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    • 7. 发明申请
    • Kinematic ion implanter electrode mounting
    • 运动离子注入机电极安装
    • US20050056794A1
    • 2005-03-17
    • US10688076
    • 2003-10-17
    • Jonathon SimmonsJohn ShelleyAndrew Devaney
    • Jonathon SimmonsJohn ShelleyAndrew Devaney
    • H01J37/02H01J37/08H01J37/317
    • H01J37/08H01J27/024H01J37/023H01J37/3171H01J2237/032H01J2237/061
    • A kinematic electrode mount is provided for an ion implanter in which an electrode insert member having an electrode body portion which defines an aperture, is inserted into an electrode support frame. In one embodiment, a first kinematic alignment pin of the insert member engages a first, groove-shaped kinematic alignment surface of the electrode support frame to align the first alignment pin in two orthogonal directions relative to the electrode support frame. In addition, a second kinematic alignment pin of the insert member engages a second kinematic alignment surface of the electrode support frame to align the insert member in a rotational orientation relative to the electrode support frame. A plurality of flanges of the insert member engage the electrode support frame to retain the insert member in the aligned position and to electrically couple the electrode insert member to the electrode support frame. A spring positioned between the electrode insert member and the electrode support frame biases the electrode insert member in the aligned and retained position relative to the electrode support frame. In another embodiment, the electrode support frame has alignment pins and the insert member has alignment slots.
    • 提供了一种用于离子注入机的运动电极座,其中具有限定孔的电极主体部分的电极插入件被插入到电极支撑框架中。 在一个实施例中,插入构件的第一运动学对准销接合电极支撑框架的第一槽形运动学对准表面,以使第一对准销相对于电极支撑框架在两个正交方向上对齐。 此外,插入构件的第二运动学对准销接合电极支撑框架的第二运动学对准表面,以使插入构件相对于电极支撑框架以旋转取向对准。 插入构件的多个凸缘接合电极支撑框架以将插入构件保持在对准位置并且将电极插入构件电耦合到电极支撑框架。 位于电极插入构件和电极支撑框架之间的弹簧将电极插入构件相对于电极支撑框架偏置在对准和保持位置。 在另一个实施例中,电极支撑框架具有对准销,插入件具有对准槽。
    • 8. 发明授权
    • Pumps
    • US4115041A
    • 1978-09-19
    • US676882
    • 1976-04-14
    • Peter Richard Selwood, deceasedby Timothy John Selwood, executorby Martin John Shelley Axtell, executorJohn David Burton
    • Peter Richard Selwood, deceasedby Timothy John Selwood, executorby Martin John Shelley Axtell, executorJohn David Burton
    • F04B53/10F04B1/02F04B43/00F04B43/02F04B53/12F04F7/00F04B23/10F04B43/08
    • F04B53/123F04B1/02F04B43/0036F04F7/00
    • A pump comprising a body having at least one chamber and preferably two axially spaced and aligned pumping chambers, each such pumping chamber communicating at opposite ends respectively with a pump inlet and a pump outlet and containing an actuator reciprocable longitudinally of the pumping chamber by drive means, the actuator having a rigid main central portion and a peripherally extending elastic sealing ring in non-sliding fluid-tight engagement with a lateral wall of the pumping chamber and having mounted thereon actuator valve means controlling the flow of fluid from the inlet to the outlet of the pump, the pumping chambers communicating at their outlet ends with manifold passageways in the body of the pump which in turn communicate with respective passageways in an outlet duct situated on opposite sides of a longitudinally extending web therein terminating at a position spaced from the downstream end of the outlet duct to provide for cyclic flow of the pump fluid out of one pumping chamber and into the other around the downstream end of said web when shut off occurs at the pump outlet, fluid inductance means and fluid capacitance means with the latter operative throughout the pumping cycle being provided to limit the internal pressure to a safe value under shut off conditions.
    • 一种泵,包括具有至少一个室的主体,并且优选地具有两个轴向间隔开和对准的泵送室,每个这样的泵送室分别在相对的端部处连通泵入口和泵出口,并且包含通过驱动装置沿泵送室纵向往复运动的致动器 致动器具有刚性的主中心部分和周向延伸的弹性密封环,其与泵送室的侧壁非滑动流体密封接合并且安装在其上的致动器阀装置,其控制流体从入口到出口 泵的泵室在泵的出口端与泵的主体中的歧管通道连通,泵的主体又与位于纵向延伸的纤维网的相对侧上的出口管道中相应的通道连通,其终止于与下游 出口管道的端部,以提供泵流体从一个泵的循环流动 当在泵出口处发生切断时,流体电感装置和流体电容装置在整个泵送循环期间被运行,以在关闭时将内部压力限制到安全值 关闭条件。