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1. 发明授权

US06862096B2 Defect detection system 有权
标题翻译：缺陷检测系统
公开(公告)号：US06862096B2
公开(公告)日：2005-03-01
申请号：US10360565
申请日：2003-02-06
申请人： Mehdi Vaez-Iravani , Jeffrey Alan Rzepiela , Carl Treadwell , Andrew Zeng , Robert Fiordalice
发明人： Mehdi Vaez-Iravani , Jeffrey Alan Rzepiela , Carl Treadwell , Andrew Zeng , Robert Fiordalice
IPC分类号： G01N21/21 , G01N21/95 , G01B11/30
CPC分类号： G01N21/956 , G01N21/21 , G01N21/9501
摘要： Scattered radiation from a sample surface is collected by means of a collector that collects radiation substantially symmetrically about a line normal to the surface. The collected radiation is directed to channels at different azimuthal angles so that information related to relative azimuthal positions of the collected scattered radiation about the line is preserved. The collected radiation is converted into respective signals representative of radiation scattered at different azimuthal angles about the line. The presence and/or characteristics of anomalies are determined from the signals. Alternatively, the radiation collected by the collector may be filtered by means of a spatial filter having an annular gap of an angle related to the angular separation of expected pattern scattering. Signals obtained from the narrow and wide collection channels may be compared to distinguish between micro-scratches and particles. Forward scattered radiation may be collected from other radiation and compared to distinguish between micro-scratches and particles. Intensity of scattering is measured when the surface is illuminated sequentially by S- and P-polarized radiation and compared to distinguish between micro-scratches and particles. Representative films may be measured using profilometers or scanning probe microscopes to determine their roughness and by the above-described instruments to determine haze in order to build a database. Surface roughness of unknown films may then be determined by measuring haze values and from the database.
摘要翻译：来自样品表面的散射辐射通过收集器收集，收集器围绕垂直于表面的线基本上对称地收集辐射。收集的辐射被引导到不同方位角的通道，从而保持与线周围收集的散射辐射的相对方位位置有关的信息。所收集的辐射被转换成代表围绕线路以不同方位角散射的辐射的相应信号。异常的存在和/或特征由信号确定。或者，由集电器收集的辐射可以通过具有与预期图案散射的角度间隔相关的角度的环形间隙的空间滤光器来过滤。可以比较从狭窄和宽收集通道获得的信号，以区分微划痕和微粒。可以从其他辐射收集向前散射的辐射，并进行比较以区分微划痕和微粒。当通过S和P偏振辐射依次照射表面时，测量散射强度并进行比较以区分微划痕和微粒。可以使用轮廓仪或扫描探针显微镜来测量代表性膜以确定其粗糙度，并且可以通过上述仪器来确定雾度以构建数据库。然后可以通过测量雾度值和数据库来确定未知膜的表面粗糙度。

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