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1. 发明授权

US07729049B2 3-d optical microscope 有权
标题翻译： 3-d光学显微镜
公开(公告)号：US07729049B2
公开(公告)日：2010-06-01
申请号：US11754282
申请日：2007-05-26
申请人： James Jianguo Xu , Ken Kinsun Lee
发明人： James Jianguo Xu , Ken Kinsun Lee
IPC分类号： G02B21/00
CPC分类号： G02B21/367 , G02B21/06 , H04N13/207 , H04N13/254
摘要： A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.
摘要翻译：将3-D光学显微镜，将常规光学显微镜转换为3-D光学显微镜的方法以及在光学显微镜上产生3-D图像的方法进行描述。 3-D光学显微镜包括处理器，至少一个物镜，能够获取样品的图像的光学传感器，用于调节样品相对于物镜的焦点位置的机构，以及用于照亮样品的机构并且用于将图案投影到物镜的焦平面上并从物镜的焦平面移除图案。 3-D图像创建方法包括在没有投影图案的情况下拍摄两组图像，并且使用软件算法来分析两个图像集以生成样本的3-D图像。 3-D图像创建方法能够对几乎任何样品进行可靠和准确的3-D成像，而不管其图像对比度如何。

2. 发明授权

US10048480B2 3D microscope including insertable components to provide multiple imaging and measurement capabilities 有权
公开(公告)号：US10048480B2
公开(公告)日：2018-08-14
申请号：US13333938
申请日：2011-12-21
申请人： James Jianguo Xu , Ken Kinsun Lee , Rusmin Kudinar , Ronny Soetarman , Hung Phi Nguyen , Zhen Hou
发明人： James Jianguo Xu , Ken Kinsun Lee , Rusmin Kudinar , Ronny Soetarman , Hung Phi Nguyen , Zhen Hou
IPC分类号： H04N7/18 , G02B21/06 , G02B21/00 , G02B21/36
摘要： A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).

3. 发明授权

US08976366B2 System and method for monitoring LED chip surface roughening process 有权
标题翻译： LED芯片表面粗糙化处理系统及方法
公开(公告)号：US08976366B2
公开(公告)日：2015-03-10
申请号：US13494949
申请日：2012-06-12
申请人： James Jianguo Xu , Ken Kinsun Lee , Rusmin Kudinar , Ronny Soetarman , Hung Phi Nguyen , Zhen Hou
发明人： James Jianguo Xu , Ken Kinsun Lee , Rusmin Kudinar , Ronny Soetarman , Hung Phi Nguyen , Zhen Hou
IPC分类号： G01B11/30 , G01J3/28 , G02B21/00 , G01J3/02 , G01N21/27 , G01N21/55
CPC分类号： G01J3/2823 , G01J3/0208 , G01J3/0218 , G01N21/274 , G01N21/55 , G02B21/0092
摘要： A measurement system for monitoring an LED chip surface roughening process is described. A reflective illuminator can run reflectance measurements. A vertical positioning means can adjust a distance between an objective lens and an industrial sample. A horizontal positioning means can move objects in XY plane, and is specifically configured to hold the industrial sample and a reference sample. An optical sensor can acquire images of the industrial sample. A spectrometer can acquire reflectance spectrums of the industrial sample and the reference sample. A processor can control these components. The processor can perform deskew, and calculate an average reflectance and an oscillation amplitude from the reflectance spectrums of the industrial sample.
摘要翻译：描述了一种用于监测LED芯片表面粗糙化工艺的测量系统。反射照明器可以进行反射测量。垂直定位装置可以调节物镜和工业样品之间的距离。水平定位装置可以在XY平面中移动物体，并且被特别地配置成保持工业样品和参考样品。光学传感器可以获取工业样品的图像。光谱仪可以获得工业样品和参考样品的反射光谱。处理器可以控制这些组件。处理器可以进行偏斜校正，并从工业样品的反射光谱计算平均反射率和振荡幅度。

4. 发明申请

US20120051660A1 Multi-Surface Optical 3D Microscope 有权
标题翻译：多表面光学3D显微镜
公开(公告)号：US20120051660A1
公开(公告)日：2012-03-01
申请号：US13220595
申请日：2011-08-29
申请人： Ken Kinsun Lee , Ronny Soetarman , Zhen Hou , James Jianguo Xu , Rusmin Kudinar , Vamsi Mohan Velidandia , Ben Garland
发明人： Ken Kinsun Lee , Ronny Soetarman , Zhen Hou , James Jianguo Xu , Rusmin Kudinar , Vamsi Mohan Velidandia , Ben Garland
IPC分类号： G06K9/40 , G06T11/20
CPC分类号： G02B21/365 , G02B21/0016 , G02B21/367 , G06K9/46 , G06T5/00 , G06T7/40 , G06T2207/10056 , H04N5/357
摘要： A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.
摘要翻译：检测物体的多面的方法包括提供能够检测物体表面的成像系统。在设置系统参数后，可以获取多个Z步骤的对象的二维图像。然后可以使用两个步骤提取对象的每个表面。在第一步骤中，可以基于置信阈值构建表面。在第二步中，可以使用内插滤波器来增强表面。

5. 发明授权

US09389408B2 3D microscope and methods of measuring patterned substrates 有权
标题翻译： 3D显微镜和测量图案基板的方法
公开(公告)号：US09389408B2
公开(公告)日：2016-07-12
申请号：US13172686
申请日：2011-06-29
申请人： Zhen Hou , James Jianguo Xu , Ken Kinsun Lee , James Nelson Stainton , Hung Phi Nguyen , Rusmin Kudinar , Ronny Soetarman
发明人： Zhen Hou , James Jianguo Xu , Ken Kinsun Lee , James Nelson Stainton , Hung Phi Nguyen , Rusmin Kudinar , Ronny Soetarman
IPC分类号： H04N13/02 , G02B21/36 , G01N21/956
CPC分类号： G02B21/006 , G01N21/9501 , G01N21/956 , G01N2021/0168 , G02B21/0016 , G02B21/0028 , G02B21/0032 , G02B21/367 , G06T7/60 , G06T2207/10056 , G06T2207/10152 , G06T2207/20068 , G06T2207/30148
摘要： A three-dimensional (3D) microscope for patterned substrate measurement can include an objective lens, a reflected illuminator, a transmitted illuminator, a focusing adjustment device, an optical sensor, and a processor. The focusing adjustment device can automatically adjust the objective lens focus at a plurality of Z steps. The optical sensor can be capable of acquiring images at each of these Z steps. The processor can control the reflected illuminator, the transmitted illuminator, the focusing adjustment device, and the optical sensor. The processor can be configured to capture first and second images at multiple Z steps, the first image with the pattern using the reflected illuminator and the second image without the pattern using one of the reflected illuminator and the transmitted illuminator.
摘要翻译：用于图案化衬底测量的三维（3D）显微镜可以包括物镜，反射照明器，透射照明器，聚焦调节装置，光学传感器和处理器。聚焦调节装置可以在多个Z步骤自动调节物镜焦点。光学传感器能够在这些Z步骤的每个步骤中获取图像。处理器可以控制反射照明器，透射照明器，聚焦调节装置和光学传感器。处理器可以被配置成以多个Z步骤捕获第一和第二图像，第一图像使用反射照明器的图案，而不使用反射照明器和透射照明器之一的图案的第二图像。

6. 发明申请

US20120176475A1 3D Microscope Including Insertable Components To Provide Multiple Imaging And Measurement Capabilities 审中-公开
标题翻译：包括可插入组件的3D显微镜，以提供多种成像和测量能力
公开(公告)号：US20120176475A1
公开(公告)日：2012-07-12
申请号：US13333938
申请日：2011-12-21
申请人： James Jianguo Xu , Ken Kinsun Lee , Rusmin Kudinar , Ronny Soetarman , Hung Phi Nguyen , Zhen Hou
发明人： James Jianguo Xu , Ken Kinsun Lee , Rusmin Kudinar , Ronny Soetarman , Hung Phi Nguyen , Zhen Hou
IPC分类号： H04N13/02 , G02B21/06
CPC分类号： G02B21/06 , G02B21/0092 , G02B21/367
摘要： A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).
摘要翻译：三维（3D）显微镜包括各种可插入的部件，便于多个成像和测量功能。这些功能包括Nomarski成像，偏振光成像，定量微分干涉对比度（q-DIC）成像，电动偏振光成像，移相干涉测量（PSI）和垂直扫描干涉测量（VSI）。

7. 发明授权

US08174762B2 3-D optical microscope 有权
标题翻译： 3-D光学显微镜
公开(公告)号：US08174762B2
公开(公告)日：2012-05-08
申请号：US12699824
申请日：2010-02-03
申请人： James Jianguo Xu , Ken Kinsun Lee
发明人： James Jianguo Xu , Ken Kinsun Lee
IPC分类号： G02B21/00
CPC分类号： G02B21/367 , G02B21/06 , H04N13/207 , H04N13/254
摘要： A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.
摘要翻译：将3-D光学显微镜，将常规光学显微镜转换为3-D光学显微镜的方法以及在光学显微镜上产生3-D图像的方法进行描述。 3-D光学显微镜包括处理器，至少一个物镜，能够获取样品的图像的光学传感器，用于调节样品相对于物镜的焦点位置的机构，以及用于照亮样品的机构并且用于将图案投影到物镜的焦平面上并从物镜的焦平面移除图案。 3-D图像创建方法包括在没有投影图案的情况下拍摄两组图像，并且使用软件算法来分析两个图像集以生成样本的3-D图像。 3-D图像创建方法能够对几乎任何样品进行可靠和准确的3-D成像，而不管其图像对比度如何。

8. 发明申请

US20100134595A1 3-D Optical Microscope 有权
公开(公告)号：US20100134595A1
公开(公告)日：2010-06-03
申请号：US12699821
申请日：2010-02-03
申请人： James Jianguo Xu , Ken Kinsun Lee
发明人： James Jianguo Xu , Ken Kinsun Lee
IPC分类号： H04N13/02
CPC分类号： G02B21/367 , G02B21/06 , H04N13/207 , H04N13/254
摘要： A 3-D optical microscope, a method of turning a conventional optical microscope into a 3-D optical microscope, and a method of creating a 3-D image on an optical microscope are described. The 3-D optical microscope includes a processor, at least one objective lens, an optical sensor capable of acquiring an image of a sample, a mechanism for adjusting focus position of the sample relative to the objective lens, and a mechanism for illuminating the sample and for projecting a pattern onto and removing the pattern from the focal plane of the objective lens. The 3-D image creation method includes taking two sets of images, one with and another without the presence of the projected pattern, and using a software algorithm to analyze the two image sets to generating a 3-D image of the sample. The 3-D image creation method enables reliable and accurate 3-D imaging on almost any sample regardless of its image contrast.

9. 发明申请

US20080291533A1 ILLUMINATOR FOR A 3-D OPTICAL MICROSCOPE 有权
标题翻译：三维光学显微镜的照明器
公开(公告)号：US20080291533A1
公开(公告)日：2008-11-27
申请号：US12147478
申请日：2008-06-27
申请人： James Jianguo Xu , Ken Kinsun Lee
发明人： James Jianguo Xu , Ken Kinsun Lee
IPC分类号： G02B21/06
CPC分类号： G02B21/367 , G02B21/06
摘要： A compact and low cost microscope illuminator capable of generating 3-D optical images includes a first light source and a second light source. The two light sources lead two optical paths: one to illuminate a sample and another to project a pattern onto the focal plane of a microscope objective lens. The two light sources are controlled by a processor and can be turned on and off rapidly. A 3-D optical microscope equipped with said microscope illuminator and a method of creating a 3-D image on said 3-D optical microscope are also described.
摘要翻译：能够产生3-D光学图像的紧凑且低成本的显微镜照明器包括第一光源和第二光源。两个光源引出两个光路：一个照亮样品，另一个用于将图案投影到显微镜物镜的焦平面上。两个光源由处理器控制，并可快速打开和关闭。还描述了配备有所述显微照明器的3-D光学显微镜和在所述3-D光学显微镜上产生3-D图像的方法。

10. 发明授权

US09036869B2 Multi-surface optical 3D microscope 有权
标题翻译：多面光学3D显微镜
公开(公告)号：US09036869B2
公开(公告)日：2015-05-19
申请号：US13220595
申请日：2011-08-29
申请人： Ken Kinsun Lee , Ronny Soetarman , Zhen Hou , James Jianguo Xu , Rusmin Kudinar , Vamsi Mohan Velidandla , Ben Garland
发明人： Ken Kinsun Lee , Ronny Soetarman , Zhen Hou , James Jianguo Xu , Rusmin Kudinar , Vamsi Mohan Velidandla , Ben Garland
IPC分类号： G06K9/00 , G02B21/00 , G02B21/36
CPC分类号： G02B21/365 , G02B21/0016 , G02B21/367 , G06K9/46 , G06T5/00 , G06T7/40 , G06T2207/10056 , H04N5/357
摘要： A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.
摘要翻译：检测物体的多面的方法包括提供能够检测物体表面的成像系统。在设置系统参数后，可以获取多个Z步骤的对象的二维图像。然后可以使用两个步骤提取对象的每个表面。在第一步骤中，可以基于置信阈值构建表面。在第二步中，可以使用内插滤波器来增强表面。

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