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1. 发明授权

US07955883B2 Polymer replicated interdigitated electrode array for (bio) sensing applications 有权
标题翻译：用于（生物）感测应用的聚合物复制交叉电极阵列
公开(公告)号：US07955883B2
公开(公告)日：2011-06-07
申请号：US12089528
申请日：2006-09-06
申请人： Wim Laureyn , Jan Suls , Paul Jacobs
发明人： Wim Laureyn , Jan Suls , Paul Jacobs
IPC分类号： H01L21/00 , H01L21/66
CPC分类号： C12Q1/001 , G01N27/021 , G01N33/5438 , Y10T29/49 , Y10T29/49002 , Y10T29/49155
摘要： Interdigitated electrode arrays are very promising devices for multi-parameter (bio)sensing, for example the label-free detection of nucleic acid hybridization for diagnostic applications. The current disclosure provides an innovative method for the affordable manufacturing of polymer-based arrays of interdigitated electrodes with μm-dimensions. The method is based on a combination of an appropriate three-dimensional structure and a single and directional deposition of conductive material. The three-dimensional structure can be realized in a polymer material using a molding step, for which the molds are manufactured by electroplating as a reverse copy of a silicon master structure. In order to ensure sufficient electrical isolation and individual, but convenient, accessibility of the sensors in the array, the interdigitated electrode regions need to be complemented with specific features on the three-dimensional structure. Combined with the use of e.g. shadow masks in the deposition step, these features allow for the site-specific deposition of the conductive material. The technology described has the additional advantage to integrate highly miniaturized and arrayed electronics elements into polymer micro-fluidics technology, which leads to the affordable manufacturing of (bio)sensor arrays.
摘要翻译：交叉电极阵列是用于多参数（生物）感测的非常有希望的装置，例如用于诊断应用的无标记检测核酸杂交。本公开提供了一种创新的方法，用于负担得起的制造具有μm尺寸的交叉指状电极的基于聚合物的阵列。该方法基于合适的三维结构和导电材料的单次和定向沉积的组合。三维结构可以使用成型步骤在聚合物材料中实现，其中通过电镀制造模具作为硅主体结构的反向拷贝。为了确保阵列中传感器的足够的电气隔离和单独但方便的可访问性，交叉电极区域需要与三维结构上的特定特征相辅相成。结合使用例如在沉积步骤中的阴影掩模，这些特征允许导电材料的位置特异性沉积。所描述的技术具有将高度小型化和排列的电子元件集成到聚合物微流体技术中的额外优点，这导致（bio）传感器阵列的负担得起的制造。

2. 发明申请

US20110201098A1 Polymer Replicated Interdigitated Electrode Array for Bio(Sensing) Applications 审中-公开
标题翻译：用于生物（感应）应用的聚合物复制叉指电极阵列
公开(公告)号：US20110201098A1
公开(公告)日：2011-08-18
申请号：US13094635
申请日：2011-04-26
申请人： Wim Laureyn , Jan Suls , Paul Jacobs
发明人： Wim Laureyn , Jan Suls , Paul Jacobs
IPC分类号： C12M1/34 , G01N27/00 , G01R1/06
CPC分类号： C12Q1/001 , G01N27/021 , G01N33/5438 , Y10T29/49 , Y10T29/49002 , Y10T29/49155
摘要： A sensor is disclosed. In one embodiment, the sensor includes an insulating substrate comprising a first zone, a second zone, and an intermediate zone, where the intermediate zone comprises a portion of the second zone that overlaps the first zone. The sensor further comprises a first electrode in the first zone that comprises a first plurality of fingers of a conductive material, a second electrode in the second zone that comprises a second plurality of fingers of the conductive material that are interdigitated with the first plurality of fingers, a plurality of three-dimensional isolation structures, and a plurality of shadow zones, wherein each shadow zone is adjacent to at least one isolation structure and is substantially free of conductive material. The plurality of isolation structures may comprises hills and/or channels.
摘要翻译：公开了一种传感器。在一个实施例中，传感器包括包括第一区域，第二区域和中间区域的绝缘基板，其中中间区域包括与第一区域重叠的第二区域的一部分。传感器还包括第一区域中的第一电极，其包括导电材料的第一多个指状物，第二区域中的第二电极，其包括导电材料的第二多个指状物，其与第一多个手指相互交叉，多个三维隔离结构和多个阴影区，其中每个阴影区域与至少一个隔离结构相邻并且基本上不含导电材料。多个隔离结构可以包括山丘和/或通道。

3. 发明申请

US20090221446A1 Polymer Replicated Interdigitated Electrode Array for (Bio) Sensing Applications 有权
标题翻译：用于（生物）感应应用的聚合物复制叉指电极阵列
公开(公告)号：US20090221446A1
公开(公告)日：2009-09-03
申请号：US12089528
申请日：2006-09-06
申请人： Wim Laureyn , Jan Suls , Paul Jacobs
发明人： Wim Laureyn , Jan Suls , Paul Jacobs
IPC分类号： C40B40/08 , G01N27/00 , H05K3/16 , C40B40/06 , C40B40/10
CPC分类号： C12Q1/001 , G01N27/021 , G01N33/5438 , Y10T29/49 , Y10T29/49002 , Y10T29/49155
摘要： Interdigitated electrode arrays are very promising devices for multi-parameter (bio)sensing, for example the label-free detection of nucleic acid hybridisation for diagnostic applications. The current disclosure provides an innovative method for the affordable manufacturing of polymer-based arrays of interdigitated electrodes with μm-dimensions. The method is based on a combination of an appropriate three-dimensional structure and a single and directional deposition of conductive material. The three-dimensional structure can be realized in a polymer material using a moulding step, for which the moulds are manufactured by electroplating as a reverse copy of a silicon master structure. In order to ensure sufficient electrical isolation and individual, but convenient, accessibility of the sensors in the array, the interdigitated electrode regions need to be complemented with specific features on the three-dimensional structure. Combined with the use of e.g. shadow masks in the deposition step, these features allow for the site-specific deposition of the conductive material. The technology described has the additional advantage to integrate highly miniaturized and arrayed electronics elements into polymer micro-fluidics technology, which leads to the affordable manufacturing of (bio)sensor arrays.
摘要翻译：交叉电极阵列是用于多参数（生物）感测的非常有希望的装置，例如用于诊断应用的无标记检测核酸杂交。本公开提供了一种创新的方法，用于可负担地制造具有母体尺寸的交错电极的基于聚合物的阵列。该方法基于合适的三维结构和导电材料的单次和定向沉积的组合。三维结构可以使用成型步骤在聚合物材料中实现，其中通过电镀制造模具作为硅主体结构的反向拷贝。为了确保阵列中传感器的足够的电气隔离和单独但方便的可访问性，交叉电极区域需要与三维结构上的特定特征相辅相成。结合使用例如在沉积步骤中的阴影掩模，这些特征允许导电材料的位置特异性沉积。所描述的技术具有将高度小型化和排列的电子元件集成到聚合物微流体技术中的额外优点，这导致（bio）传感器阵列的负担得起的制造。

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