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    • 9. 发明授权
    • Diamond UV-Ray sensor
    • 金刚石紫外线传感器
    • US07884372B2
    • 2011-02-08
    • US11997671
    • 2006-07-28
    • Yasuo KoideMeiyong LiaoJose Antonio Alvarez
    • Yasuo KoideMeiyong LiaoJose Antonio Alvarez
    • H01J3/02
    • H01L31/028H01L21/02376H01L21/02527H01L21/0262H01L31/022408H01L31/09H01L31/1085H01L31/1804Y02E10/547Y02P70/521
    • Au base electrode materials have fatal disadvantages, such as inferior adhesion to diamond, low mechanical strength, and low thermal stability.A diamond UV sensor is provided which includes a photoconductive or Schottky optical sensor element having two-terminal electrodes and detects light irradiating a light-receiving portion according to the changes in electrical resistance or photo-induced current of the material of the light-receiving portion. The sensor element includes diamond having a surface from which a conductive surface layer has been removed, and the surface of the diamond is used as the light-receiving portion and a junction interface with the electrodes. The electrodes include a rectifying and an ohmic electrode. The rectifying electrode is transparent electrode capable of transmitting light and is defined by a single layer made of a nitride of a refractory metal element. The ohmic electrode includes a first layer made of a reactive elementary metal that can react with diamond to form a carbide or a carbon-containing solid solution, and a second layer made of a nitride of a refractory metal element.
    • Au基电极材料具有致命的缺点,例如对金刚石的粘附性差,机械强度低和热稳定性低。 提供一种金刚石UV传感器,其包括具有两端电极的光导或肖特基光学传感器元件,并且根据光接收部分的材料的电阻或光感应电流的变化来检测照射光接收部分的光 。 传感器元件包括具有表面的金刚石,导电表面层从该表面被去除,并且金刚石的表面用作光接收部分和与电极的结界面。 电极包括整流和欧姆电极。 整流电极是能够透过光的透明电极,由难熔金属元素的氮化物构成的单层限定。 欧姆电极包括由可与金刚石反应形成碳化物或含碳固溶体的反应性基本金属制成的第一层和由难熔金属元素的氮化物制成的第二层。
    • 10. 发明申请
    • DIAMOND UV-RAY SENSOR
    • 金刚石紫外线传感器
    • US20100090226A1
    • 2010-04-15
    • US11997671
    • 2006-07-28
    • Yasuo KoideMeiyong LiaoJose Antonio Alvarez
    • Yasuo KoideMeiyong LiaoJose Antonio Alvarez
    • H01L31/028
    • H01L31/028H01L21/02376H01L21/02527H01L21/0262H01L31/022408H01L31/09H01L31/1085H01L31/1804Y02E10/547Y02P70/521
    • Au base electrode materials have fatal disadvantages, such as inferior adhesion to diamond, low mechanical strength, and low thermal stability.A diamond UV sensor is provided which includes a photoconductive or Schottky optical sensor element having two-terminal electrodes and detects light irradiating a light-receiving portion according to the changes in electrical resistance or photo-induced current of the material of the light-receiving portion. The sensor element includes diamond having a surface from which a conductive surface layer has been removed, and the surface of the diamond is used as the light-receiving portion and a junction interface with the electrodes. The electrodes include a rectifying and an ohmic electrode. The rectifying electrode is transparent electrode capable of transmitting light and is defined by a single layer made of a nitride of a refractory metal element. The ohmic electrode includes a first layer made of a reactive elementary metal that can react with diamond to form a carbide or a carbon-containing solid solution, and a second layer made of a nitride of a refractory metal element.
    • Au基电极材料具有致命的缺点,例如对金刚石的粘附性差,机械强度低和热稳定性低。 提供一种金刚石UV传感器,其包括具有两端电极的光导或肖特基光学传感器元件,并且根据受光部分的材料的电阻或光感应电流的变化来检测照射光接收部分的光 。 传感器元件包括具有表面的金刚石,导电表面层从该表面被去除,并且金刚石的表面用作光接收部分和与电极的结界面。 电极包括整流和欧姆电极。 整流电极是能够透过光的透明电极,由难熔金属元素的氮化物构成的单层限定。 欧姆电极包括由可与金刚石反应形成碳化物或含碳固溶体的反应性基本金属制成的第一层和由难熔金属元素的氮化物制成的第二层。