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    • 2. 发明授权
    • Diffractive thin-film piezoelectric micromirror and method of producing the same
    • 衍射薄膜压电微镜及其制造方法
    • US07626745B2
    • 2009-12-01
    • US10952556
    • 2004-09-28
    • Sang Kyeong YunJong-Hyeong SongSeung-Do AnMin-Suk Oh
    • Sang Kyeong YunJong-Hyeong SongSeung-Do AnMin-Suk Oh
    • G02B26/12
    • G02B26/0808G09F9/372
    • Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive thin-film piezoelectric micromirror, which is operated in a piezoelectric operation manner to assure excellent displacement, operation speed, reliability, linearity, and low voltage operation, and a method of producing the same. The diffractive thin-film piezoelectric micromirror includes a silicon substrate on which a recess is formed to provide an air space to the center thereof, and a piezoelectric mirror layer having a band shape, which is attached to the silicon substrate along both ends of the recess at both ends thereof while being spaced from the bottom of the recess at a center portion thereof and which includes a thin-film piezoelectric material layer to be vertically movable when voltage is applied to the piezoelectric material layer, and thus diffracts an incident light beam.
    • 公开了一种衍射微镜及其制造方法。 更具体地,本发明涉及以压电操作方式操作以确保优异的位移,操作速度,可靠性,线性和低电压操作的衍射薄膜压电微镜及其制造方法。 衍射薄膜压电微反射镜包括硅基板,其上形成有凹部以在其中心提供空气空间;以及具有带状的压电反射镜层,其沿着凹部的两端附接到硅基板 同时在其中心部分与凹部的底部间隔开,并且包括薄膜压电材料层,当电压施加到压电材料层时可以垂直移动,从而衍射入射光束。
    • 3. 发明申请
    • MEMS STRUCTURE AND OPTICAL MODULATOR HAVING TEMPERATURE COMPENSATION LAYER
    • 具有温度补偿层的MEMS结构和光学调制器
    • US20090067034A1
    • 2009-03-12
    • US12060017
    • 2008-03-31
    • Ki-Suk WooJong-Hyeong SongHee-Yeoun Kim
    • Ki-Suk WooJong-Hyeong SongHee-Yeoun Kim
    • G02B26/00
    • G02B26/0858G02B7/008
    • An optical modulator can be provided that includes a substrate; an insulation layer positioned on the substrate; a ribbon layer such that its center portion is spaced apart from the insulation layer; a piezoelectric actuator positioned on either end of the ribbon layer that provides the driving force which moves the center portion of the ribbon layer vertically; and a temperature compensation layer, which is made of a thermally contracting material having a negative coefficient of expansion, and which is formed on at least one position of an upper portion of the piezoelectric actuator, a lower portion of the piezoelectric actuator, and a lower surface of the ribbon layer corresponding to a position of the piezoelectric actuator. In the optical modulator, the problem of thermal deformation due to rises in temperature can be resolved, whereby the accuracy and reliability of operation of the component can be increased.
    • 可以提供包括基板的光学调制器; 位于基板上的绝缘层; 带状层,使得其中心部分与绝缘层间隔开; 定位在带状层的任一端的压电致动器,其提供使带状层的中心部分垂直移动的驱动力; 以及温度补偿层,其由具有负膨胀系数的热收缩材料制成,并且形成在压电致动器的上部的至少一个位置,压电致动器的下部和下部 带层的表面对应于压电致动器的位置。 在光调制器中,可以解决由于温度升高引起的热变形的问题,从而可以提高部件的操作的精度和可靠性。
    • 7. 发明授权
    • Display device using light modulator and having improved numerical aperture of after-edge lens system
    • 使用光调制器的显示装置并具有改进的后缘透镜系统的数值孔径
    • US07327508B2
    • 2008-02-05
    • US11157483
    • 2005-06-21
    • Jong Hyeong SongHaeng Seok Yang
    • Jong Hyeong SongHaeng Seok Yang
    • G02B26/08
    • G02B26/0808
    • A display device using a light modulator and having an improved numerical aperture (NA) of an after-edge lens system is disclosed. The display device includes an illumination lens, a diffractive light modulator, an NA improvement unit, a filter system and a projection system. The illumination lens converts light into linear parallel light, and outputs the linear parallel light. The diffractive light modulator produces diffracted light beams having a plurality of diffraction orders by modulating the linear parallel light incident from the illumination lens according to an external control signal. The NA improvement unit causes + and − diffracted light beams of the diffracted light beams to come close to each other. The filter system passes only some of the diffracted light beams having predetermined orders, therethrough. The projection system focuses the diffracted light beams onto an object and allows the focused diffracted light to scan the object.
    • 公开了一种使用光调制器并具有改进的后边缘透镜系统的数值孔径(NA)的显示装置。 显示装置包括照明透镜,衍射光调制器,NA改进单元,滤光器系统和投影系统。 照明透镜将光转换为线性平行光,并输出线性平行光。 衍射光调制器通过根据外部控制信号调制从照明透镜入射的线性平行光,产生具有多个衍射级的衍射光束。 NA改善单元使衍射光束的+衍射光束彼此接近。 滤波器系统仅通过其中具有预定次序的一些衍射光束。 投影系统将衍射光束聚焦到物体上,并允许聚焦的衍射光扫描物体。
    • 10. 发明申请
    • TILT MIRROR
    • 倾斜镜
    • US20090310202A1
    • 2009-12-17
    • US12471272
    • 2009-05-22
    • Ki-Suk WooHee-Yeoun KimSeung-Do AnJong-Hyeong Song
    • Ki-Suk WooHee-Yeoun KimSeung-Do AnJong-Hyeong Song
    • G02B26/08
    • G02B26/0858
    • A tilt mirror is disclosed. The tilt mirror can include: a reflection portion, which may reflect incident light; a first cantilever, which may be formed on either end of the reflection portion, and which may generate a stress in one direction; a second cantilever, which may be formed on either end of the reflection portion beside the first cantilever, and which may generate a stress in the other direction; and a connector portion, which may connect the reflection portion with one end of the first cantilever and with one end of the second cantilever such that the stress generated in the one direction and the stress generated in the other direction are transferred to the reflection portion. The tilt mirror provides a simple composition that can be utilized to alter the path for rays of light.
    • 公开了一种倾斜镜。 倾斜镜可以包括:反射部分,其可以反射入射光; 第一悬臂,其可以形成在反射部分的任一端上,并且可以在一个方向上产生应力; 第二悬臂,其可以形成在第一悬臂旁边的反射部分的任一端上,并且可以在另一方向上产生应力; 以及连接器部分,其可以将反射部分与第一悬臂的一端和第二悬臂的一端连接,使得沿一个方向产生的应力和在另一个方向上产生的应力被传递到反射部分。 倾斜镜提供了可用于改变光线路径的简单组合。