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1. 发明申请

WO2018043976A1 SUBSTRATE PROCESSING APPARATUS 审中-公开
标题翻译：基板处理装置
公开(公告)号：WO2018043976A1
公开(公告)日：2018-03-08
申请号：PCT/KR2017/009107
申请日：2017-08-22
申请人： JUSUNG ENGINEERING CO., LTD.
发明人： SHIN, Seung Chul , YOO, Jin Hyuk , LEE, Min Su , CHOI, Dong Hwan
IPC分类号： H01L21/027 , H01L21/687 , H01L21/683
摘要： A substrate processing apparatus may include a first disk provided in a chamber and configured to perform a turning motion and to include a plurality of seating holes periodically arranged within a specific radius from a center axis, a plurality of second disks provided in the seating holes, respectively, and configured to perform a revolving and rotating motion in accordance with the turning motion of the first disk, a first rotary connector structure provided between the second disk and the seating hole to allow for a rotating motion of and for an electric connection to the second disk, an electrostatic chuck provided on the second disk and configured to hold a substrate using an electric power supplied through the first rotary connector structure, and a first magnetic gear fixed to the second disk and configured to exert a torque on the second disk, and a second magnetic gear provided in the chamber to be interact with the first magnetic gear but prevented from turning.
摘要翻译：衬底处理设备可以包括：第一盘，其设置在腔室中并且被配置为执行转动运动并且包括多个从中心轴线以特定半径周期性地布置的座孔;多个第二盘，所述第二盘分别设置在所述座孔中，并且构造成根据所述第一盘的转动运动进行旋转和旋转运动;第一旋转连接器结构，设置在所述第二盘和所述座孔之间以允许旋转运动用于与所述第二盘片电连接;静电卡盘，其设置在所述第二盘片上并且被配置为利用通过所述第一旋转连接器结构提供的电力来保持衬底;以及第一磁齿轮，其被固定到所述第二盘片并且被配置为在第二盘上施加扭矩，并且设置在腔室中的第二磁齿轮与第一磁齿轮相互作用但防止转动

2. 发明申请

WO2009082142A2 THIN FILM TYPE SOLAR CELL AND METHOD FOR MANUFACTURING THE SAME 审中-公开
标题翻译：薄膜型太阳能电池及其制造方法
公开(公告)号：WO2009082142A2
公开(公告)日：2009-07-02
申请号：PCT/KR2008/007561
申请日：2008-12-19
申请人： JUSUNG ENGINEERING CO., LTD. , LEE, Ki Se
发明人： LEE, Ki Se
IPC分类号： H01L31/042
CPC分类号： H01L31/02168 , H01L31/022466 , H01L31/03921 , H01L31/075 , H01L31/1884 , Y02E10/548
摘要： A thin film type solar cell and a method for manufacturing the same is disclosed, which the thin film type solar cell comprises a front electrode, a semiconductor layer, and a rear electrode sequentially deposited on a substrate; and a buffer layer between the substrate and the front electrode so as to enhance an adhesive strength between the substrate and the front electrode, and to improve transmittance of solar ray incident through the substrate.
摘要翻译：公开了一种薄膜型太阳能电池及其制造方法，其中薄膜型太阳能电池包括依次沉积在基板上的前电极，半导体层和后电极; 以及基板和前电极之间的缓冲层，以提高基板和前电极之间的粘合强度，并提高通过基板入射的太阳光线的透射率。

3. 发明申请

WO2009082137A2 THIN FILM TYPE SOLAR CELL AND METHOD FOR MANUFACTURING THE SAME 审中-公开
标题翻译：薄膜型太阳能电池及其制造方法
公开(公告)号：WO2009082137A2
公开(公告)日：2009-07-02
申请号：PCT/KR2008/007554
申请日：2008-12-19
申请人： JUSUNG ENGINEERING Co., Ltd. , HONG, Jin , YANG, Chang Sil , KWON, Gi Chung
发明人： HONG, Jin , YANG, Chang Sil , KWON, Gi Chung
IPC分类号： H01L31/042
CPC分类号： H01L31/0236 , H01L31/02366 , H01L31/046 , Y02E10/50
摘要： A thin film type solar cell and a method for manufacturing the same is disclosed, which is capable of improving solar-ray transmittance and dispersion efficiency by the increased effective area for absorbing the solar ray through the use of substrate with a predetermined pattern having protrusions and depressions, wherein the method comprises preparing a substrate with a predetermined pattern having protrusions and depressions on its one surface; forming a front electrode on the substrate; forming a semiconductor layer on the front electrode; and forming a rear electrode on the semiconductor layer.
摘要翻译：公开了一种薄膜型太阳能电池及其制造方法，其能够通过使用具有突起的预定图案的基板的使用来增加用于吸收太阳光线的有效面积来提高太阳光线透射率和分散效率，凹陷，其中所述方法包括在其一个表面上制备具有突起和凹陷的预定图案的基底; 在所述基板上形成前电极; 在前电极上形成半导体层; 以及在所述半导体层上形成后电极。

4. 发明申请

WO2009020349A3 METHOD FOR MANUFACTURING THIN FILM TYPE SOLAR CELL, AND THIN FILM TYPE SOLAR CELL MADE BY THE METHOD 审中-公开
公开(公告)号：WO2009020349A3
公开(公告)日：2009-02-12
申请号：PCT/KR2008/004573
申请日：2008-08-06
申请人： JUSUNG ENGINEERING Co., Ltd. , KIM, Jae Ho , HONG, Jin , YANG, Chang-Sil
发明人： KIM, Jae Ho , HONG, Jin , YANG, Chang-Sil
IPC分类号： H01L31/04
摘要： A method for manufacturing a thin film type solar cell and a thin film type solar cell manufactured by the method is disclosed. The method is comprised of a first process for forming a plurality of unit front electrode patterns at predetermined intervals on a substrate; a second process for forming a semiconductor layer pattern on the substrate, wherein the semiconductor layer pattern is comprised of a separating part to divide the solar cell into unit cells, and a contact part to connect the electrode patterns electrically; and a third process for forming a plurality of unit rear electrode patterns which are respectively connected with the unit front electrode patterns through the contact part, and are separated from one another by the separating part.

5. 发明申请

WO2008105637A1 SUBSTRATE SUPPORT FRAME, AND SUBSTRATE PROCESSING APPARATUS INCLUDING AND METHOD OF LOADING AND UNLOADING SUBSTRATE USING THE SAME 审中-公开
标题翻译：基板支撑框架，以及基板加工装置及其装载和卸载基板的方法
公开(公告)号：WO2008105637A1
公开(公告)日：2008-09-04
申请号：PCT/KR2008/001152
申请日：2008-02-27
申请人： JUSUNG ENGINEERING CO., LTD. , LEE, Yong Hyun
发明人： LEE, Yong Hyun
IPC分类号： H01L21/683
CPC分类号： H01L21/68735 , H01L21/68742
摘要： A substrate support frame for loading or unloading a substrate on or from a susceptor in a chamber, wherein the substrate support frame is disposed over the susceptor, comprises a body supporting a boundary portion of the substrate; a first opening through a center portion of the body and exposing a center portion of the susceptor; and a second opening corresponding to one side of the body, wherein the substrate is disposed on the body through the second opening to overlap the center portion of the susceptor.
摘要翻译：一种衬底支撑框架，用于在腔室中或从基座上装载或卸载衬底，其中所述衬底支撑框架设置在所述基座上方，包括支撑所述衬底的边界部分的主体; 穿过所述主体的中心部分并暴露所述基座的中心部分的第一开口; 以及对应于所述主体的一侧的第二开口，其中所述基板通过所述第二开口设置在所述主体上，以与所述基座的中心部分重叠。

6. 发明申请

WO2012165689A1 SOLAR CELL AND METHOD FOR MANUFACTURING THE SAME 审中-公开
标题翻译：太阳能电池及其制造方法
公开(公告)号：WO2012165689A1
公开(公告)日：2012-12-06
申请号：PCT/KR2011/004409
申请日：2011-06-16
申请人： JUSUNG ENGINEERING CO., LTD. , KIM, In Ki , KIM, Sung Bae , KIM, Yong Hyun , PYUN, Seung Cheol , HAM, Chang Woo
发明人： KIM, In Ki , KIM, Sung Bae , KIM, Yong Hyun , PYUN, Seung Cheol , HAM, Chang Woo
IPC分类号： H01L31/18 , H01L31/042
CPC分类号： H01L31/0463 , Y02E10/50
摘要： Disclosed are a solar cell and a method for manufacturing the same. The method includes forming a back electrode on a substrate, forming an anti-diffusion layer on the back electrode, performing primary laser scribing to divide the back electrode into a plurality of unit back electrodes, performing secondary laser scribing along one side of a first line formed by the primary laser scribing such that a process region of secondary laser scribing overlaps the first line to remove a burr produced by the primary laser scribing, and performing tertiary laser scribing along the other side of the first line such that a process region of tertiary laser scribing overlaps the first line to remove the burr.
摘要翻译：公开了一种太阳能电池及其制造方法。该方法包括在基板上形成背面电极，在背面电极上形成反扩散层，进行一次激光划线，将背面电极分割为多个单位背面电极，沿第一行的一侧进行二次激光划线通过主激光划线形成，使得二次激光划线的处理区域与第一线重叠以除去由主激光划线产生的毛刺，并且沿着第一线的另一侧进行三次激光划片，使得第三线激光划线与第一行重叠以除去毛刺。

7. 发明申请

WO2009008673A2 SUBSTRATE HEATING APPARATUS 审中-公开
标题翻译：基板加热装置
公开(公告)号：WO2009008673A2
公开(公告)日：2009-01-15
申请号：PCT/KR2008/004060
申请日：2008-07-10
申请人： JUSUNG ENGINEERING CO., LTD. , PARK, Won Seok , KIM, Ki Duck , LEE, Yong Hyun , CHOI, Seung Dae
发明人： PARK, Won Seok , KIM, Ki Duck , LEE, Yong Hyun , CHOI, Seung Dae
IPC分类号： H01L21/324
CPC分类号： H01L21/67115
摘要： A substrate heating apparatus is provided. The substrate heating apparatus includes a chamber, a substrate supporting unit configured to support at least one substrate where a thin film is formed on the top surface thereof, and at least one heating unit disposed in a region adjacent to the rear surface of the substrate. The heating unit includes a plurality of reflecting units arranged under the substrate, at least one lamp heating unit disposed inside the plurality of reflecting units, and a short- wavelength blocking layer disposed on the lamp heating unit. By providing the lamp heating unit under the substrate where the thin film or pattern is formed on the top surface, and supplying heat energy to the rear surface of the substrate, it is possible to prevent the degradation in efficiency of the thin film, such as degradation of the thin film formed on the top surface of the substrate due to the heat source or the peeling of the thin film due to the temperature deviation between the substrate and the thin film. Furthermore, the heat energy is widely spread out at the central region of the rear surface of the substrate, and the heat energy is focused at the edge region of the substrate, thereby heating the large-sized substrate uniformly.
摘要翻译：提供了一种基板加热装置。该基板加热设备包括腔室，基板支撑单元和至少一个加热单元，基板支撑单元被构造为支撑至少一个基板，其中，在基板的顶表面上形成有薄膜，并且至少一个加热单元设置在与基板的后表面相邻的区域中。加热单元包括布置在基板下方的多个反射单元，布置在多个反射单元内的至少一个灯加热单元以及布置在灯加热单元上的短波长阻挡层。通过将灯加热单元设置在顶表面上形成有薄膜或图案的基板下，并且将热能供应到基板的背表面，可以防止薄膜的效率降低，例如由于热源或由于衬底和薄膜之间的温度偏差导致的薄膜剥离而在衬底的顶表面上形成的薄膜退化。此外，热能广泛散布在基板后表面的中央区域，并且热能集中在基板的边缘区域，从而均匀地加热大尺寸基板。

8. 发明申请

WO2008147116A3 SOLAR CELL AND METHOD OF FABRICATING THE SAME 审中-公开
公开(公告)号：WO2008147116A3
公开(公告)日：2008-12-04
申请号：PCT/KR2008/003010
申请日：2008-05-29
申请人： JUSUNG ENGINEERING CO., LTD , HONG, Jin , KIM, Jae Ho , SHIN, Yong Woo
发明人： HONG, Jin , KIM, Jae Ho , SHIN, Yong Woo
IPC分类号： H01L31/04 , H01L31/042
摘要： A solar cell includes a first electrode on a substrate; a plurality of pillars on the first electrode; a semiconductor layer on the first electrode, wherein a surface area of the semiconductor layer is greater than a surface area of the first electrode; and a second electrode over the semiconductor layer.

9. 发明申请

WO2008147113A2 HIGH EFFICIENCY SOLAR CELL, METHOD OF FABRICATING THE SAME AND APPARATUS FOR FABRICATING THE SAME 审中-公开
标题翻译：高效太阳能电池及其制造方法及其制造方法
公开(公告)号：WO2008147113A2
公开(公告)日：2008-12-04
申请号：PCT/KR2008/002999
申请日：2008-05-29
申请人： JUSUNG ENGINEERING CO., LTD , KIM, Jae Ho
发明人： KIM, Jae Ho
IPC分类号： H01L31/042
CPC分类号： H01L31/03685 , H01L31/022466 , H01L31/03762 , H01L31/0745 , H01L31/202 , H01L31/208 , Y02E10/545 , Y02E10/548 , Y02P70/521 , Y10T29/41
摘要： A method of fabricating a solar cell includes: sequentially forming a first electrode and a first impurity-doped semiconductor layer on a transparent substrate; forming a first intrinsic semiconductor layer on the first impurity-doped semiconductor layer; heating the first intrinsic semiconductor layer to form a second intrinsic semiconductor layer; and sequentially forming a second impurity-doped semiconductor layer and a second electrode on the second intrinsic semiconductor layer.
摘要翻译：一种制造太阳能电池的方法包括：在透明基板上依次形成第一电极和第一杂质掺杂半导体层; 在所述第一杂质掺杂半导体层上形成第一本征半导体层; 加热第一本征半导体层以形成第二本征半导体层; 并在第二本征半导体层上依次形成第二杂质掺杂半导体层和第二电极。

10. 发明申请

WO2007142439A1 METHOD OF TRANSFERRING SUBSTRATE USING VACUUM ABSORPTION 审中-公开
标题翻译：使用真空吸收传输基板的方法
公开(公告)号：WO2007142439A1
公开(公告)日：2007-12-13
申请号：PCT/KR2007/002692
申请日：2007-06-04
申请人： JUSUNG ENGINEERING CO., LTD , KIM, Joung Sik , KWON, Gi Chung , YANG, Chang Sil
发明人： KIM, Joung Sik , KWON, Gi Chung , YANG, Chang Sil
IPC分类号： H01L21/68
CPC分类号： H01L21/67751 , H01L21/67092 , H01L21/6838
摘要： A method of transferring a substrate disposed on a plurality of substrates as an uppermost substrate using a transfer apparatus including first and second picker groups includes: a first step of absorbing and lifting a first side of the substrate by the first picker group; a second step of absorbing and lifting a second side of the substrate by the second picker group; and a third step of moving up and transferring the substrate by the first and second picker groups.
摘要翻译：使用包括第一和第二拾取器组的转印装置将设置在多个基板上的基板作为最上面的基板转印的方法包括：第一步骤，通过第一拾取器组吸收和提升基板的第一侧; 第二步骤，通过第二拾取器组吸收和提升衬底的第二面; 以及通过第一和第二拾取器组向上移动并转印衬底的第三步骤。

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