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1. 发明授权

US08885849B2 Component having a micromechanical microphone structure, and method for operating such a microphone component 有权
标题翻译：具有微机械麦克风结构的部件，以及用于操作这种麦克风组件的方法
公开(公告)号：US08885849B2
公开(公告)日：2014-11-11
申请号：US13138276
申请日：2010-01-11
申请人： Alberto Arias-Drake , Thomas Buck , Jochen Zoellin , Juan Ramos-Martos , Franz Laermer , Antonio Ragel-Morales , Joaquin Ceballos-Caceres , Jose M. Mora-Gutierrez
发明人： Alberto Arias-Drake , Thomas Buck , Jochen Zoellin , Juan Ramos-Martos , Franz Laermer , Antonio Ragel-Morales , Joaquin Ceballos-Caceres , Jose M. Mora-Gutierrez
IPC分类号： H04B15/00 , H04R19/01 , H04R3/00
CPC分类号： H04R3/007 , H04R19/016
摘要： A concept is proposed for a MEMS microphone which may be operated at a relatively low voltage level and still have comparatively high sensitivity. The component according to the present invention includes a micromechanical microphone structure having an acoustically active diaphragm which functions as a deflectable electrode of a microphone capacitor (1), and a stationary acoustically permeable counterelement which functions as a counter electrode of the microphone capacitor (1). The component also includes means for applying a high-frequency clock signal (2) to the microphone capacitor (1) and for applying the inverted clock signal (2′) to an adjustable but acoustically inactive compensation capacitor (7), an integrating operational amplifier (3) which integrates the sum of the current flow through the microphone capacitor (1) and the current flow through the compensation capacitor (7), a demodulator (4) for the output signal of the integrating operational amplifier (3), the demodulator being synchronized with the clock signal (2), and a low-pass filter for obtaining a microphone signal which corresponds to the changes in capacitance of the microphone capacitor (1), based on the output signal of the demodulator (4).
摘要翻译：对于可以在相对低的电压水平操作且仍具有较高灵敏度的MEMS麦克风提出了一个概念。根据本发明的部件包括具有用作麦克风电容器（1）的可偏转电极的声学活动膜片的微机械麦克风结构和用作麦克风电容器（1）的对电极的静止声透射反射器，。该组件还包括用于将高频时钟信号（2）施加到麦克风电容器（1）并用于将反相时钟信号（2'）施加到可调谐但无声补偿电容器（7）的装置，积分运算放大器（3），其集成了通过麦克风电容器（1）的电流和通过补偿电容器（7）的电流之和，用于积分运算放大器（3）的输出信号的解调器（4），解调器与时钟信号（2）同步，以及低通滤波器，用于基于解调器（4）的输出信号获得与麦克风电容器（1）的电容变化相对应的麦克风信号。

2. 发明申请

US20120057721A1 COMPONENT HAVING A MICROMECHANICAL MICROPHONE STRUCTURE, AND METHOD FOR OPERATING SUCH A MICROPHONE COMPONENT 有权
标题翻译：具有微机械麦克风结构的部件和操作这样的麦克风部件的方法
公开(公告)号：US20120057721A1
公开(公告)日：2012-03-08
申请号：US13138276
申请日：2010-01-11
申请人： Alberto Arias-Drake , Thomas Buck , Jochen Zoellin , Juan Ramos-Martos , Franz Laermer , Antonio Ragel-Morales , Joaquin Ceballos-Caceres , Jose M. Mora-Gutierrez
发明人： Alberto Arias-Drake , Thomas Buck , Jochen Zoellin , Juan Ramos-Martos , Franz Laermer , Antonio Ragel-Morales , Joaquin Ceballos-Caceres , Jose M. Mora-Gutierrez
IPC分类号： H04B15/00
CPC分类号： H04R3/007 , H04R19/016
摘要： A concept is proposed for a MEMS microphone which may be operated at a relatively low voltage level and still have comparatively high sensitivity. The component according to the present invention includes a micromechanical microphone structure having an acoustically active diaphragm which functions as a deflectable electrode of a microphone capacitor (1), and a stationary acoustically permeable counterelement which functions as a counter electrode of the microphone capacitor (1). The component also includes means for applying a high-frequency clock signal (2) to the microphone capacitor (1) and for applying the inverted clock signal (2′) to an adjustable but acoustically inactive compensation capacitor (7), an integrating operational amplifier (3) which integrates the sum of the current flow through the microphone capacitor (1) and the current flow through the compensation capacitor (7), a demodulator (4) for the output signal of the integrating operational amplifier (3), the demodulator being synchronized with the clock signal (2), and a low-pass filter for obtaining a microphone signal which corresponds to the changes in capacitance of the microphone capacitor (1), based on the output signal of the demodulator (4).
摘要翻译：对于可以在相对低的电压水平操作且仍具有较高灵敏度的MEMS麦克风提出了一个概念。根据本发明的部件包括具有用作麦克风电容器（1）的可偏转电极的声学活动膜片的微机械麦克风结构和用作麦克风电容器（1）的对电极的静止声透射反射器，。该组件还包括用于将高频时钟信号（2）施加到麦克风电容器（1）并用于将反相时钟信号（2'）施加到可调谐但无声补偿电容器（7）的装置，积分运算放大器（3），其集成了通过麦克风电容器（1）的电流和通过补偿电容器（7）的电流之和，用于积分运算放大器（3）的输出信号的解调器（4），解调器与时钟信号（2）同步，以及低通滤波器，用于基于解调器（4）的输出信号获得与麦克风电容器（1）的电容变化相对应的麦克风信号。

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