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1. 发明授权

US06779993B2 Rotor profile for screw compressors 有权
标题翻译：螺杆压缩机的转子轮廓
公开(公告)号：US06779993B2
公开(公告)日：2004-08-24
申请号：US10348868
申请日：2003-01-22
申请人： Jeong Suk Kim , Jae Ho Lee
发明人： Jeong Suk Kim , Jae Ho Lee
IPC分类号： F04C1816
CPC分类号： F04C18/084 , F04C18/16
摘要： A rotor profile for screw compressors is disclosed. The rotor profile is shown in a latitudinal cross-section taken along a line extending in a direction perpendicular to rotor axes, and is applied to male and female rotors used in a screw compressor having a housing defining an actuating space therein, the male rotor being rotatably set in the actuating space and having spiral teeth and roots defined between the teeth, and the female rotor being set in the actuating space to rotatably engage with the male rotor and having spiral teeth and roots defined between the teeth. The rotor profile comprises a first curve F-G determined as a circular arc and inscribed in an addendum circle of the female rotor at a point “G” around a trailing end of each tooth of the female rotor, and a second curve determined by a hyperbola function r=(&egr;·K)/(1−&egr;·cos &thgr;), wherein 1.1≦&egr;≦1.15, and a derived function of first order of the hyperbola function of the second curve at a point “F” is equal to a derived function of first order of a function of the curve F-G. Due to the curve E-F, the blow-hole size is preferably minimized while the pressure angle of a rotor machining tool is maintained at a level of at least 8°. In addition, due to an appropriately limited wrap angle of the male rotor, the pressure angle of the rotor machining tool is increased and desired tooth strength is maintained.
摘要翻译：公开了一种用于螺杆式压缩机的转子轮廓。转子轮廓以沿垂直于转子轴线的方向延伸的线截取的纬向横截面示出，并且被施加到在具有在其中限定致动空间的壳体的螺杆压缩机中使用的阳和阴转子，所述阳转子是可旋转地设置在致动空间中并且具有限定在齿之间的螺旋齿和根，并且阴转子设置在致动空间中，以与阳转子可旋转地接合并且具有限定在齿之间的螺旋齿和根。转子轮廓包括被确定为圆弧的第一曲线FG，并且在母转子的每个齿的后端处的点“G”处内接在母转子的齿顶圆中，并且由双曲线函数确定的第二曲线 r =（ε·K）/（1-epsilon.cosθ），其中1.1 <=ε= 1.15，第二曲线在点“F”处的双曲线函数的一阶导数函数等于曲线FG的函数的一阶导出函数。由于曲线E-F，所以优选最小化气孔尺寸，同时转子加工工具的压力角保持在至少8°的水平。此外，由于阳转子的适当受限的包角，转子加工工具的压力角度增加并且期望的齿强度得以保持。

2. 发明授权

US5916626A HMDS supplying apparatus 失效
标题翻译： HMDS供应装置
公开(公告)号：US5916626A
公开(公告)日：1999-06-29
申请号：US773060
申请日：1996-12-24
申请人： Yun-jeon Moon , Seong-il Kim , Jeong-suk Kim , Won-yeal Sin
发明人： Yun-jeon Moon , Seong-il Kim , Jeong-suk Kim , Won-yeal Sin
IPC分类号： G03F7/38 , C23C16/30 , C23C16/448 , C23C16/52 , H01L21/00 , H01L21/027 , H01L21/223 , C23C16/00
CPC分类号： H01L21/67253 , C23C16/30 , C23C16/4481 , C23C16/52 , H01L21/67017
摘要： An HMDS supplying apparatus capable of sensing the flow of hexamethyldisilazane through a flowmeter and to control the amount thereof which is flowing, to thereby prevent a lowering of productivity due to inadequate or excessive flow amounts. The HMDS supplying apparatus includes a carrier gas supplier for supplying a carrier gas for HMDS; a container connected to the carrier gas supplier adapted for containing HMDS therein; a flowmeter for controlling the amount of flowing HMDS supplied together with the carrier gas from the container; and an HMDS processor for depositing HMDS supplied via the flowmeter on the surface of a wafer; wherein the apparatus further includes: an indicator for indicating the level of HMDS in the flowmeter; and an optical sensing device having an optical source and an optical sensor, for controlling the flow of HMDS by sensing whether the indicator is located at an optimum position.
摘要翻译： HMDS供给装置能够通过流量计检测六甲基二硅氮烷的流动并控制其流动的量，从而防止由于流量不足或过量而导致的生产率降低。 HMDS供应装置包括用于供应用于HMDS的载气的载气供应器; 连接到适于在其中容纳HMDS的载气供应器供应器的容器; 流量计，用于控制与来自容器的载气一起供给的流动HMDS的量; 以及用于在晶片的表面上沉积经由所述流量计提供的HMDS的HMDS处理器; 其中所述装置还包括：用于指示所述流量计中的HMDS的水平的指示器; 以及具有光源和光学传感器的光学感测装置，用于通过检测指示器是否位于最佳位置来控制HMDS的流动。

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