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1. 发明授权

US5567625A Apparatus and method for real-time spectral deconvolution of chemical mixtures 失效
标题翻译：化学混合物实时光谱去卷积的装置和方法
公开(公告)号：US5567625A
公开(公告)日：1996-10-22
申请号：US326101
申请日：1994-10-19
申请人： Jerome M. Kurtzberg , John S. Lew
发明人： Jerome M. Kurtzberg , John S. Lew
IPC分类号： G01N21/31 , G01N21/25
CPC分类号： G01N21/31 , Y10S436/805
摘要： An apparatus and method are described for determining the relative concentrations of the constituent chemical components of a chemical combination. The spectral response of the composite sample, measured at a number of wavelengths .lambda..sub.i, is represented by a vector C. The relative concentration of the jth constituent is X.sub.j, and the relative concentrations of each of the chemical constituents are represented by the vector X. The vector X can be determined from the vector C by the following matrix equation:X=(A.sup.T A).sup.-1 A.sup.T Cwherein the matrix A has elements A.sub.ij, which is the spectral response of the jth component at wavelength .lambda..sub.i. Since the matrix A is a predetermined set of numbers, the elements of vector X are readily determined from the above equation. Such a determination is rapid; a profile of each of the constituents X.sub.j in the sample is readily and rapidly determined.
摘要翻译：描述了用于确定化学组合的组成化学组分的相对浓度的装置和方法。在多个波长λi处测量的复合样品的光谱响应由载体C表示。第j个成分的相对浓度为Xj，并且每个化学成分的相对浓度由向量X 矢量X可以通过以下矩阵方程从矢量C确定：X =（ATA）-1 ATC，其中矩阵A具有元素Aij，其是第λ个分量波长λi的光谱响应。由于矩阵A是预定的数字集合，因此可以容易地根据上述等式确定向量X的元素。这样的决定是快速的; 样品中的每种成分Xj的轮廓容易且快速地确定。

2. 发明授权

US5586049A Apparatus and method for generating profiles of constituents of chemical mixtures 失效
标题翻译：用于产生化学混合物成分轮廓的装置和方法
公开(公告)号：US5586049A
公开(公告)日：1996-12-17
申请号：US325858
申请日：1994-10-19
申请人： Jerome M. Kurtzberg , John S. Lew
发明人： Jerome M. Kurtzberg , John S. Lew
IPC分类号： G01N21/31
CPC分类号： G01N21/314
摘要： An apparatus, system and method are described for determining profiles of the absolute or relative concentrations of N constituent chemical components of a chemical mixture over a group of samples. For each sample a plurality of sets of concentrations is determined wherein each set has substantially the same error for corresponding to the absorption spectra measured for the composite sample. A plurality of samples of the chemical mixture are generated, for example, by removing parts of a surface sequentially. From amongst the plurality of sets of absolute or relative concentrations over the plurality of samples, a path of highest probability is determined from which profiles of each of the chemical components can be determined. The invention is applied to generating profiles of chemical constituents as material is received from a surface of a semiconductor chip to generate profiles as a function of depth into the sample.
摘要翻译：描述了用于确定化学混合物在一组样品上的N种组分化学组分的绝对或相对浓度的分布的装置，系统和方法。对于每个样品，确定多组浓度，其中每组具有与对于复合样品测量的吸收光谱相对应的基本相同的误差。产生化学混合物的多个样品，例如通过依次除去表面的部分。从多个样本中的多个绝对或相对浓度集合中，确定可以确定每个化学成分的轮廓的最高概率的路径。本发明应用于产生化学成分的轮廓，因为材料从半导体芯片的表面接收以产生作为样品深度的函数的轮廓。

3. 发明授权

US5585919A Error minimization apparatus and method for real-time spectral deconvolution of chemical mixtures 失效
标题翻译：化学混合物实时光谱去卷积误差最小化装置及方法
公开(公告)号：US5585919A
公开(公告)日：1996-12-17
申请号：US325746
申请日：1994-10-19
申请人： Jerome M. Kurtzberg , John S. Lew
发明人： Jerome M. Kurtzberg , John S. Lew
IPC分类号： G01N21/31 , G01J3/28
CPC分类号： G01N21/314
摘要： An apparatus and method are described for determining the relative concentrations of the N constituent chemical components of a chemical combination. The spectral response, C.sub.i, of the composite sample is measured at M wavelengths .lambda..sub.i, wherein M.gtoreq.N. The relative concentration of the jth constituent is X.sub.j. The spectral response of the jth component at wavelength .lambda..sub.i is A.sub.ij. the set of M equations ##EQU1## have intersections defining values of X.sub.j of which only those within the region defined by 0.ltoreq.X.sub.j are possible values of X.sub.j. An error is assigned to each intersections and the intersection of minimum error defines the values of X.sub.j. Such a determination is rapid. A profile of each of the relative concentration X.sub.j in the sample is readily and rapidly determined.
摘要翻译：描述了用于确定化学组合的N个组分化学组分的相对浓度的装置和方法。在M个波长λi处测量复合样品的光谱响应Ci，其中M> = N。第j个成分的相对浓度为Xj。波长λi处第j个分量的光谱响应为Aij。 M方程组具有定义Xj值的交点，其中只有由0

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