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    • 3. 发明授权
    • Imprinting device, method of fabricating the same, and method of patterning thin film using the same
    • 印刷装置及其制造方法以及使用其形成薄膜的方法
    • US08986909B2
    • 2015-03-24
    • US12030959
    • 2008-02-14
    • Jung-Mok Bae
    • Jung-Mok Bae
    • G03H1/04G03F7/00B82Y10/00B82Y40/00
    • G03F7/0002B82Y10/00B82Y40/00
    • An imprinting device includes a first substrate, a light blocking layer formed on the first substrate corresponding to a light blocking area, and a patterned layer formed on the first substrate. The patterned layer includes an etch pattern and a flow control pattern formed on the first substrate corresponding to a transmittance area and the light blocking area, respectively. When the patterned layer presses a resin layer, the resin layer pressed by the etch pattern moves towards the flow control pattern or a photosensitive resin layer pressed by the flow control pattern moves towards the etch pattern according to a shape of the flow control pattern. Thus, when the shape of the flow control pattern is controlled, the resin layer pressed by the patterned layer may be formed with a uniform thickness.
    • 压印装置包括第一基板,形成在对应于遮光区域的第一基板上的遮光层和形成在第一基板上的图案层。 图案化层包括分别在对应于透射区域和遮光区域的第一基板上形成的蚀刻图案和流动控制图案。 当图案化层按压树脂层时,被蚀刻图案按压的树脂层朝向流动控制图案移动,或者由流动控制图案按压的感光性树脂层根据流动控制图案的形状向蚀刻图案移动。 因此,当控制流动控制图案的形状时,由图案化层压制的树脂层可以形成均匀的厚度。
    • 7. 发明申请
    • IMPRINTING DEVICE, METHOD OF FABRICATING THE SAME. AND METHOD OF PATTERNING THIN FILM USING THE SAME
    • 印刷装置,其制造方法。 以及使用该方法形成薄膜的方法
    • US20080305410A1
    • 2008-12-11
    • US12030959
    • 2008-02-14
    • Jung-Mok BAE
    • Jung-Mok BAE
    • G03F1/00
    • G03F7/0002B82Y10/00B82Y40/00
    • An imprinting device includes a first substrate, a light blocking layer formed on the first substrate corresponding to a light blocking area, and a patterned layer formed on the first substrate. The patterned layer includes an etch pattern and a flow control pattern formed on the first substrate corresponding to a transmittance area and the light blocking area, respectively. When the patterned layer presses a resin layer, the resin layer pressed by the etch pattern moves towards the flow control pattern or a photosensitive resin layer pressed by the flow control pattern moves towards the etch pattern according to a shape of the flow control pattern. Thus, when the shape of the flow control pattern is controlled, the resin layer pressed by the patterned layer may be formed with a uniform thickness.
    • 压印装置包括第一基板,形成在对应于遮光区域的第一基板上的遮光层和形成在第一基板上的图案层。 图案化层包括分别在对应于透射区域和遮光区域的第一基板上形成的蚀刻图案和流动控制图案。 当图案化层按压树脂层时,被蚀刻图案按压的树脂层朝向流动控制图案移动,或者由流动控制图案按压的感光性树脂层根据流动控制图案的形状向蚀刻图案移动。 因此,当控制流动控制图案的形状时,由图案化层压制的树脂层可以形成均匀的厚度。