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    • 6. 发明授权
    • Method of making high performance optical edge and laser-line filters and resulting products
    • 制造高性能光学边缘和激光线滤光片及其产品的方法
    • US07119960B1
    • 2006-10-10
    • US11151728
    • 2005-06-13
    • Turan ErdoganJoseph T. FossLigang Wang
    • Turan ErdoganJoseph T. FossLigang Wang
    • G02B5/28
    • G02B5/288
    • High performance optical edge and laser-line filters and methods of making the same are disclosed. The optical edge filters have an edge steepness greater than about 0.8% as measured by dividing (a) the edge width from the 50% transmission wavelength to the optical density 6 (“OD6”) wavelength by (b) the 50% transmission wavelength. The optical edge filters also have an average transmission above about 95%. The laser-line filters have an extremely high transmission in the passband (greater than 90%), an extremely narrow transmission bandwidth, and achieve blocking with an optical density (OD) greater than 5 at wavelengths that differ from the laser wavelength by less than 1% of the laser wavelength. The methods for making such filters accurately determine when deposition of each layer of the filter should terminate.
    • 公开了高性能光学边缘和激光线路滤波器及其制造方法。 通过将(a)50%透射波长的边缘宽度与光密度6(“OD6”)波长分开(b)50%透射波长测量,光边缘滤光器具有大于约0.8%的边缘陡度。 光学边缘滤光片的平均透射率也高于约95%。 激光线路滤波器在通带(大于90%)中具有非常高的传输,传输带宽非常窄,并且在与激光波长不同的波长处的光密度(OD)大于5的情况下实现阻塞,小于 1%的激光波长。 制造这种过滤器的方法准确地确定过滤器的各层的沉积何时终止。
    • 7. 发明授权
    • Method of making highly discriminating optical edge filters and resulting products
    • 制造高分辨率光学边缘滤光片及其产品的方法
    • US07068430B1
    • 2006-06-27
    • US10840134
    • 2004-05-06
    • Glenn ClarkeTuran ErdoganJoseph T. FossLigang Wang
    • Glenn ClarkeTuran ErdoganJoseph T. FossLigang Wang
    • G02B5/28
    • G02B5/285
    • Highly discriminating optical edge filters and methods of making the same are disclosed. The optical edge filters have an edge steepness greater than about 0.8% as measured by dividing (a) the edge width from the 50% transmission wavelength to the optical density 6 (“OD6”) wavelength by (b) the 50% transmission wavelength. The optical filters also have an average transmission above about 95%. The methods for making such filters accurately determine when deposition of each layer of the filter should terminate. The methods include calculating theoretical transmission data for a layer of the filter and calculating an expected deposition duration for the layer. The methods also include measuring transmission through the layer during deposition for a period less than the expected deposition duration. When the measuring period elapses, a new deposition duration is calculated based upon the theoretical transmission data and the measured transmission data, thereby providing an accurate deposition duration for the layer.
    • 公开了高分辨率光学边缘滤波器及其制造方法。 通过将(a)50%透射波长的边缘宽度与光密度6(“OD6”)波长分开(b)50%透射波长测量,光边缘滤光器具有大于约0.8%的边缘陡度。 光学滤波器的平均透射率也高于约95%。 制造这种过滤器的方法准确地确定过滤器的各层的沉积何时终止。 所述方法包括计算所述滤波器层的理论传输数据并计算所述层的预期沉积持续时间。 所述方法还包括在沉积期间测量穿过该层的传输时间小于预期的沉积持续时间。 当测量周期过去时,基于理论传输数据和测量的传输数据计算新的沉积持续时间,从而为该层提供精确的沉积持续时间。