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1. 发明申请

US20130091926A1 Systems and Methods for Measuring, Monitoring and Controlling Ozone Concentration 有权
标题翻译：测量，监测和控制臭氧浓度的系统和方法
公开(公告)号：US20130091926A1
公开(公告)日：2013-04-18
申请号：US13271471
申请日：2011-10-12
申请人： ShouQian Shao , Jay DeDontney , Jason Wright
发明人： ShouQian Shao , Jay DeDontney , Jason Wright
IPC分类号： G01N25/00
CPC分类号： G01F1/74 , G01N25/18 , G01N33/0039 , Y02A50/247
摘要： Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of the total gas mixture properties, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to vacuum processing chamber, using either novel ozone sensor or existing mass flow meter or controller.
摘要翻译：基于总气体混合物性质的测量，确定臭氧和氧气混合物中的臭氧浓度的系统和方法可以使得能够在低压设置下测量臭氧浓度。使用新型臭氧传感器或现有的质量流量计或控制器，可以将臭氧浓度测定应用于真空处理室。

2. 发明授权

US08746284B2 Apparatus and method for multiple symmetrical divisional gas distribution 有权
标题翻译：多对称分布气体分布的装置和方法
公开(公告)号：US08746284B2
公开(公告)日：2014-06-10
申请号：US13105225
申请日：2011-05-11
申请人： Jay DeDontney
发明人： Jay DeDontney
IPC分类号： F16K11/20 , C23C16/455
CPC分类号： C23C16/45561 , C23C16/45519 , C23C16/4557 , C23C16/45574 , C23C16/509 , F16K27/003 , Y10T137/87885
摘要： An apparatus and method for multiple symmetrical divisional gas distribution providing a mounting plate, a plurality of manifolds coupled to the mounting plate, a center purge block coupled to the mounting plate and the plurality of manifolds, a plurality of reactant distribution blocks, wherein each reactant distribution block is stacked atop each other to form a reactant distribution block stack, wherein the reactant distribution block stack sits atop the center purge block, a coupling mechanism to secure the plurality of reactant distribution blocks of the reactant distribution block stack together; and a top cap coupled to the reactant distribution block stack and the coupling mechanism.
摘要翻译：一种用于多对称分隔气体分配的装置和方法，提供安装板，联接到安装板的多个歧管，联接到安装板和多个歧管的中心吹扫块，多个反应物分配块，其中每个反应物分配块彼此层叠以形成反应物分配块堆叠，其中反应物分配块堆叠位于中心吹扫块顶部，耦合机构将反应物分配块堆叠的多个反应物分配块固定在一起; 以及联接到反应物分配块堆叠和联接机构的顶盖。

3. 发明申请

US20050109460A1 Adjustable gas distribution system 审中-公开
标题翻译：可调气体分配系统
公开(公告)号：US20050109460A1
公开(公告)日：2005-05-26
申请号：US10856584
申请日：2004-05-27
申请人： Jay DeDontney , Jack Yao
发明人： Jay DeDontney , Jack Yao
IPC分类号： C23C16/00 , C23C16/455 , C23F1/00 , H01L20060101 , H01L21/306
CPC分类号： C23C16/45565 , C23C16/45574
摘要： The present invention provides a gas distribution apparatus comprising a plurality of outlets and at least one replaceable insert placed in at least one of the outlets. The insert is provided with a passageway adapted to alter the size of the at least one of the outlets and/or the direction of gases exiting the at least one of the outlets. The insert is provided with passageway that may be substantial straight and cylindrical. The passageway may have a first portion with a smaller diameter and a second portion with a larger diameter to selectively alter the size of the outlet passage in the gas distribution apparatus. Alternatively, the insert is provided with a main passageway and plurality of secondary passageways branched and angled from the main passageway. The angle between the main and branch passageways is in the range from about 10 to about 90 degrees. In one embodiment, the angle between the main and branch passageways is about 90 degrees.
摘要翻译：本发明提供了一种气体分配装置，其包括多个出口和至少一个可更换的插入件，其放置在至少一个出口中。该插入件具有适于改变至少一个出口的尺寸和/或离开该至少一个出口的气体的方向的通道。插入件设置有可以是基本上直的和圆柱形的通道。通道可以具有较小直径的第一部分和具有较大直径的第二部分，以选择性地改变气体分配设备中出口通道的尺寸。替代地，插入件设置有主通道和从主通道分支和成角度的多个次通道。主通道和分支通道之间的角度在约10度至约90度的范围内。在一个实施例中，主通道和分支通道之间的角度为大约90度。

4. 发明授权

US08925481B2 Systems and methods for measuring, monitoring and controlling ozone concentration 有权
标题翻译：用于测量，监测和控制臭氧浓度的系统和方法
公开(公告)号：US08925481B2
公开(公告)日：2015-01-06
申请号：US13271449
申请日：2011-10-12
申请人： ShouQian Shao , Jay DeDontney , Jason Wright
发明人： ShouQian Shao , Jay DeDontney , Jason Wright
IPC分类号： B05C11/10 , G01N7/00 , C23C16/52 , C23C16/455
CPC分类号： C23C16/52 , C23C16/45512 , C23C16/45557 , G01N7/00 , Y10T137/0402
摘要： Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of a total mass flow and a corresponding change in a chamber pressure accepting the mixture flow, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to a vacuum processing chamber, enabling precision semiconductor processing.
摘要翻译：基于总质量流量的测量和接受混合物流动的室压力的相应变化来确定臭氧和氧气的混合物中的臭氧浓度的系统和方法可以使得能够在低压设置下测量臭氧浓度。可以将臭氧浓度测定应用于真空处理室，从而实现精密的半导体处理。

5. 发明授权

US08851010B2 Systems and methods for measuring, monitoring and controlling ozone concentration 有权
标题翻译：用于测量，监测和控制臭氧浓度的系统和方法
公开(公告)号：US08851010B2
公开(公告)日：2014-10-07
申请号：US13271471
申请日：2011-10-12
申请人： ShouQian Shao , Jay DeDontney , Jason Wright
发明人： ShouQian Shao , Jay DeDontney , Jason Wright
IPC分类号： G01F1/76 , G01N25/20 , G01N33/00 , G01F1/74 , G01N25/18 , B05C11/06
CPC分类号： G01F1/74 , G01N25/18 , G01N33/0039 , Y02A50/247
摘要： Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of the total gas mixture properties, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to vacuum processing chamber, using either novel ozone sensor or existing mass flow meter or controller.
摘要翻译：基于总气体混合物性质的测量，确定臭氧和氧气混合物中的臭氧浓度的系统和方法可以使得能够在低压设置下测量臭氧浓度。使用新型臭氧传感器或现有的质量流量计或控制器，可以将臭氧浓度测定应用于真空处理室。

6. 发明授权

US08216376B1 Method and apparatus for variable conductance 有权
标题翻译：可变电导的方法和装置
公开(公告)号：US08216376B1
公开(公告)日：2012-07-10
申请号：US12354679
申请日：2009-01-15
申请人： Rick Endo , Jay Dedontney , James Tsung
发明人： Rick Endo , Jay Dedontney , James Tsung
IPC分类号： C23C16/455 , C23C16/458 , C23F1/00 , H01L21/306 , C23C16/22 , C23C16/06
CPC分类号： H01L21/6719 , C23C16/45591
摘要： A method of combinatorially processing a substrate and combinatorial processing chamber are provided. The processing chamber includes opposing annular rings defining a conductance gap that extends radially outward. The opposing annular rings are configured to vary the conductance gap in-situ. The variation of the conductance gap is another parameter for processing regions of a substrate differently to evaluate the impact of the conductance variation on a deposition process.
摘要翻译：提供了组合处理基板和组合处理室的方法。处理室包括限定径向向外延伸的导电间隙的相对环形环。相对的环形环被配置成原位改变导电间隙。导电间隙的变化是用于不同地处理衬底区域的另一参数，以评估电导变化对沉积工艺的影响。

7. 发明申请

US20050217580A1 Gas distribution system 审中-公开
标题翻译：燃气分配系统
公开(公告)号：US20050217580A1
公开(公告)日：2005-10-06
申请号：US11142087
申请日：2005-05-31
申请人： Jay DeDontney , Jack Yao
发明人： Jay DeDontney , Jack Yao
IPC分类号： C23C16/00 , C23C16/455 , C23F1/00 , H01L20060101 , H01L21/306
CPC分类号： C23C16/45565 , C23C16/45574
摘要： The present invention provides a gas distribution apparatus useful in semiconductor manufacturing. The gas distribution apparatus comprises a unitary member and a gas distribution network formed within the unitary member for uniformly delivering a gas into a process region. The gas distribution network is formed of an inlet passage extending upwardly through the upper surface of the unitary member for connecting to a gas source, a plurality of first passages converged at a junction and connected with the inlet passage at the junction, a plurality of second passages connected with the plurality of first passages, and a plurality of outlet passages connected with the plurality of second passages for delivering the gas into a processing region. The first passages extend radially and outwardly from the junction to the periphery surface of the unitary member, and the second passages are non-perpendicular to the first passages and extend outwardly from the first passages to the periphery surface. The outlet passages extend downwardly through the lower surface of the unitary member for delivering the gas into the processing region.
摘要翻译：本发明提供一种可用于半导体制造的气体分配装置。气体分配装置包括整体构件和形成在整体构件内用于将气体均匀地输送到处理区域中的气体分配网络。气体分配网络由向上延伸穿过整体构件的上表面的入口通道形成，用于连接到气体源，多个第一通道汇合在结点处并与接合处的入口通道连接，多个第二通道与多个第一通道连接的通道，以及与多个第二通道连接的多个出口通道，用于将气体输送到处理区域。所述第一通道从所述连接件的所述连接部向所述整体构件的周向表面径向向外延伸，并且所述第二通道与所述第一通道非垂直并且从所述第一通道向外延伸到所述周边表面。出口通道向下延伸穿过整体构件的下表面，用于将气体输送到处理区域中。

8. 发明授权

US08486821B1 Method and apparatus for variable conductance 失效
标题翻译：可变电导的方法和装置
公开(公告)号：US08486821B1
公开(公告)日：2013-07-16
申请号：US13489312
申请日：2012-06-05
申请人： Rick Endo , Jay Dedontney , James Tsung
发明人： Rick Endo , Jay Dedontney , James Tsung
IPC分类号： H01L21/44
CPC分类号： C23C16/45544 , B01J2219/00436 , B01J2219/00756 , C23C16/04 , C23C16/45589
摘要： A method of combinatorially processing a substrate and combinatorial processing chamber are provided. The processing chamber includes opposing annular rings defining a conductance gap that extends radially outward. The opposing annular rings are configured to vary the conductance gap in-situ. The variation of the conductance gap is another parameter for processing regions of a substrate differently to evaluate the impact of the conductance variation on a deposition process.
摘要翻译：提供了组合处理基板和组合处理室的方法。处理室包括限定径向向外延伸的导电间隙的相对环形环。相对的环形环被配置成原位改变导电间隙。导电间隙的变化是用于不同地处理衬底区域的另一参数，以评估电导变化对沉积工艺的影响。

9. 发明申请

US20130092084A1 Systems and Methods for Measuring, Monitoring and Controlling Ozone Concentration 有权
标题翻译：测量，监测和控制臭氧浓度的系统和方法
公开(公告)号：US20130092084A1
公开(公告)日：2013-04-18
申请号：US13271449
申请日：2011-10-12
申请人： ShouQian Shao , Jay DeDontney , Jason Wright
发明人： ShouQian Shao , Jay DeDontney , Jason Wright
IPC分类号： G01N7/00 , C23C16/52 , B23P11/00 , C23C16/455
CPC分类号： C23C16/52 , C23C16/45512 , C23C16/45557 , G01N7/00 , Y10T137/0402
摘要： Systems and methods to determine ozone concentration in a gas mixture of ozone and oxygen, based on measurements of a total mass flow and a corresponding change in a chamber pressure accepting the mixture flow, can enable the measurements of ozone concentration at low pressure settings. The ozone concentration determination can be applied to a vacuum processing chamber, enabling precision semiconductor processing.
摘要翻译：基于总质量流量的测量和接受混合物流动的室压力的相应变化来确定臭氧和氧气的混合物中的臭氧浓度的系统和方法可以使得能够在低压设置下测量臭氧浓度。可以将臭氧浓度测定应用于真空处理室，从而实现精密的半导体处理。

10. 发明申请

US20120289057A1 APPARATUS AND METHOD FOR MULTIPLE SYMMETRICAL DIVISIONAL GAS DISTRIBUTION 有权
标题翻译：多种对称分配气体分布的装置和方法
公开(公告)号：US20120289057A1
公开(公告)日：2012-11-15
申请号：US13105225
申请日：2011-05-11
申请人： Jay DeDontney
发明人： Jay DeDontney
IPC分类号： H01L21/30 , C23C16/52 , H01L21/00 , C23C16/455
CPC分类号： C23C16/45561 , C23C16/45519 , C23C16/4557 , C23C16/45574 , C23C16/509 , F16K27/003 , Y10T137/87885
摘要： An apparatus and method for multiple symmetrical divisional gas distribution providing a mounting plate, a plurality of manifolds coupled to the mounting plate, a center purge block coupled to the mounting plate and the plurality of manifolds, a plurality of reactant distribution blocks, wherein each reactant distribution block is stacked atop each other to form a reactant distribution block stack, wherein the reactant distribution block stack sits atop the center purge block, a coupling mechanism to secure the plurality of reactant distribution blocks of the reactant distribution block stack together; and a top cap coupled to the reactant distribution block stack and the coupling mechanism.
摘要翻译：一种用于多对称分隔气体分配的装置和方法，提供安装板，联接到安装板的多个歧管，联接到安装板和多个歧管的中心吹扫块，多个反应物分配块，其中每个反应物分配块彼此层叠以形成反应物分配块堆叠，其中反应物分配块堆叠位于中央吹扫块顶部，耦合机构将反应物分配块堆叠的多个反应物分配块固定在一起; 以及联接到反应物分配块堆叠和联接机构的顶盖。

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