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    • 4. 发明申请
    • CARRYING APPARATUS FOR PROBE CARD
    • 携带探针卡
    • WO2008078886A1
    • 2008-07-03
    • PCT/KR2007/006436
    • 2007-12-11
    • SECRON Co., Ltd.CHOI, Su HyunKIM, Meang KwonJIN, Jeon HoCHOI, Ki Uk
    • CHOI, Su HyunKIM, Meang KwonJIN, Jeon HoCHOI, Ki Uk
    • H01L21/677
    • G01R31/2887
    • Disclosed herein is a carrying apparatus for probe card that is used in probe test equipment for testing wafers. The carrying apparatus for probe card includes a probe card holding unit, an arm unit, an ascending and descending shaft, and a load support unit. The probe card holding unit is configured to hold a probe card and is provided with a load sensing unit for sensing the weight of the held probe card. The arm unit is configured such that the probe card holding unit is mounted thereto. The ascending and descending shaft is connected to the arm unit so as to freely rotate the arm unit. The load support unit is configured to support the ascending and descending shaft. The force that is applied to the load support unit to support the ascending and descending shaft varies in proportion to the weight of the held probe card.
    • 本文公开了一种用于探针测试设备中用于测试晶片的探针卡的运载装置。 用于探针卡的运送装置包括探针卡保持单元,臂单元,上升和下降轴以及负载支撑单元。 探针卡保持单元被配置为保持探针卡,并且设置有用于感测保持的探针卡的重量的负载感测单元。 臂单元构造成使得探针卡保持单元被安装到其上。 上升和下降的轴连接到臂单元,以便自由地旋转臂单元。 负载支撑单元构造成支撑上升和下降的轴。 施加到负载支撑单元以支撑上升和下降轴的力与保持的探针卡的重量成比例地变化。
    • 5. 发明申请
    • PROBE STATION, AND TESTING METHOD OF WAFER USING THE SAME
    • 探测台和使用其的测试方法
    • WO2008078939A1
    • 2008-07-03
    • PCT/KR2007/006777
    • 2007-12-24
    • SECRON Co., Ltd.CHOI, Su HyunKIM, Meang KwonJIN, Jeon HoCHOI, Ki Uk
    • CHOI, Su HyunKIM, Meang KwonJIN, Jeon HoCHOI, Ki Uk
    • H01L21/66
    • G01R31/2893G01R31/2887
    • Disclosed herein is probe station that is used to test semiconductor devices formed on a wafer. The equipment includes a chuck, a probe card holder, a holder fixing unit, a transfer unit, and a holder movement unit. The chuck supports the wafer. The probe card holder is configured such that a probe card, which is provided with a plurality of probes, is seated therein. The holder fixing unit fastens the probe card holder. The transfer unit enables seating of the probe card in the probe card holder by laterally moving the probe card holder from the probe station to the outside, and laterally moving the probe card holder is seated, into the probe station. The holder movement unit causes the probe card holder to be fastened to the holder fixing unit by changing the location of probe card holder while supporting the holder fixing unit.
    • 这里公开了用于测试形成在晶片上的半导体器件的探针台。 该设备包括卡盘,探针卡座,保持器固定单元,转印单元和保持器移动单元。 卡盘支撑晶片。 探针卡保持器构造成使得设置有多个探针的探针卡位于其中。 支架固定单元固定探针卡夹。 转印单元可以通过将探针卡夹从探针台侧向移动到外部将探针卡安置在探针卡固定器中,并且将探针卡夹持器横向移动到探针台中。 保持器移动单元通过在支撑固定器固定单元的同时改变探针卡夹持器的位置,使探针卡保持器固定到保持器固定单元。