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    • 2. 发明授权
    • SMIF pod storage, delivery and retrieval system
    • SMIF pod存储,传送和检索系统
    • US06579052B1
    • 2003-06-17
    • US08891543
    • 1997-07-11
    • Anthony C. BonoraRaymond S. MartinRobert NetschJoshua T. OenTerry MosierWilliam J. Fosnight
    • Anthony C. BonoraRaymond S. MartinRobert NetschJoshua T. OenTerry MosierWilliam J. Fosnight
    • B65G100
    • H01L21/67161H01L21/67769Y10S414/14
    • A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-supporting wall. The horizontal rail extends between and is translationally mounted to the vertical rails, which horizontal rail supports a gripper capable of movement along the horizontal rail. The movement of the horizontal rail along the vertical rails, and the movement of the gripper along the horizontal rail, allows the gripper to be positioned at any location within an X-Z plane including the storage shelves. The system includes a two-dimensional transport system. That is, all transport of the pods by the system occurs without the pods ever leaving the X-Z plane of the shelves. This feature contributes to the overall small footprint of the system. Additionally, the gripper moves around in the same plane as the pods, and the rails have a small profile and operate directly adjacent the storage shelves. These features further contribute to the storage, delivery and retrieval system according to the present invention.
    • 具有后壁的储存,输送和取回系统,其上固定有能够支撑一个或多个晶片承载舱的多个搁架。 该结构还包括位于与支架壁间隔开并基本上平行于支架壁的平面中的一对垂直导轨。 水平导轨在垂直轨道之间延伸并且平行地安装在该横向导轨上,该水平轨道支撑能够沿着水平轨道移动的夹具。 水平导轨沿着垂直导轨的移动以及夹持器沿着水平导轨的运动允许夹具定位在包括存储架的X-Z平面内的任何位置处。 该系统包括二维传输系统。 也就是说,系统的所有荚运输都没有荚果离开架子的X-Z平面。 该功能有助于系统的整体体积小。 此外,夹具在与荚一起在同一平面内移动,并且导轨具有小的轮廓并且直接靠近货架。 这些特征进一步有助于根据本发明的存储,传送和检索系统。
    • 3. 发明授权
    • Latching arrangement and method
    • 锁定布置和方法
    • US4643468A
    • 1987-02-17
    • US735675
    • 1985-05-20
    • Joshua T. Oen
    • Joshua T. Oen
    • E05B51/02E05C19/00E05F5/00
    • E05B51/02Y10S292/38Y10T29/49826Y10T292/08
    • An arrangement for latching and unlatching the hood of a motorized vehicle is disclosed herein. This arrangement utilizes a fluid inflatable component carried by a base member of the vehicle and a second component defining an externally accessable cavity carried by the hood. The hood may be closed while the inflatable component is in a deflated state. As it does so, the deflated component is caused to enter the cavity of the component carried by the hood. Thereafter, the inflatable component is inflated sufficient to prevent its removal from the cavity, thereby latching the hood in its closed position.
    • 本文公开了一种用于锁定和解锁机动车辆的罩的装置。 这种布置利用由车辆的基座部件承载的流体可充气部件和限定由发动机罩承载的外部可接近的腔体的第二部件。 当充气部件处于放气状态时,罩可以关闭。 如此,放气部件被引入由发动机罩承载的部件的空腔。 此后,充气部件被充气以防止其从空腔中移出,从而将发动机罩锁定在其关闭位置。
    • 4. 发明申请
    • Sample preparation for isotopic analysis without an oxidizer
    • 没有氧化剂的同位素分析样品制备
    • US20120309100A1
    • 2012-12-06
    • US13134135
    • 2011-05-31
    • Gregor HsiaoJoshua T. Oen
    • Gregor HsiaoJoshua T. Oen
    • G01N25/00G01N30/02G01N21/59G01N33/00
    • G01N30/14G01N21/39G01N33/0014
    • A sample preparation chamber for gas analysis that includes a heating element within is provided. The heating element is maintained at an elevated temperature, such that organic compounds that may be present in an input gas sample are removed via oxidation and/or thermal decomposition to provide a treated gas sample that is substantially free of organic contaminants. The treated gas sample may then be analyzed in a gas analysis instrument (e.g., an optical spectroscopic instrument, a mass spectrometer, etc.) to provide results that are free from interference due to organic contaminants. Preferably, the heating element is configured as a Ni—Cr wire. An important feature of this approach is that the heating element (and the rest of the sample preparation chamber) are not altered in operation to remove the organic compounds.
    • 提供了包括加热元件的用于气体分析的样品制备室。 加热元件保持在升高的温度,使得可以存在于输入气体样品中的有机化合物通过氧化和/或热分解除去以提供基本上不含有机污染物的经处理的气体样品。 然后可以在气体分析仪器(例如,光谱仪,质谱仪等)中分析经处理的气体样品,以提供没有由于有机污染物的干扰的结果。 优选地,加热元件构造为Ni-Cr线。 该方法的一个重要特征是加热元件(和样品制备室的其余部分)在操作中不改变以除去有机化合物。
    • 5. 发明授权
    • Optical communications adapter module configured for use inside a XENPAK-sized module
    • 光通信适配器模块配置为在XENPAK大小的模块内使用
    • US07223027B2
    • 2007-05-29
    • US10748632
    • 2003-12-30
    • Thomas B. MaderRobert F. Buchheit, legal representativeDana L. RoseDaehwan D. KimJoshua T. Oen
    • Steve J. Buchheit, deceased
    • G02B6/36
    • G02B6/322G02B6/3893
    • An optical communications adapter module is provided which includes a casing of a XENPAK-sized module and an optical communications board assembly positioned within the casing. The module also includes a first optical connector coupled to a second optical connector by fiber optics capable of communicating data between the first optical connector and the second optical connector where the first optical connector is coupled to a data transmission connector of the optical communications board assembly and the second optical connector is positioned at a face plate of the casing. The module also includes a third optical connector coupled to a fourth optical connector through fiber optics capable of transmitting data where the third optical connector is coupled to a data reception connector of the optical communications board assembly and the fourth optical connector is positioned at the face plate of the casing.
    • 提供一种光通信适配器模块,其包括XENPAK尺寸模块的壳体和位于壳体内的光通信板组件。 该模块还包括通过光纤耦合到第二光学连接器的第一光学连接器,其能够在第一光学连接器和第二光学连接器之间传送数据,其中第一光学连接器耦合到光学通信板组件的数据传输连接器, 第二光连接器位于壳体的面板上。 该模块还包括通过光纤连接到第四光学连接器的第三光学连接器,其能够传输数据,其中第三光学连接器耦合到光通信板组件的数据接收连接器,并且第四光学连接器位于面板 的套管。
    • 6. 发明授权
    • Method for dry cleaning clean room containers
    • 洁净室容器干洗方法
    • US5846338A
    • 1998-12-08
    • US584374
    • 1996-01-11
    • Anthony C. BonoraN. KedarnathJoshua T. Oen
    • Anthony C. BonoraN. KedarnathJoshua T. Oen
    • B08B9/093B24C1/00B24C3/32C11D7/02C11D11/00C11D17/00H01L21/00B08B3/00
    • H01L21/67028B08B9/093B24C1/003B24C3/325C11D11/0047C11D17/0043C11D7/02
    • A method and apparatus for dry cleaning a semiconductor wafer storage and transport pod. After the pod is located with respect to the cleaning chamber and opened to expose the interior surfaces of the pod to the cleaning chamber, the pod is conditioned in preparation for the cleaning process. The conditioning of the pod includes purging the pod and cleaning chamber with an ionized nitrogen gas to rid the pod and cleaning chamber of airborne contaminants and to neutralize static electrical charges on the pod surfaces. The conditioning process further includes heating the pod surfaces to prevent condensation of moisture and organic contaminants thereon. After the conditioning process, the pod is cleaned with a dry aerosol sprayed onto the pod surfaces. The aerosol spray is comprised of an ionized carbon dioxide/nitrogen (CO.sub.2 /N.sub.2) gas and fine particles of CO.sub.2. The dry cleaning apparatus further includes a circulation subsystem for circulating a fluid through the pod and cleaning chamber to remove airborne particulate, such as those dislodged from the pod surfaces by the CO.sub.2 /N.sub.2 aerosol spray. A filter provided within the path of the circulating fluid removes particulates from the circulating fluid.
    • 一种用于干燥半导体晶片存储和运输盒的方法和装置。 在容器相对于清洁室定位并打开以将容器的内表面暴露于清洁室之后,调节容器以准备清洁过程。 荚的调理包括用离子化氮气吹扫荚果和清洁室,以使荚果和清洁室中的空气污染物排出并中和荚果表面上的静电。 调理过程还包括加热荚表面以防止其上的水分和有机污染物的冷凝。 在调理过程之后,将荚用干燥的气雾剂喷洒到荚果表面上。 气溶胶喷雾由电离二氧化碳/氮(CO2 / N2)气体和二氧化碳细颗粒组成。 干洗设备还包括一个循环子系统,用于使流体通过荚和清洁室循环,以除去空气中的颗粒,例如通过CO 2 / N 2气溶胶喷雾从荚果表面移出的颗粒。 设置在循环流体的路径内的过滤器从循环流体中除去微粒。
    • 7. 发明授权
    • Adjustable hood hinge assembly
    • 可调节罩铰链总成
    • US4658470A
    • 1987-04-21
    • US788647
    • 1985-10-17
    • Joshua T. Oen
    • Joshua T. Oen
    • E05D7/04E05D7/06
    • E05D7/0423E05D2007/0484E05Y2900/516E05Y2900/536Y10T16/53238Y10T16/53253
    • The vehicle, specifically a truck, having a tilt-forward hood is disclosed herein along with a pair of hinges mechanisms for pivotally connecting the hood to the front end section of the vehicle's main body for movement between a completely closed position and a fully opened position. Each hinge mechanism includes a main assembly movable between various adjustable positions for adjusting the position of the hood with respect to the vehicle's main body when the hood is in its closed position and a manually engagable member for moving the main assembly between its various adjustable positions in order to adjust the position of the hood. The main arrangement is located entirely under the hood when the latter is closed, whereby to hide it from view from outside the vehicle. At the same time, the manually engagable member is readily accessible from outside the vehicle when the hood is closed, whereby the hood can be adjusted without its having to be opened.
    • 这里公开了具有倾斜前罩的车辆,以及一对铰链机构,用于将发动机罩枢转地连接到车辆主体的前端部分,用于在完全关闭位置和完全打开位置之间移动 。 每个铰链机构包括可在各种可调节位置之间移动的主组件,用于当机罩处于其关闭位置时调节机罩相对于车辆主体的位置;以及手动接合构件,用于将主组件在其各种可调节位置之间移动 为了调整机罩的位置。 主要装置在后者关闭时完全位于发动机罩下方,从而将其从车外外观看。 同时,当发动机关闭时,手动接合构件容易从车辆外部接近,由此可以调节罩而不必打开罩。