簧元件（3），（23-24），（27-30）的宽度大于电极指（5- 9），（25-26），（31-34），所述宽度的具体尺寸被设计为使得谐振频率相对于尺寸制造变化公式的灵敏度变化公式接近零。改进的结构对于制造变化具有频率稳健性，并且具有良好性能的可靠频率参考，尤其是在小尺寸解决方案中。

5. 发明申请

WO2021034365A1 THICKNESS MODE RESONATOR 审中-公开
公开(公告)号：WO2021034365A1
公开(公告)日：2021-02-25
申请号：PCT/US2020/034615
申请日：2020-05-27
申请人： MURATA MANUFACTURING CO., LTD. , KAAJAKARI, Ville
发明人： KAAJAKARI, Ville
IPC分类号： H03H3/04 , H03H9/02 , H03H9/17 , H03H9/15 , B06B1/06 , G10K11/02 , G10K11/04
摘要： A resonator that includes a substrate with a cavity that extends in a principal surface thereof and a vibrating resonator above the principal surface of the substrate and including bottom and top electrodes with a piezoelectric layer disposed therebetween. Moreover, a silicon dioxide layer is provided above the substrate and below the vibrating resonator to cover the cavity of the substrate, and a silicon layer is provided between the silicon dioxide layer and the vibrating resonator. The bottom electrode, the top electrode and the piezoelectric layer of the vibrating resonator each have a thickness configured to accommodate substantially a half wavelength λ/2 of the resonator, and the silicon layer has a thickness that accommodates substantially multiple of the half wavelength λ/2 of the resonator.

6. 发明申请

WO2011101547A1 IMPROVED MICROMECHANICAL RESONATOR 审中-公开
标题翻译：改进的微生物共振器
公开(公告)号：WO2011101547A1
公开(公告)日：2011-08-25
申请号：PCT/FI2011/050152
申请日：2011-02-18
申请人： VTI TECHNOLOGIES OY , KAAJAKARI, Ville
发明人： KAAJAKARI, Ville
IPC分类号： H03H9/02 , H03H9/24 , B81B3/00 , G01C19/56
CPC分类号： G01C19/5621 , H03H9/02275 , H03H9/02338 , H03H9/2484 , H03H9/2494
摘要： The object of the invention is to provide an improved structure for a microelectromechanical (MEMS) resonator. According to a first aspect of the invention, the resonator structure in accordance with the invention has a characteristic frequency of oscillation in combination with a given mechanical amplitude, whereby to set said mechanical amplitude, in the resonator structure, by way anchoring at an anchor point (A) located at a given point of the resonator structure substrate, a first element (1) is adapted oscillatory and a second element (2) is adapted oscillatory in such a manner that at least one of said first element and of said second element are arranged to oscillate synchronously with regard to said anchor point (A), whereby the location of said anchor point (A) is selected to be substantially within the joint projection defined by the dimensions of said first (1) and said second element (2).
摘要翻译：本发明的目的是提供一种用于微机电（MEMS）谐振器的改进的结构。根据本发明的第一方面，根据本发明的谐振器结构具有与给定的机械振幅相结合的振荡的特征频率，由此通过在锚定点处锚固来在谐振器结构中设定所述机械振幅（A），位于所述谐振器结构基板的给定点处，第一元件（1）适于摆动，并且第二元件（2）适于以使得所述第一元件和所述第二元件中的至少一个布置成相对于所述锚点（A）同步振动，由此所述锚点（A）的位置被选择为基本上位于由所述第一（1）和所述第二元件（2）的尺寸限定的联合突起内）。

7. 发明申请

WO2006000611A1 FREQUENCY SYNTHESIZER 审中-公开
标题翻译：频率合成器
公开(公告)号：WO2006000611A1
公开(公告)日：2006-01-05
申请号：PCT/FI2004/000384
申请日：2004-06-24
申请人： NOKIA CORPORATION , MATTILA, Tomi , JAAKKOLA, Olli , KAAJAKARI, Ville , OJA, Aarne , SEPPÄ, Heikki
发明人： MATTILA, Tomi , JAAKKOLA, Olli , KAAJAKARI, Ville , OJA, Aarne , SEPPÄ, Heikki
IPC分类号： H03L1/02
CPC分类号： H03L7/1976 , G01K7/32 , H03L1/026 , H03L1/027 , H03L7/085 , H03L7/197
摘要： Method for stabilizing the frequency of a frequency synthesizer by means of a reference oscillator unit coupled to a voltage controlled oscillator (VCO) and a frequency synthesizer, wherein the synthesizer is provided with a phase locked loop (PLL) to stabilize the operation of the voltage controlled oscillator, wherein the reference oscillator unit is a MEMS (MicroElectromechanicalSystems) reference oscillator unit, the temperature of the MEMS reference oscillator unit is measured, and the output frequency is corrected according to the measured temperature by using a frequency/temperature function.
摘要翻译：用于通过耦合到压控振荡器（VCO）和频率合成器的参考振荡器单元来稳定频率合成器的频率的方法，其中所述合成器具有锁相环（PLL）以稳定所述电压的操作控制振荡器，其中参考振荡器单元是MEMS（微机电系统）参考振荡器单元，测量MEMS参考振荡器单元的温度，并且通过使用频率/温度函数根据测量的温度校正输出频率。

8. 发明申请

WO2019070315A1 OVEN CONTROLLED MEMS OSCILLATOR AND SYSTEM AND METHOD FOR CALIBRATING THE SAME 审中-公开
公开(公告)号：WO2019070315A1
公开(公告)日：2019-04-11
申请号：PCT/US2018/034185
申请日：2018-05-23
申请人： MURATA MANUFACTURING CO., LTD. , KAAJAKARI, Ville
发明人： KAAJAKARI, Ville
IPC分类号： H03B5/04 , H03B5/00 , H03H9/02 , H03L1/02
摘要： A calibration system is provided for an oven controlled MEMS oscillator. The calibration system includes control circuitry that to separately selects predetermined target set-point values and controls a heater inside the oven controlled MEMS oscillator based on each of the selected target set-point values to adjust a set-point of the oven controlled MEMS oscillator. The system further includes an oscillation measurement circuit that measures respective oscillation frequencies at each adjusted set-point corresponding to each of the selected predetermined target set-point values. The measured oscillation frequencies can then be used to determine a target set-point operation value for the oven controlled MEMS oscillator, which can be sued to calibrate the oven controlled MEMS oscillator.

9. 发明申请

WO2018111419A1 MEMS RESONATOR WITH SUPRESSED SPURIOUS MODES 审中-公开
公开(公告)号：WO2018111419A1
公开(公告)日：2018-06-21
申请号：PCT/US2017/058763
申请日：2017-10-27
申请人： MURATA MANUFACTURING CO., LTD. , KAAJAKARI, Ville
发明人： KAAJAKARI, Ville
IPC分类号： H03H9/02 , H03H9/00 , H03H9/15 , H03H9/24
摘要： A MEMS resonator is provided with improved electrical characteristics and reduced spurious resonances. The MEMS resonator includes two or more first rectangular resonator plates with lengths greater than their respective widths. Moreover, the MEMS resonator includes two or more second rectangular resonator plates that are positioned parallel to the first resonator plates in the widthwise direction of the MEMS resonator. The length of the second resonator plates is different than the length of the first resonator plates to reduce spurious resonances.

10. 发明申请

WO2018013175A1 PIEZOELECTRIC MEMS RESONATOR WITH A HIGH QUALITY FACTOR 审中-公开
标题翻译：具有高品质因子的压电MEMS谐振器
公开(公告)号：WO2018013175A1
公开(公告)日：2018-01-18
申请号：PCT/US2017/014940
申请日：2017-01-25
申请人： MURATA MANUFACTURING CO., LTD. , KAAJAKARI, Ville
发明人： KAAJAKARI, Ville
IPC分类号： H01L41/053 , H04R17/02 , H04R17/10 , H02N2/18 , H01L27/04
摘要： A MEMS resonator is provided with a high quality factor and lower motional impedance. The MEMS resonator includes a silicon layer having opposing surfaces, a piezoelectric layer above one of the surfaces of the silicon layer, and a pair of electrodes disposed on opposing surfaces of the piezoelectric layer, respectively. Moreover, the piezoelectric layer has a crystallographic axis that extends at an angle relative to the vertical axis of the MEMS resonator.
摘要翻译：为MEMS谐振器提供高质量因子和低运动阻抗。 MEMS谐振器包括具有相对表面的硅层，在硅层的一个表面上方的压电层以及分别设置在压电层的相对表面上的一对电极。此外，压电层具有相对于MEMS谐振器的垂直轴线以一定角度延伸的晶轴。

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