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1. 发明授权

US06506255B2 Apparatus for supplying gas used in semiconductor processing 失效
标题翻译：用于供应用于半导体加工的气体的设备
公开(公告)号：US06506255B2
公开(公告)日：2003-01-14
申请号：US10059209
申请日：2002-01-31
申请人： Jeong-Ju Kim
发明人： Jeong-Ju Kim
IPC分类号： C23C1600
CPC分类号： C23C16/45565 , C23C16/45587 , H01J37/3244 , H01L21/67017
摘要： A method and apparatus for uniformly supplying a gas into a chamber through a dispersion head. The gas is introduced through an inlet of the dispersion head, and flows in a flow direction toward a first diffuser arranged in the dispersion head. The gas is diffused a first time within the dispersion head by dispersing the gas along side directions different than the flow direction by contacting the gas and the first diffuser. A portion of the first diffused gas is guided through an outlet of the dispersion head and toward a work piece arranged in a chamber. A remaining portion of the first diffused gas is diffused a second time by contacting the gas and a second diffuser disposed between the first diffuser and the work piece, by dispersing the gas along side directions different than the flow direction. A portion of the twice diffused gas is guided through the outlet of the dispersion head and toward the work piece arranged in the chamber.
摘要翻译：一种通过分散头将气体均匀地供应到室中的方法和装置。气体通过分散头的入口被引入，并且沿流动方向朝配置在分散头中的第一扩散器流动。通过使气体与第一扩散器接触，通过沿着与流动方向不同的侧方向分散气体，在分散头内分散气体。第一扩散气体的一部分被引导通过分散头的出口并且朝向布置在腔室中的工件。第一扩散气体的剩余部分通过使气体与设置在第一扩散器和工件之间的第二扩散器接触，通过沿着与流动方向不同的侧面方向分散气体而第二次扩散。两次扩散气体的一部分被引导通过分散头的出口并且朝向布置在腔室中的工件。

2. 发明授权

US07850872B2 Compound for molecular electronic device 有权
标题翻译：化合物用于分子电子器件
公开(公告)号：US07850872B2
公开(公告)日：2010-12-14
申请号：US11905178
申请日：2007-09-27
申请人： Gyou-Jin Cho , Jeong-Ju Kim , Eun-Jung Choi , Nam-Young Kim , Chan-Seok Park , Hoe-Taek Yang
发明人： Gyou-Jin Cho , Jeong-Ju Kim , Eun-Jung Choi , Nam-Young Kim , Chan-Seok Park , Hoe-Taek Yang
IPC分类号： H01B1/12
CPC分类号： H01L51/005 , B82Y10/00 , C07D257/02 , H01L51/0005 , H01L51/0068 , H01L51/0077 , H01L51/0591 , H01L51/0595
摘要： Disclosed are a compound which works as electronic materials such as a molecular memory, a molecular switch, a molecular rectifier, a molecular wire, and so on, and a molecular electronic device including the same. The compound for molecular electronic device has the structure of following Formula 1, (MnRM)n wherein, R is a single molecule having an electrical conductivity, M is independently a repeating unit constituting a polymer having an electrical conductivity, and n is independently an integer ranging from 100 to 500.
摘要翻译：公开了作为电子材料如分子记忆，分子开关，分子整流器，分子线等的化合物和包括其的分子电子器件。分子电子器件用化合物具有以下结构：式（1）其中，R是具有导电性的单分子，M独立地是构成聚合物的重复单元具有导电性，n独立地为100-500的整数。

3. 发明授权

US06596649B2 Method and apparatus for supplying gas used in semiconductor processing 失效
公开(公告)号：US06596649B2
公开(公告)日：2003-07-22
申请号：US10301655
申请日：2002-11-22
申请人： Jeong-Ju Kim
发明人： Jeong-Ju Kim
IPC分类号： H01L2131
CPC分类号： C23C16/45565 , C23C16/45587 , H01J37/3244 , H01L21/67017
摘要： A method and apparatus for uniformly supplying a gas into a chamber through a dispersion head. The gas is introduced through an inlet of the dispersion head, and flows in a flow direction toward a first diffuser arranged in the dispersion head. The gas is diffused a first time within the dispersion head by dispersing the gas along side directions different than the flow direction by contacting the gas and the first diffuser. A portion of the first diffused gas is guided through an outlet of the dispersion head and toward a work piece arranged in a chamber. A remaining portion of the first diffused gas is diffused a second time by contacting the gas and a second diffuser disposed between the first diffuser and the work piece, by dispersing the gas along side directions different than the flow direction. A portion of the twice diffused gas is guided through the outlet of the dispersion head and toward the work piece arranged in the chamber.

4. 发明申请

US20080087887A1 Compound for molecular electronic device 有权
标题翻译：化合物用于分子电子器件
公开(公告)号：US20080087887A1
公开(公告)日：2008-04-17
申请号：US11905178
申请日：2007-09-27
申请人： Gyou-Jin Cho , Jeong-Ju Kim , Eun-Jung Choi , Nam-Young Kim , Chan-Seok Park , Hoe-Taek Yang
发明人： Gyou-Jin Cho , Jeong-Ju Kim , Eun-Jung Choi , Nam-Young Kim , Chan-Seok Park , Hoe-Taek Yang
IPC分类号： H01L51/00 , C08G77/26
CPC分类号： H01L51/005 , B82Y10/00 , C07D257/02 , H01L51/0005 , H01L51/0068 , H01L51/0077 , H01L51/0591 , H01L51/0595
摘要： Disclosed are a compound which works as electronic materials such as a molecular memory, a molecular switch, a molecular rectifier, a molecular wire, and so on, and a molecular electronic device including the same. The compound for molecular electronic device has the structure of following Formula 1, (MnRM)n wherein, R is a single molecule having an electrical conductivity, M is independently a repeating unit constituting a polymer having an electrical conductivity, and n is independently an integer ranging from 100 to 500.
摘要翻译：公开了作为电子材料如分子记忆，分子开关，分子整流器，分子线等的化合物和包括其的分子电子器件。分子电子器件用化合物具有以下结构：式（1）其中，R是具有导电性的单分子，M独立地是构成聚合物的重复单元具有导电性，n独立地为100-500的整数。

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